System capable of solving inclination problem of narrow field of view lens in wave aberration detection and method thereof
A small field of view and wave aberration technology, applied in the field of optical detection, can solve the problems of difficult control, poor operability and repeatability, and high experience requirements for accurate detection of small field of view lens wave aberration. Good performance and improved detection efficiency
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[0026] see figure 1 , the present invention provides a system that can solve the problem of optical axis deflection in the wave aberration detection of small field of view lenses. The self-collimating optical path composed of glass, the self-collimating optical path composed of the self-collimating theodolite 6 and the plane mirror 5, and the self-collimating optical path composed of the laser interferometer 1 and the plane mirror 5. The verticality of the optical axis of the small field of view lens 3 to be measured and the plane reflector 5 is ensured by the self-collimation of the autocollimation theodolite 6 and the optical axis of the small field of view lens to be tested respectively pointing to the tooling 4 and the plane reflector 5, and then through the laser The self-collimation of the interferometer 1 and the plane mirror 5 ensures the verticality of the optical axis of the laser interferometer output beam and the plane mirror 5, thereby realizing the alignment of t...
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