The invention provides an off-axis angle precision measurement method, relates to the technical field of optical measurement, and solves the problems that in the prior art, a mechanical
contact type measurement method easily scratches a mirror surface and is low in resolution, an optical interference method depends on expensive elements and is easily interfered by the environment, and an
autocollimator rotary table method is limited in measurement range and low in
measurement cost. And a
laser tracker multi-point calibration method is high in equipment cost and complex in
data processing. According to the technical scheme, a photoelectric
theodolite, an off-axis mirror and a
laser interferometer are coaxially installed, a reference coordinate
system is established through the photoelectric
theodolite, it is ensured that light beams of the
laser interferometer always enter the center of the off-axis mirror by means of a six-dimensional adjusting platform, a detection light path is established, and space coordinates of a calibration point are secondarily measured through the photoelectric
theodolite; solving an off-axis angle value by combining a space coordinate
transformation algorithm; the device and the method have the advantages of high
measurement precision, avoidance of mirror surface damage, high environmental adaptability, large measurement range, high
automation degree and the like, and are suitable for off-axis angle precision measurement requirements in optical
system manufacturing and debugging.