Method for fixing focus and measuring curvature radius by confocal interference

A technology of interferometric measurement and radius of curvature, which is applied in measuring devices, optical instrument testing, optical performance testing, etc., can solve problems such as low degree of automation, increasing measurement random errors, and optical path adjustment system errors, etc., to improve the fixed focus Sensitivity, improving focus accuracy, and improving the effect of measurement accuracy

Inactive Publication Date: 2011-09-07
BEIJING INSTITUTE OF TECHNOLOGYGY
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Problems solved by technology

The contact measurement method not only requires the surface to be tested to be polished, but also causes measurement errors caused by optical spherical wear or extrusion; the non-contact measurement method, although avoiding the wear of the optical spherical surface to be measured, requires optical path focusing and alignment. It is very accurate, which makes it difficult to adjust the optical path, and the optical path adjustment process is easy to lead to system errors; most of the traditional measurement methods such as the spherical sample method, the spherometer method, and the autocollimation microscope method use the visual reading method, and the degree of automation Not high, but also increases the random error of measurement

Method used

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  • Method for fixing focus and measuring curvature radius by confocal interference
  • Method for fixing focus and measuring curvature radius by confocal interference
  • Method for fixing focus and measuring curvature radius by confocal interference

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Embodiment 1

[0057] When using this method to locate the focal point of the measuring beam, as attached image 3 Shown, the confocal interference fixed focus device, the measurement steps are:

[0058] (a) Start the measurement software in the main control computer 15, turn on the laser 19, and the light emitted by the laser 19 is transmitted through the optical fiber 18 to form a point light source 1. The light emitted by the point light source 1 forms a measuring beam 11 after passing through the beam splitter 2, the collimator lens 3 and the limmet lens 4;

[0059] (b) Adjust the lume lens 4 so that it has the same optical axis as the collimating lens 3 . The collimating lens 3 collimates the light generated by the point light source 1 into parallel light. Parallel light is irradiated on the Qiming lens 4, part of the light is reflected on the Qiming lens reference surface 5 and returns along the original optical path, and the returning light passes through the collimating lens 3 and ...

Embodiment 2

[0064] Use this fixed-focus method to measure the curvature radius of a convex spherical surface, as shown in the attached Figure 4 Shown, the confocal interference radius of curvature measurement device, the measurement steps are:

[0065] (a) Start the measurement software in the main control computer 15, turn on the laser 19, and the light emitted by the laser 19 is transmitted through the optical fiber 18 to form a point light source 1. The light emitted by the point light source 1 forms a measuring beam 11 after passing through the beam splitter 2, the collimator lens 3 and the limmet lens 4;

[0066] (b) Adjust the lume lens 4 so that it has the same optical axis as the collimating lens 3 . The collimating lens 3 collimates the light generated by the point light source 1 into parallel light. Parallel light is irradiated on the Qiming lens 4, part of the light is reflected on the Qiming lens reference surface 5 and returns along the original optical path, and the retur...

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Abstract

The invention relates to a method for fixing a focus and measuring a curvature radius by confocal interference, and belongs to the technical field of optical precision measurement. The method comprises the following steps of: introducing interfering reference light based on a confocal light path; precisely positioning an apex of the surface of a tested spherical element and a location of the centre of a sphere by using the maximum value of a confocal interference response curve to obtain the curvature radius of the surface of the tested spherical element; and maximumly sharpening a main lobe of the confocal response curve. By the invention, the traditional confocal interference microscopy imaging technique is first applied to improvement on the fixed-focus precision of an optical measuring system, so that the optical measuring system has a higher axial resolution and a simple structure, and the research and development costs of the system device are reduced.

Description

technical field [0001] The invention relates to a focusing method based on confocal interference technology, which belongs to the technical field of optical precision measurement. This fixed focus technique can be used to precisely locate the vertex and center of the sphere, and then measure component parameters such as the radius of curvature. technical background [0002] Due to the limitation of the diffraction limit, the focusing ability of the focused beam is greatly restricted, and the focusing accuracy is the main factor affecting the measurement of the radius of curvature. Therefore, how to maximize the focusing accuracy of the focusing beam has become an important factor for improving the measurement accuracy of component parameters. core issue. The present invention will take the measurement of the radius of curvature as an example to illustrate the confocal interference fixed focus method and its specific application in the measurement of the radius of curvature....

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M11/00G01M11/02G01B11/255G01B11/14
Inventor 赵维谦杨佳苗邱丽荣
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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