Heavy caliber paraboloidal mirror checking system

Abstract

The invention provides a large-diameter paraboloidal mirror detecting system, comprising a Fizeau interferometer, a high precision plane reflector, a detected paraboloidal mirror, an electrically controlled translation platform and a computer control system, wherein, the plane deflector realizes autocollimation detection to the central part of the paraboloidal mirror, and then the plane deflector is removed; the electrically controlled translation platform is controlled through the computer to move the Fizeau interferometer, so that reference spheric wave fronts of different curvature radiuses generated by a standard lens can be matched with a corresponding annular region outside the diameter of the plane deflector of a detected paraboloid, and phase data corresponding to resolvable interference fringes can be extracted through Fizeau interferometer data processing software on the computer system; acquired sub-aperture test data can be processed by the annular sub-aperture 'stitching' algorithm, and data acquired from the autocollimation detection of the plane deflector undergoes a full aperture wave front reconstruction to acquire surface shape information of the detected paraboloid. The large-diameter paraboloidal mirror detecting system provides an effective detecting means for the development of a large-diameter paraboloidal mirror and an ultra-large-diameter paraboloidal mirror, and has higher application value.

Description

technical field [0001] The invention relates to an optical detection system, in particular to a rotationally symmetrical large-diameter parabolic mirror detection system, which belongs to the technical field of advanced optical manufacturing and detection. technical background [0002] The two-mirror optical system with a parabolic mirror as the main mirror has been more and more widely used in astronomy, space optics and military fields. With the continuous development of optical manufacturing technology, the diameter of the parabolic mirror is getting larger and larger. The manufacture of large-diameter parabolic mirrors requires corresponding detection technology. However, there are still many challenges in the high-precision inspection of large-aperture parabolic mirrors. [0003] In the polishing process of large-diameter parabolic mirrors, the detection methods involved in the usual quantitative detection system include the self-collimation method and the compensator ...

AI Technical Summary

Problems solved by technology

[0006] The technical problem to be solved by the present invention is to overcome the deficiencies of the prior art and provide a large-diameter parabolic mirror detection system that combines the annular sub-aperture method and the self-collimation detection method. The tool can effectively solve the problems of difficult manufacturing, high cost, and sensitive assembly error of the auxiliary components (large-caliber high-precision flat mirror, zero compensator) in the existing quantitative detection technology, and has a simple structure, low inspection cost, and A certain dynamic test range

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