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Multifunctional high-efficiency laser damage test device and method in vacuum environment

A vacuum environment, high-efficiency technology, applied in the direction of testing optical properties, can solve the problems of breaking vacuum, low efficiency, single function, etc., and achieve the effect of saving time and high efficiency

Active Publication Date: 2013-07-31
TONGJI UNIV
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  • Application Information

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Problems solved by technology

Also, for some special film samples, the damage characteristics of laser irradiation from the back and the front are different. For such samples, it is necessary to open the vacuum chamber and reverse the direction of the sample during the test, which also destroys the vacuum degree. need to re-vacuum
Therefore, the current device and test method to realize the damage test in the vacuum environment is a waste of time, the efficiency is extremely low and the function is single

Method used

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  • Multifunctional high-efficiency laser damage test device and method in vacuum environment
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  • Multifunctional high-efficiency laser damage test device and method in vacuum environment

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Embodiment 1

[0031] Embodiment 1: see figure 1, Nd:YAG laser 1, He-Ne detection laser 2, pressure detection element 6, vacuum chamber 7, first CCD camera 10, high power microscope 12, motor system 14, tested sample 16, photoelectric detection element 18, second CCD Camera 19 and computer 20. The components of the vacuum cavity 7 include a laser incident window 3, a laser exit window 9, a detection laser entrance window 4, a detection laser exit window 17, a pressure detection window 5, a CCD camera monitoring window 11, a vacuum pump window 8, an offline observation window 13 and a rotating Sample stage 15. in:

[0032] The tested sample 16 is placed on the rotating sample stage 15 in the vacuum chamber 7 , and the vacuum chamber 7 is fixed on the motor system 14 .

[0033] The motor system 14 includes a motorized translation stage and a rotation motor.

[0034] The sample to be tested 16 together with the vacuum chamber 7 is controlled by an electric moving translation stage to move h...

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Abstract

The invention relates to a multifunctional high-efficiency laser damage test device and method in a vacuum environment. Five samples can be placed on a sample stage in a vacuum chamber at one time; the samples can be sequentially rotated to the laser irradiation position for testing laser damage by rotating the sample stage; online monitoring and judgment of damage conditions can be realized by using an online imaging and scattered light detection device of a CCD (Charge Coupled Device) camera and a pressure detection element; and the samples can also be rotated to an observation window and then the damage morphology of the samples is observed in an off-line manner and analyzed. Meanwhile, the function that front sides and back sides of the samples are respectively irradiated by laser can be achieved by using the rotation of the sample stage. The device is simple and easy to operate; according to the device, the data test time in the vacuum environment is greatly saved and the efficiency of damage test is increased; and meanwhile, test method and functions are diversified and comprehensive damage information can be obtained.

Description

technical field [0001] The invention relates to the field of testing the anti-laser damage performance of optical elements in a vacuum environment, in particular to a high-efficiency and multifunctional laser damage testing device and method in a vacuum environment. Background technique [0002] Optical components are widely used in laser processing, laser weapons, and high-power laser systems, and are essential components in optical systems. With the continuous improvement of laser output energy, the laser damage threshold of optical components has become a key factor restricting the further development of strong laser technology, and it is also a weak link that restricts the development of laser technology in the direction of high energy and high power. In order to deeply analyze the damage performance and damage mechanism of optical components and accurately evaluate the laser damage resistance of optical components, it is necessary to continuously develop and improve the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M11/02
Inventor 马彬马宏平程鑫彬鲍刚华宋智焦宏飞王占山
Owner TONGJI UNIV
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