The invention discloses a deep
ultraviolet optics wave aberration detection apparatus and method; the apparatus comprises a quasi-molecular
laser (1), an energy controller (2), a plano-concave
cylindrical lens (3), a plano-convex
cylindrical lens (4), a
beam splitter (5), an energy
detector (6), a first plane reflector (7), a diffractive optical element (8), a Fourier lens (9), a first collimating objective (10), a first 1 / 4 wave plate (11), a first 1 / 2 wave plate (12), a second plane reflector (13), a first focusing objective (14), an
orifice plate (15), a second collimating objective (16), a second 1 / 2 wave plate (17), a polarizing splitting
prism (18), a second 1 / 4 wave plate (19), a second focusing objective (20), a deep
ultraviolet optical
system (21) to be detected, a spherical reflector (22), a first
relay lens (23), a second
relay lens (24) and a Shack-Hartmann
wavefront sensor (25). The deep
ultraviolet optics wave aberration detection apparatus and method provide high-speed high-precision detection of
system wave aberrations in integrated
assembly and adjustment of deep ultraviolet
optics.