The utility model discloses a Michelson interference high-precision optical micro-
measurement device based on vortex filtering, which relates to the technical field of precision measurement, and sequentially comprises a
light field modulation module, an
optical field detection module, a Michelson interference detection module, a Michelson interference detection module and a Michelson interference detection module along an
optical path, the interference measurement module comprises a
beam splitter, a reflector and a
Dove prism arranged in a reference light path, the
Dove prism enables the topological charges of the vortex beam to be reversed, and the
Dove prism and the vortex beam in the measurement light path form composite mode interference light; the
frequency domain filtering module is used for performing
frequency domain filtering purification on the interference light; and the
signal acquisition module is used for acquiring interference
light spot images. According to the utility model, topological charge inversion is realized through the Dove
prism, nanoscale displacement is linearly converted into macroscopic angle rotation of an interference pattern,
frequency domain purification is carried out in combination with frequency domain filtering, and the
signal-to-
noise ratio and the resolution are remarkably improved; the device is compact in structure, multi-stage amplification and purification of displacement signals are achieved through a pure optical means, and micro-displacement measurement with nanoscale precision can be achieved.