The invention provides a grid controlled Schottky junction tunneling field effect transistor, which comprises a substrate, a channel layer, a metal source region, a second semiconductor material layer, a drain region, step grid stacks and one-layer or multi-layer side walls, wherein the channel layer is formed on the substrate and made of a first semiconductor material, and the channel layer is provided with a channel region; the metal source region is formed in the channel layer and adjacent to the channel region, wherein the metal source region and the channel region form a Schottky junction; the second semiconductor material layer is formed on the first region of the channel layer; the drain region is formed in the second region of the second semiconductor material layer; the step gridstacks are formed on the third region of the channel layer and on the fourth region of the second semiconductor material layer; and the one-layer or multi-layer side walls are formed on two sides of the step grid stacks. The semiconductor structure provided by the invention has better switching property and high frequency property.