446 results about "Small systems" patented technology

Embodiments generally provide an apparatus and method for processing substrates using a multi-chamber processing system (e.g., a cluster tool) that has an increased system throughput, increased system reliability, substrates processed in the cluster tool have a more repeatable wafer history, and also the cluster tool has a smaller system footprint. In one embodiment, the cluster tool is adapted to perform a track lithography process in which a substrate is coated with a photosensitive material, is then transferred to a stepper/scanner, which exposes the photosensitive material to some form of radiation to form a pattern in the photosensitive material, which is then removed in a developing process completed in the cluster tool. In track lithography type cluster tools, since the chamber processing times tend to be rather short, and the number of processing steps required to complete a typical track system process is large, a significant portion of the time it takes to process a substrate is taken up by the processes of transferring the substrates in a cluster tool between the various processing chambers. In one embodiment of the cluster tool, the cost of ownership is reduced by grouping substrates together and transferring and processing the substrates in groups of two or more to improve system throughput, and reduces the number of moves a robot has to make to transfer a batch of substrates between the processing chambers, thus reducing wear on the robot and increasing system reliability. In one aspect of the invention, the substrate processing sequence and cluster tool are designed so that the substrate transferring steps performed during the processing sequence are only made to chambers that will perform the next processing step in the processing sequence. Embodiments also provide for a method and apparatus that are used to improve the coater chamber, the developer chamber, the post exposure bake chamber, the chill chamber, and the bake chamber process results. Embodiments also provide for a method and apparatus that are used to increase the reliability of the substrate transfer process to reduce system down time.

An integrated voice gateway system for use within a company which can route a voice telephone call between parties at two different locations over an IP network or over the PST NETWORK. The system can route a voice telephone call from a first location within the system to a second location within the system via the IP network, and then from the second location to a third location via the PST NETWORK. The integrated voice gateway system includes a gateway server which serves as an intranet/Internet telephony gateway. The gateway server routes intra-company voice or facsimile (fax) calls, over the company's intranet or the public Internet. The gateway server provides an alternate voice network to the PST NETWORK for a company. This alternate network is provided at a much lower cost. The gateway server is a combination of hardware and software components which reside on a PC server platform. The gateway server is coupled to a customer premise telephone system, i.e. a PBX via a T1 or E1 trunk for larger systems, or an analog trunk for smaller systems. The gateway server is coupled to the company's intranet via industry standard connections. The gateway servers in a multi-site company are coupled together via the company's intranet or wide area network (WAN) into a gateway network. The gateway server uses PBX call status links to provide many unique and useful features which are otherwise unavailable. The gateway server uses T1 inband ANI, PRI, QSIG or industry standard CTI applications programming interfaces (API) and works with any PBX which supports any of these call status links. The gateway server is equipped with a database of user and gateway objects and attributes, and provides many unique features including caller's name based on caller phone number, address translation, gateway network routing information, user authentication, etc. This database can be integrated with industry standard enterprise directory services systems including any directory which supports the Lightweight Directory Access Protocol (X.500) (LDAP) interface.

Embodiments generally provide an apparatus and method for processing substrates using a multi-chamber processing system (e.g., a cluster tool) that has an increased system throughput, increased system reliability, substrates processed in the cluster tool have a more repeatable wafer history, and also the cluster tool has a smaller system footprint. In one embodiment, the cluster tool is adapted to perform a track lithography process in which a substrate is coated with a photosensitive material, is then transferred to a stepper/scanner, which exposes the photosensitive material to some form of radiation to form a pattern in the photosensitive material, which is then removed in a developing process completed in the cluster tool. In track lithography type cluster tools, since the chamber processing times tend to be rather short, and the number of processing steps required to complete a typical track system process is large, a significant portion of the time it takes to process a substrate is taken up by the processes of transferring the substrates in a cluster tool between the various processing chambers. In one embodiment of the cluster tool, the cost of ownership is reduced by grouping substrates together and transferring and processing the substrates in groups of two or more to improve system throughput, and reduces the number of moves a robot has to make to transfer a batch of substrates between the processing chambers, thus reducing wear on the robot and increasing system reliability. In one aspect of the invention, the substrate processing sequence and cluster tool are designed so that the substrate transferring steps performed during the processing sequence are only made to chambers that will perform the next processing step in the processing sequence. Embodiments also provide for a method and apparatus that are used to improve the coater chamber, the developer chamber, the post exposure bake chamber, the chill chamber, and the bake chamber process results. Embodiments also provide for a method and apparatus that are used to increase the reliability of the substrate transfer process to reduce system down time.

The invention discloses an automatic sign-in machine and an automatic sign-in application technical scheme. The automatic sign-in machine comprises a singlechip smallest system, a multi-cell storage cabinet, a global system for mobile communication (GSM) module and the like. By means of an automatic sign-in machine address code setting scheme, a mail bar code setting and applying scheme, a short message order format scheme, a pick-up password generation and storage scheme, a multi-logistics company shared scheme and the like, the automatic sign-in application technical scheme can achieve functions of automatic sorting, classified collecting, automatic sign-in and delivery notice of mails in the logistics process, can expand logistics automatic process to deliver taking link of addressees, solves 'the last one mile problem' of logistics express delivery, and greatly improves the efficiency of the logistics express delivery. The automatic sign-in machine can further apply encrypted two-dimension codes to protect personal information of the addressees in the logistics process. Besides, the automatic sign-in machine and the automatic sign-in application technical scheme are low in production and use cost, convenient to maintain, low in energy consumption, stable in performance, simple in operation process and favorable for popularization and application.

The invention discloses a technique for treating the tail gas of an acrylonitrile device, which is suitable for treating acrylonitrile tail gas discharged by the acrylonitrile device. The technique is characterized in that: after free water is separated out by a gas-liquid separator, the acrylonitrile tail gas is mixed with air, a noble metal monolithic catalyst is taken as a catalyst and catalytic oxidation reaction is carried out to turn harmful volatile organic compounds into carbon dioxide and water; then a selective reduction monolithic catalyst is taken as a catalyst and selective catalytic reduction reaction with added ammonia is carried out to reduce nitrogen oxide in the tail gas into nitrogen and water. The technique has the advantages of simple technique, turning the harmful volatile organic compounds and nitrogen oxide in the tail gas into carbon dioxide, nitrogen and water, without secondary pollution, the test results totally meeting the environmental protection control requirements of the State Standard of China, adopting a tail gas heat exchanger to recycle reaction heat to heat input tail gas, needing no additional fuel during the normal operation process, small system resistance and low operation cost.

The invention discloses a random access method in a wireless network and user equipment. The random access method comprises the following steps: obtaining an estimator of distance from UE (user equipment) to a base station; determining the random access time advance of the UE according to the estimator; when the random access is initiated, enabling the UE to send a random access preamble code to the base station according to determined time lead; and performing random access process. According to the scheme, the random access under a big-area coverage scene can be effectively realized, the operation is simple and reliable, small system bandwidth is occupied, and the resource use ratio is higher.

The present invention provides a system and method for treating wastewater in which the majority of solids and biological oxygen demand compounds are separated from the wastewater feed using a primary separation process, to produce a solids phase and a water phase. The solids phase is irradiated to reduce the level of pathogens such that it is safe to use as a soil substitute and/or additive so that the solids can thus be disposed of in an environmentally-friendly manner. In additional embodiments, the solids that have been disinfected by radiation are mixed with a suitable inert filler material to produce a soil substitute, fertilizer, compost, or other soil additive. The liquid phase is treated in a substantially smaller system than would be required for treating the full-strength wastewater that can include a suspended media biological regeneration reactor system. The liquid treatment system can include a high flux adsorbent material treatment system integrated with a low flux adsorbent material biological regeneration reactor.

A posture-fixing system for the mini-system which can realize the arbitrary movement; the system is characterized in that comprises a micro-magnetic sensor MMS module, a micro-inertia measurement unit MIMU module, a GPS module and a Kalman filtering module. Under the arbitrary state of motion of the mini-system, the MIMU module can work out the gravitational acceleration of the mini-system via the strapping of the output data and the navigation algorithm; the MMS module revolves the roll maneuver angle, the pitch angle and the 3D attitude information of the course angle for the mini-system via the real-time posture-fixing algorithm; also, the constant false alarm CFAR wave filter is adopted to filter the noise in the output speed and the acceleration information of the GPS. On one hand, the 3D posture information is sent to the Kalman filtering module for combination with the position and velocity information of the GPS, so as to correct the MIMU error from time to time via the information mixing algorithm, on the other hand, 3D posture information is adopted to replace the Cnb coordinate transfer matrix in real time; the Cnb coordinate transfer matrix will be delivered to the MIMU module and the GPS module, so that the horizontal coordinate system information is transferred to the carrier coordinates. The utility model introduces the iterative solution among the GPS, the MIMU and the MMS, so as to ascertain the direction of the moving vehicle under arbitrary state of motion. Therefore, the wide application prospects are available.

The invention is concerned with the unit, the setup, the system and the method of power supply. The method includes: cuts off the connection between the power supply managing unit, the battery and the non-small system module but connects the module with the external power electrically, when it is being detected. The invention does not request the charging control module of the power supply managing unit for charging the non-small system module whether the external power supply on-position, that reduces the electric current running through the power control module. It also reduces the frequency for charging by applying external power supply that prolong the life cycle of the battery.

The invention discloses an automatic IP (Internet protocol) address allocation method based on geographical position in mobile ad hoc network, wherein the network is divided into grid structures of multiple layers, and a temporary IP address field is pre-defined for each grid. The allocation method comprises the following steps: when a node joins the network, randomly selecting a temporary IP address from the temporary IP address field of the grid in which the node is located, and performing DAD repeated address detection to avoid conflict with the selected temporary IP address for sure; after the temporary IP address of the node is successfully configured, sending an IP inquiry message, avoiding IP address conflict, and configuring a formal IP address; after successful configuration, if the formal IP address is different from the temporary IP address, releasing the temporary IP address; and finishing the selection of a proxy node through an HELLO beacon and REG registration information by the node. The method provided by the invention has small system overhead and good expansibility, and can realize recovery of IP address and avoid address leakage.

The invention relates to a detector for the end surface of an optical fiber connector. In the detector, an optical signal of a laser source is split into a reference light path and an object light path, wherein reference light is focused and reflected to enter into a photoelectric converter and then transmitted into a computer through a USB interface; object light is reflected and focused, and then enters to the end surface of a detected optical fiber connector on an optic fiber connector holder through a light incidence port of the optical fiber connector; the transmitted object light and the reflected reference light which are reflected and amplified by the optical signal interferes on the symmetrical surface of the incidence surface of a beam-splitting mirror on which the detected optical fiber is reflected, and then the transmitted object light and the reflected reference light are acquired by another photoelectric converter and transmitted into the computer through the USB interface; and after the optical signal is acquired, the computer carries out de-noising on a hologram by using software and reconstitutes a three-dimensional hologram according to a two-step phase shift method. The invention can not only detect parameters of ovality, concentricity, and the like of a connector fiber core and a connector cover, but also reconstitute the three-dimensional topography on the surface of the end surface fiber core area and monitor the surface appearance and the height of the fiber core; in addition, the invention has high detection accuracy, small system size and high automation degree and is friendly in a user interface and convenient to use.

It's a kind of common serial communication interface commission apparatus. It comprises computer module (101), micro controller small system (102), the first communication module (105), the second communication module (106), the N communication module (107), programmed logical module (103), clock module (104); the computer module (101) finishes the man-machine interface, and communicates with micro controller small system (102) through RS232 interface, so to finish the issue of deployment command or send and receive data; the micro controller small system (102) responds the control and subsequence to each communication module; the programmed logical module (103) finishes the function that system chip selecting and address decoding; the clock module (104) can synchronize the clock in this apparatus and external clock. This invention makes the commission of common serial communication programmed and modularized.

The invention relates to a method for reactive power optimization of an electric power system on the basis of a clone-particle swarm hybrid algorithm. The method comprises the following steps of: solving a trend by adopting a Newton-Laphson algorithm; superimposing network losses of each branch to obtain the network losses of a whole system; and introducing a clonal operator of a clonal algorithminto a standard particle swarm algorithm. The clone-particle swarm hybrid algorithm has stronger capacity of searching the globally optical solution; and compared with a method for the reactive poweroptimization of the electric power system on the basis of the standard particle swarm algorithm, the method for the reactive power optimization of the electric power system on the basis of the clone-particle swarm hybrid algorithm obtains a smaller system network loss value, and can reduce the running cost of an electric network to a greater degree.

The present invention provides a mass analyzing magnet which can bend a very wide charged particle ribbon beams through angles between 90 to 200 degrees. The shorter dimension of the ribbon beam is aligned with the magnetic field. The magnet can focus the longer dimension of the ribbon beam through a resolving slot inside the magnet for mass or momentum analysis. The magnet pole is shaped to increase the mass resolving power and to provide the focusing force in the direction of the shorter dimension of the ribbon beam. This magnet can achieve high mass resolving power with very small system aberrations for very wide ribbon beam. This feature is of significant value, for example, in the ion implantation industry. The ribbon beam width can be 300 mm, 450 mm and even 1000 mm. Integrated with the present invention, the ion implanter systems can be built to provide mass analyzed ribbon beams for various applications. The system will have much lower cost and much better ribbon beam quality than the ion implanters which are using conventional mass analyzing magnet.

The invention discloses a high-CO high-conversion-rate isothermal shift reactor and a process using the high-CO high-conversion-rate isothermal shift reactor. The isothermal shift reactor comprises a shell, an inner cavity, an upper tube sheet and a lower tube sheet welded with water tubes, and a bottom tee joint; shell covers are respectively arranged at the upper end and the lower end of the shell, a water chamber and a steam chamber are arranged at the upper part of the inner cavity, an upper catalyst bed is arranged in the middle of the inner cavity, a lower catalyst bed is arranged at the lower part of the inner cavity, the water tubes are distributed on the upper catalyst bed, no water tube is arranged on the lower catalyst bed, a center tube is arranged in the inner cavity, the upper part of the center tube is located in the upper catalyst bed, the lower part of the center tube is located in the lower catalyst bed, the bottom tee joint is provided with an unreacted gas inlet, an exchange gas outlet and a steam and water mixture inlet, a steam and water mixture spray tube is sleeved in the center tube, and the reactor is equipped with different technological processes for the unreacted gas with different CO% and the converted gas with different CO%. The high-CO high-conversion-rate isothermal shift reactor can achieve low temperature, high CO, high conversion rate and small system resistance.

The invention discloses a networking navigation radar target tracking system based on data fusion. The system comprises at least one radar front end, at least one radar terminal and an Ethernet. The radar front end and the radar terminal are in bidirectional data transmission through the Ethernet. The radar front end comprises an antenna, a transceiver, a data acquisition module, a signal preprocessor module and a control command processing module. The radar terminal comprises a display unit, a signal processing unit and a control unit. The transceiver generates radio-frequency pulses which are radiated to the space through an antenna. The system belongs to a trace point serial processing centralized data fusion structure, has the features of high fusion precision and small system time delay, and meanwhile, has the advantages of eliminating detection blind areas, improving detection probability and improving tracking performance. After the terminal carries out data fusion and comprehensive optimization processing on the data of the plurality of front ends, the problem of blind area of the single radar due to antenna erection location can be effectively solved, marine target detection and tracking accuracy performance is improved, and navigation safety is guaranteed.

The invention discloses an RFID (Radio Frequency Identification Device)-based urban intelligent curb parking system. The RFID-based urban intelligent curb parking system comprises an intelligent curb parking system cloud service background, an automobile and a parking space, wherein the intelligent curb parking system cloud service background is connected with a mobile phone inside the automobile and a parking terminal through a 3G wireless signal or a 4G wireless signal respectively; the parking terminal is connected with an RFID card on the parking space through a radio frequency wireless signal and comprises a main control CPU (Central Processing Unit) small system module, a GPS (Global Positioning System) module, a vehicle-mounted ETC (Electronic Toll Collection) system module, a wireless communication module, an RFID radio frequency transmitting and receiving module and a power module; the GPS module, the vehicle-mounted ETC system module, the wireless communication module, the RFID radio frequency transmitting and receiving module and the power module are connected with the main control CPU small system module through signal lines respectively. The RFID-based urban intelligent curb parking system is simple in structure, more power-saving, low in cost and more convenient to use.

A method and projection system (10) for increasing the color gamut of images projected onto a display surface (140) by using four or more light sources (12), where the light sources (12) are selected for high brightness and narrow wavelength characteristics and are selected from optimal wavelengths for color gamut expansion. Light sources (12) for large-scale projection environments are preferably lasers. Smaller systems may employ LEDs or other relatively saturated, relatively bright light sources (12).

The invention discloses a bicolor dual-view field infrared imaging optical system. The bicolor dual-view field infrared imaging optical system is characterized by consisting of five lenses including a front fixing lens set (9), a multifocal lens set (10) and a rear fixing lens set (11), wherein the front fixing lens set consists of two lenses, the multifocal lens set consists of one lens, and therear fixing lens set consists of two lenses. The multifocal lens set can axially move in front of or behind a primary image surface to realize switching between a wide view field and a narrow view field; in the five lenses, lenses with a binary diffraction surface is used as a second surface of a second lens and a second surface of a fourth lens. The bicolor dual-view field infrared imaging optical system has the advantages of simple and compact structure, small system size and less lenses, can simultaneously performing imaging at a medium wave infrared wave band with wavelength of 4-5 microns and a long wave infrared wave band with wavelength of 8-9 microns while implementing functions of searching (a wide view field of 9 degrees* 6.75 degrees) and aiming (a narrow view field of 3 degrees*2.25 degrees). The system design takes account of miniaturization and lightweight requirement of the infrared system and meets the use technology requirement of the infrared system.

The invention discloses an input saturation considered asynchronous motor command filter finite time fuzzy control method. Aiming at nonlinear problems of a motor driving and control system, a fuzzy logic system is adopted for approximation to a nonlinear function in the system, a command filter technique is introduced into a traditional backstepping design method, errors generated in filtering are reduced through introduction of a compensation mechanism, the problem of computation explosion caused by continuous derivation in traditional backstepping control is successfully solved, and control precision is improved. Small system stable tracking errors and short dynamic responding time under finite time control are realized, system convergence rate is increased, and interference rejection capability is improved. Under the condition of consideration of input saturation, bounded parameters of a closed-loop system can be guaranteed, and convergence of tracking errors of the system into a sufficiently small origin neighborhood in finite time can be guaranteed as well.

The invention discloses a distributed graph calculation method based on a disk. The method adopts a distributed calculation model based on the disk, and partitions an original graph into P sub-graphs by a graph partitioning algorithm, one graph algorithm operation is finished through N-frequency iteration, one execution of each sub-graph is one task, and (P*N) pieces of tasks are contained; one task comprises the following steps: (1) loading and constructing the sub-graphs; (2) calculating the sub-graphs; and (3) storing a result, and sending relevant data to other sub-graphs. The method schedules tasks in a running water way, the tasks can be subjected to overlapping execution to hide the time delay of disk read, write and communication in a system execution process, the execution process causes the operation time of the whole system to be almost shortened to calculation time, system performance is greatly improved, and the system can still keep an extremely small system scale by facing to the graphs of different scales so as to greatly save the hardware cost of the system.

The invention relates to the technical field of digital signal treatment, in particular to a step value-variable LMS (Least Mean Square) self-adaptation filtering algorithm and a step value-variable LMS (Least Mean Square) self-adaptation filter. According to the invention, since a step value capable of changing according to filtering stages can be supplied, a higher convergence rate and a smaller system stability error can be synchronously obtained, which shows that in the initial stage of self-adaptation filtering, a larger step value is provided, thereby obtaining a higher convergence rate, and a smaller step value is provided when the self-adaptation filtering approaches a stable state, so that a smaller stable state error value can be obtained.

Disclosed is a control system for controlling a plurality of fluidly and operably connected water heaters to meet a hot water demand such that overall efficiency is maximized and usage disparity between water heaters is minimized. There is further disclosed a method for detecting a small system demand in said network by adjusting the setting of each flow limiting valve of each water heater. There is still further disclosed a method for enabling seamless addition or removal of a heater in service and heating load distribution to water heaters.

The invention relates to a future urban intelligent digital neural traffic system. The intelligent traffic system is divided into three layers, wherein the upper layer is a multifunctional passage, the middle layer is a public traffic system, and the lower layer is other vehicle running passage. The concept of Internet of things is fused in different layers. The system comprises an intelligent central control system and various terminals connected with the intelligent central control system, a novel transport unit, wired and wireless communication systems for covering the whole system, a road width adjusting system, electrical energy and signal transmission systems, a solar power generation system, a rainwater purification and reutilization system, a tail gas treatment system, a parking leisure and recreation system, small systems connected with the whole system and positioned in single units, and the like. The system is a real digitization-based digital traffic multifunctional system integrating transportation and multiple functions.