High-reflection film for 10 kW semiconductor laser and preparation method thereof

A high-reflection film and laser technology, applied in the field of optical reflective films, can solve the problems of increasing the difficulty of film thickness monitoring, increasing the number of film layers, and increasing the cost of coating, so as to improve the ability to resist laser damage and reduce the number of film layers. number, the effect of reducing the plating time
CN110441844AInactive Publication Date: 2019-11-12DONGGUAN UNIV OF TECH +1
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
DONGGUAN UNIV OF TECH
Publication Date
2019-11-12
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a high-reflection film for a 10 kW semiconductor laser and a preparation method thereof. A HfO2-TiO2-SiO2 multi-material film structure and the characteristic of large refractive index difference of aTiO2-SiO2 film combination are used to meet the requirement of high reflectivity under a few layers; the HfO2-SiO2 material has the characteristic of high laser damage resistance threshold, and a HfO2-SiO2 film stack is superimposed on the outermost part of the TiO2-SiO2 film stack, thereby improving the half-wave protection effect of laser damage resistance on TiO2-SiO2, achieving a few film layers, meeting the requirement of high reflectivity and improving the laser damage resistance of the film; the high-reflection film is prepared by ion beam assisted deposition, ametallic hafnium target, a metallic titanium target and a quartz glass sheet are used as coating materials, and the evaporation film is bombarded with an oxygen ion beam to obtain an oxide film, so that the compactness and stability of the film are improved.
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Description

technical field

[0001] The invention belongs to the technical field of optical reflection films, in particular to a high reflection film for a 10 kW semiconductor laser and a preparation method thereof. Background technique

[0002] Due to its good coherence, monochromaticity, high brightness and directivity, lasers are widely used in precision measuring instruments, photoelectric pod systems, low-light night vision systems, communications and information transmission, military, national defense and other fields. Optical components are used as One of the key foundations of laser technology has an irreplaceable position in the laser system, and it is also the most vulnerable to laser damage, so the ability of optical components to resist laser damage directly determines the effective output power of the laser in the entire laser system. Low; therefore, with the continuous improvement of laser output power and energy, higher and higher requirements are put forward for the refl...

Claims

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