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379 results about "Coherence length" patented technology

In physics, coherence length is the propagation distance over which a coherent wave (e.g. an electromagnetic wave) maintains a specified degree of coherence. Wave interference is strong when the paths taken by all of the interfering waves differ by less than the coherence length. A wave with a longer coherence length is closer to a perfect sinusoidal wave. Coherence length is important in holography and telecommunications engineering.

Lateral-scanning interferometer with tilted optical axis

An interferometer scans the sample surface laterally with respect to the optical axis of the interferometric objective. The objective is tilted, so that the sample surface is placed at an angle with respect to the maximum coherence plane of the instrument. By moving the sample stage laterally, at an angle, through a point at a set distance from the objective on the objective's optical axis, rather than vertically along the optical axis, different parts of the object intersect the maximum coherence plane at different times as the surface passes through the coherence plane, the precise time depending on the profile of the surface. When the OPD of a point on the object's surface is greater than the coherence length of the light source, the intensity of light reflected from this point does not produce interference fringes. Therefore, the intensity registered by the detector is approximately constant. However, when the object point enters the zone of coherence, the interference effects modulate the intensity the same way as in a regular VSI procedure. As the object moves along the scanning direction, it also has a relative vertical speed with respect to the objective because of the tilt of the objective's optical axis with respect to the scanning plane; therefore, the lateral scanning motion produces an OPD variation as the vertical scan in a conventional system. As a result, light intensity data are acquired continuously as the test surface is scanned, thus elimination the need for stitching multiple sub-sets of data.
Owner:BRUKER NANO INC

Method and apparatus for reducing laser speckle using polarization averaging

A method and apparatus for reducing speckle uses polarization averaging. A polarizing beam splitter divides a first polarized laser output into a second polarized laser output and a third polarized laser output. A plurality of mirrors creates an optical path difference between the second and third polarized laser outputs. The optical path difference is at least about a coherence length for the first polarized laser output. The second and third polarized laser outputs are combined into a fourth laser output, which illuminates a depolarizing screen. If a human eye or an optical system having a intensity detector views the depolarizing screen, the eye or the intensity detector will detect reduced speckle, which results from uncorrelated speckle patterns created by the second polarized laser output and the third polarized laser output. A first alternative embodiment of the invention functions without the optical path difference being at least about the coherence length. In the first alternative embodiment, a piezoelectric transducer varies an optical path length by at least about a half wavelength of the first polarized laser output. By varying the optical path length by a sufficient frequency, the eye or the intensity detector will detect the reduced speckle. A second alternative embodiment combines two orthogonally polarized laser outputs, from two lasers, into a combined laser output. The combined laser output illuminates the depolarizing screen. A third alternative embodiment rotates the first laser output with a rotation frequency to form a rotating polarized laser output, which illuminates the depolarizing screen.
Owner:SILICON LIGHT MACHINES CORP

Self-calibrating optical fiber pressure, strain and temperature sensors

Broadband energy incident on a transducer having partially or fully reflective surfaces separated by a gap which is greater than the coherence length of the broadband energy but smaller than one-half a coherence length of a band of energy within said broadband energy causes a portion of the spectral content of the broadband energy corresponding to a coherence length greater than twice the gap length to exhibit interference effects while the average power of the broadband energy remains unaffected. Splitting energy reflected from the transducer into two beams which are filtered at preferably similar center frequencies but with different pass bands yields beams which are radically different in sensitivity to changes in gap length. Analyzing the beams to derive a ratio of powers (since source intensity and fiber attenuation in a common fiber are thus self-cancelling) allows high accuracy and high resolution absolute measurement of temperature, pressure or strain. Effects of any of these physical parameters which are not of interest in a measurement can be fully compensated or made arbitrarily insignificant in a simple transducer structure of extremely small size. Use of broadband energy permits measurement over greater lengths of optical fiber.
Owner:VIRGINIA TECH INTPROP INC

Laser irradiation device

In annealing a non-single crystal silicon film through the use of a linear laser beam emitted by a YAG laser of a light source, it is the object of the present invention to prevent heterogeneity in energy caused by an optical interference produced in the linear laser beam from having an effect on the silicon film. The laser beam is divided by a mirror 604 shaped like steps into laser beams which have an optical path difference larger than the coherence length of the laser beam between them. The divided laser beams are converged on an irradiate surface 611 by the action of a cylindrical lens array 605 and a cylindrical lens 606 to homogenize the energy of the laser beam in the length direction and to determine the length of the linear laser beam. On the other hand, the laser beams divided by a cylindrical lens array 607 are converged on the irradiate surface 611 by a cylindrical lens 608 and a doublet cylindrical lens 609 to homogenize the energy in the width direction of the laser beam and to determine the width of the linear laser beam. Interference fringes parallel to the width direction of the linear laser beam disappears in the linear laser beam by the action of a mirror 604 shaped like steps. If the silicon film is annealed by the linear laser beam while the linear laser beam is being shifted in the width direction of the linear laser beam, the silicon film is remarkably homogenized as compared with a conventional silicon film.
Owner:SEMICON ENERGY LAB CO LTD

Method and apparatus for gas discharge laser output light coherency reduction

A method and apparatus for producing with a gas discharge laser an output laser beam comprising output laser light pulses, for delivery as a light source to a utilizing tool is disclosed which may comprise a beam path and a beam homogenizer in the beam path. The beam homogenizer may comprise at least one beam image inverter or spatial rotator, which may comprise a spatial coherency cell position shifter. The homogenizer may comprise a delay path which is longer than, but approximately the same delay as the temporal coherence length of the source beam. The homogenizer may comprise a pair of conjoined dove prisms having a partially reflective coating at the conjoined surfaces of each, a right triangle prism comprising a hypotenuse face facing the source beam and fully reflective adjoining side faces or an isosceles triangle prism having a face facing the source beam and fully reflective adjoining side faces or combinations of these, which may serve as a source beam multiple alternating inverted image creating mechanism. The beam path may be part of a bandwidth measuring the bandwidths of an output laser beam comprising output laser light in the range of below 500 femtometers at accuracies within tens of femtometers. The homogenizer may comprise a rotating diffuser which may be a ground glass diffuser which may also be etched. The wavemeter may also comprise a collimator in the beam path collimating the diffused light; a confocal etalon creating an output based upon the collimated light entering the confocal etalon; and a detector detecting the output of the confocal etalon and may also comprise a scanning mechanism scanning the angle of incidence of the collimated light entering the confocal etalon which may scan the collimated light across the confocal etalon or scan the etalon across the collimated light, and may comprise an acousto-optical scanner. The confocal etalon may have a free spectral range approximately equal to the E95 width of the beam being measured. The detector may comprise a photomultiplier detecting an intensity pattern of the output of the confocal etalon.
Owner:CYMER INC

Device for measuring linewidth of narrow linewidth laser based on optical fiber time-delay self heterodyne method as well as method for measuring thereof

The invention discloses a device of measuring the line-width of a laser with narrow line-width and a method of measuring the line-width based on a optical fiber delay self-heterodyne method; in the hardware device, an optical fiber delay line is connected between a first and a second couplers; an acousto-optic modulator is connected between the first and the second couplers; the measured laser is connected to the input of the first coupler, and a photoelectric detector is connected to the output of the second coupler; the photoelectric detector is connected with a spectrum analyzer. In the line-width measurement, simulation models of the line-width triangle v of the laser and the spectrum-width triangle f of the photoelectric current heterodyne signal are built in the frequency shift delay self-heterodyne methodology, and the function relation between the line-width triangle v of the laser and the spectrum-width triangle f of the photoelectric current heterodyne signal is obtained fitting of the three-level proportion function model. The invention presents that with the short optical fiber delay self-heterodyne method, the device can eliminate the deficiency of greatly reduced measuring precision because of not enough delayed time in the delay self-heterodyne method when the length of the delay optical fiber is less than 6 times coherence length of the laser, so as to provide an effective method of precisely measuring the line-width of the laser with narrow line-width in projects.
Owner:BEIHANG UNIV
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