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Method for improving laser damage threshold of near-infrared high-reflective film

A technology of damage threshold and high reflection film, which is applied in ion implantation plating, metal material coating process, coating, etc., can solve the problems of insignificant effect, low efficiency, high cost, etc., and achieve threshold increase, low cost, high efficiency effect

Active Publication Date: 2014-09-10
TONGJI UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Continuing to reduce the size and density of nodules requires considerable cost and is inefficient and ineffective
However, experiments have proved that even for high-reflection coatings plated at a relatively high cost, nodules are still the bottleneck that limits the increase of its threshold.

Method used

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  • Method for improving laser damage threshold of near-infrared high-reflective film
  • Method for improving laser damage threshold of near-infrared high-reflective film
  • Method for improving laser damage threshold of near-infrared high-reflective film

Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0034] We choose nodules with particle sizes of 0.6, 1.0, 1.5, and 2.0um as the experimental objects. Calculate the opening angle for each size of nodule. We choose a flat-rotating coating machine, and our nodule geometry meets: Table 1 shows the maximum incident angle calculated according to formula (3).

[0035] Table 1

[0036] Seed source particle size 0.6um 1.0um 1.5um 2.0um maximum angle of incidence 30.4° 40.1° 50.8° 61.7°

[0037] Selected materials: high refractive index material is HFO2, low refractive index material is SIO2; working wavelength is 1064nm; initial film system: S / 1.28(HL)^18(HL)^182L / A; control wavelength is 1150nm; optimization results It is: the total physical thickness is about 9um, T>99%, and the reflection band angular width: 65°;

[0038] Take JGS1 quartz glass as the substrate, first put it into the cleaning solution and ultrasonically clean it for 15 minutes, take it out and blow it dry with high-purity nitrog...

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Abstract

The invention relates to a design method for improving the laser damage threshold of a near-infrared high-reflective film, and belongs to the field of film optics, mainly aiming at a main bottleneck, namely a knot, influencing the threshold of a high-reflective film. The threshold of the knot determines the threshold of the whole film. A current technological means for improving the threshold of the film is mainly to eliminate the knob, namely, to reduce the density and the size of the knob as much as possible to increase the threshold of the film. But under current technical conditions, process difficulty to eliminate the knob is large, the cost is high and the knob cannot be completely eliminated. The invention provides a method for directly increasing the knob threshold to improve the threshold of the film. Both theory and practices prove that an electric field plays an important role for the damage characteristics of the knob, and the electric field in the knob is related to the geometric characteristics and spectral characteristic information of the knob. The damage threshold of the knob can be increased by changing designs of film systems to reduce the intensity of the electric field of the knob. The method is characterized by being high in pertinence, high in efficiency, and simple and feasible.

Description

technical field [0001] The invention relates to an optical film, in particular to a method for improving the laser damage threshold of a near-infrared high-reflection film. Background technique [0002] In high-power laser systems, laser thin films with high damage thresholds are key optical components in high-power laser systems and one of the key factors in the design of large laser devices. Their anti-laser damage threshold and damage characteristics are limiting the further development of high-power laser systems. An important bottleneck of the laser system and one of the important factors affecting the stability and service life of the laser system. A large number of studies at home and abroad have shown that for nanosecond laser-based thin films, the main factors that determine the damage threshold are the size of the film's absorption and the number of defects. The nodule defect is one of the most limiting factors affecting the damage threshold of strong laser thin f...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/30C23C14/08C23C14/54
Inventor 程鑫彬阿卜杜萨拉木·图尼亚孜焦宏飞鲍刚华王占山
Owner TONGJI UNIV
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