The invention discloses a PT symmetrical hot-pressing resistance MEMS
wind speed and
wind direction sensor. The sensor comprises four groups of PT symmetrical MEMS resonators which are orthogonally distributed and have hot-pressing resistance feedback; the PT symmetrical MEMS
resonator comprises two
cantilever beam resonators with completely same structures, a
coupling spring beam connected with the two resonators, and a
constant current source connected with one
resonator, each
cantilever resonator comprises two anchor areas, a
wide beam connected with the anchor areas, a
narrow beam with a
piezoresistive effect, a warped thin plate structure and external electrodes located on the two sides of the thin plate structure.
Wind speed and
wind direction signals are converted into rigidity change of the resonator array through mechanical action by means of a warped thin plate structure, and the rigidity change enables the PT symmetrical MEMS
system to deviate from an EP point, so that
system frequency splitting is caused. As the frequency splitting quantity of the PT symmetric
system is in direct proportion to the square root of the disturbance quantity, the
wind speed and direction sensor can detect tiny
wind speed signals, and has the advantages of very high sensitivity, simple process, high integration level and the like.