Substrate
processing device comprising: a substrate transport chamber configured to contain a sealed environment and having at least one closable substrate transport opening arranged to connect the substrate transport chamber to a substrate
processing module or- a
process module connects to load and unload the substrate
processing module with one or more substrates through the at least one closable substrate transport opening; a substrate transport
robot for loading and unloading the substrate processing module with the one or more substrates through the at least one closable substrate transport opening, wherein the substrate transport
robot has an arm with at least one articulated arm section and an end
effector within the substrate transport chamber, wherein the end
effector has a substrate holding
station for holding the one or more substrates on it during transport via the articulated connection of the at least one articulated arm section; a substrate buffer within the substrate transport chamber, wherein the substrate buffer is separate from and distinct from the substrate transport
robot, with one or more buffer compartments or...floors that are separate and distinct from each substrate holding
station of the substrate transport robot, and wherein the one or more buffer compartments in the substrate transport chamber are movable independently of the movement of each substrate holding
station of the substrate transport robot; and a drive section with at least one motor and a coaxial
drive shaft spindle, wherein the at least one articulated arm connection is connected at a rotary joint to a
drive shaft of the coaxial
drive shaft spindle, such that the at least one articulated arm connection rotates about an axis of the coaxial drive shaft spindle; wherein the substrate buffer is connected at another rotary joint to another shaft of the coaxial drive shaft spindle, such that the substrate buffer rotates about the axis of the coaxial drive shaft spindle, which is a common axis of rotation of both the at least one articulated arm member and the substrate buffer.