Film system structure for laser and infrared two-waveband high-reflection film and preparation method of film system structure

Abstract

The invention relates to a film system structure for a laser and infrared two-waveband high-reflection film and a preparation method of the film system structure. The film system structure consists of twelve layers of films from inside to outside and is made from the combination of metal and four dielectric film materials SiO, Al, YbF3 and ZnS. The film system of the film system structure integrates the characteristic of wide reflection zone of a metal reflection film and the characteristic of high reflectivity of a dielectric reflection film; the reflectivity of the film system is higher than 95% for the waveband being 7Mum-11Mum and higher than 99% for the waveband being 1.064Mum; an optical device plated with the film system can be used for instruments of laser and infrared common-optical-path optical system; and the film system structure has the characteristic of high reflectivity for the two wavebands and meanwhile has a high laser induced damage threshold, thus having significance for improving the performance of the optical device and reducing the weight and the size of the optical device.

Description

technical field

[0001] The invention belongs to the optical film manufacturing technology, and relates to a film system structure used for laser and infrared dual-band high-reflection film, and also relates to a preparation method of the film system structure. Background technique

[0002] Laser has the characteristics of good monochromaticity, good interference, high brightness and directivity, and is increasingly used in military equipment and civilian fields. Laser and infrared dual-band high-reflection coatings are used in laser and infrared "two-light-in-one" optical systems. Ordinary dual-band reflection coatings are metal films. The disadvantages are low reflectivity in the laser band and poor laser damage threshold. Contents of the invention

[0003] The object of the present invention is to provide a film system structure for laser and infrared dual-band high reflection film that can improve the reflectivity and damage threshold of the film layer in the laser band...