The invention discloses a deep ultraviolet optics wave aberration detection apparatus and method; the apparatus comprises a quasi-molecular laser (1), an energy controller (2), a plano-concave cylindrical lens (3), a plano-convex cylindrical lens (4), a beam splitter (5), an energy detector (6), a first plane reflector (7), a diffractive optical element (8), a Fourier lens (9), a first collimating objective (10), a first 1/4 wave plate (11), a first 1/2 wave plate (12), a second plane reflector (13), a first focusing objective (14), an orifice plate (15), a second collimating objective (16), a second 1/2 wave plate (17), a polarizing splitting prism (18), a second 1/4 wave plate (19), a second focusing objective (20), a deep ultraviolet optical system (21) to be detected, a spherical reflector (22), a first relay lens (23), a second relay lens (24) and a Shack-Hartmann wavefront sensor (25). The deep ultraviolet optics wave aberration detection apparatus and method provide high-speed high-precision detection of system wave aberrations in integrated assembly and adjustment of deep ultraviolet optics.