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Product confocal-scanning detection method with high spatial resolution

A technology with high spatial resolution and detection method, applied in the field of microscopic imaging and microscopic measurement, can solve the problem of insignificant three-dimensional super-resolution effect, and achieve the effect of improving spatial imaging detection ability, lateral resolution, and spatial resolution.

Inactive Publication Date: 2012-04-25
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Among them, the use of three-dimensional super-resolution pupil filter is the main means to improve the spatial resolution of optical detection methods, but it must take into account both axial resolution and lateral resolution, and the effect of three-dimensional super-resolution is not significant

Method used

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  • Product confocal-scanning detection method with high spatial resolution
  • Product confocal-scanning detection method with high spatial resolution
  • Product confocal-scanning detection method with high spatial resolution

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Embodiment 1

[0044] As one of the embodiments of the present invention, the product confocal microscopic detection method is used to improve the spatial resolution below, and the product confocal microscopic detection method with high spatial resolution of the present invention is further described as follows:

[0045] Such as Figure 4 As shown, the light source 14 emits a laser beam with a wavelength of λ=633nm, and then expands it into a Gaussian beam of φ4mm through a collimator beam expander 15, passes through a spatial filtering pinhole 16, and makes it a point light source, and the parallel light after beam expansion Transmitted and reflected by the polarizing beam splitter 2, wherein the p light transmitted by the polarizing beam splitter 2 is converged on the surface of the measured sample 5 through the 1 / 4 wave plate 3 and the measuring objective lens 4, and then the light reflected by the measured sample 5 moves along the Going back the same way, after passing through the 1 / 4 wa...

Embodiment 2

[0068] The product confocal microscopic detection method of shaping ring light formula improves the spatial resolution as the second embodiment of the present invention below, and the product confocal microscopic detection method with high spatial resolution of the present invention is further described as follows:

[0069] Such as Figure 7 As shown, the dotted frame part is the double receiving optical path arrangement 13 of the product confocal microscope, and the optical super-resolution device is the shaping binary optical device 24 . The light intensity response function I(v,u,u) of a reflective confocal microscope with a pupil function P(ρ) under monochromatic illumination M )for:

[0070] I ( v , u , u M ) = | ∫ ϵ 1 ...

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Abstract

The invention relates to a product confocal-scanning detection method with high spatial resolution, belonging to the technical field of detection of surface minuteness structure and biologic microscopic imaging, wherein the method comprises the steps of: multiplying the defocusing signals of a double biased detector in a differential confocal double receiving optical path to get product confocal signals; detecting and imaging the detected sample; improving the vertical and transverse resolution of a product confocal microscopical detection method by the product of the two biased signals thereby achieving the product confocal detection with high spatial resolution. The method can also improve the spatial resolution by combining with an optical super-resolution confocal detection method; meets the requirements of high spatial resolution and high precision of detection and imaging; and is applicable for the detection of surface three-dimensional minuteness structure, micro-step, line width and surface appearance, and the detection of biologic imaging with high precision.

Description

technical field [0001] The invention belongs to the technical field of microscopic imaging and microscopic measurement, and particularly provides a method for detecting surface three-dimensional microstructure, microsteps, integrated circuit line width and surface topography, and high-resolution microscopic imaging in the field of biomedicine. Background technique [0002] Confocal microscopy technology has been widely used in the field of high-resolution imaging and detection with its unique three-dimensional tomographic imaging capability, but due to the principle limitation of diffraction effect, the further improvement of its resolution is restricted. In order to fundamentally break through the diffraction limit and improve the resolving power of confocal microscopy methods, domestic and foreign scholars have done a lot of research, and have proposed many non-traditional confocal microscopy imaging principles and super-resolution methods. [0003] In order to improve the...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/24G01B11/00G01B11/02
Inventor 赵维谦邱丽荣刘超刘大礼
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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