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Processing method of high-spatial resolution product of biaxial confocal optical path

A technology with high spatial resolution and processing method, applied in the fields of optical precision and microscopic measurement, can solve the problem of insignificant three-dimensional super-resolution effect, and achieve improved spatial imaging detection ability, lateral resolution, axial resolution and lateral resolution. The effect of resolution

Inactive Publication Date: 2012-01-04
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Among them, the use of three-dimensional super-resolution pupil filter is the main means to improve the spatial resolution of optical detection methods, but it must take into account both axial resolution and lateral resolution, and the effect of three-dimensional super-resolution is not significant

Method used

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  • Processing method of high-spatial resolution product of biaxial confocal optical path
  • Processing method of high-spatial resolution product of biaxial confocal optical path
  • Processing method of high-spatial resolution product of biaxial confocal optical path

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Embodiment 1

[0030] The basic idea of ​​the present invention is to multiply and normalize the intensity curves measured by the detectors, so as to improve the axial resolution and lateral resolution of the system at the same time, so as to achieve the purpose of improving the spatial resolution.

[0031] like figure 1 As shown, the biaxial confocal high spatial resolution product processing method, its implementation steps are:

[0032] First turn on the laser 1 (wavelength λ), the outgoing light is emitted as parallel light through the collimator beam expander 2, and the parallel light is focused on the surface of the measured sample 4 placed on the micro-displacement workbench 11 through the measurement lens 3, and is reflected into the acquisition Lens 5 , the light beam collected by the collection lens 5 is converged by the imaging lens 6 , and the converged light spot is enlarged by the magnifying lens 7 and imaged on the CCD detector 8 .

[0033] The computer acquires the focal spo...

Embodiment 2

[0052] like Figure 10 As shown, the embodiment one figure 1 A pupil filter 14 at the illumination end is added between the collimator beam expander 2 and the measuring lens 3 to filter and shape the illumination beam to achieve the purpose of further improving the lateral resolution of the system. The remaining measurement methods and devices are the same as those in Example 1.

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Abstract

The invention belongs to the technical field of the surface fine structure and biological microimaging measurement and relates to processing method of the high-spatial resolution product of the biaxial confocal optical path. The method comprises the following steps: the out-of-focus signals received by two detectors which are transversely placed in two biaxial confocal receiving optical paths in the offset arrangement are used to perform a multiplication operation and obtain a biaxial confocal product measurement signal, and the sample to be tested is measured and imaged. By performing the multiplication operation of two out-of-focus signals, the three-dimensional resolution of the biaxial confocal microscopic detection method can be increased and the high-spatial resolution detection of the confocal method of biaxial product can be realized. The method of the invention can also combine with the optical super-resolution detection method to further increase the spatial resolution. The method can satisfy the requirements of high-spatial resolution and high-precision measurement and is especially suitable for the fields such as the precision measurements of surface three-dimensional fine structure, micro-step, line width and surface topography and the high-precision biological imaging detection.

Description

technical field [0001] The invention belongs to the technical field of optical precision and microscopic measurement, and relates to a method for detecting surface three-dimensional microstructure, microsteps, integrated circuit line width and surface topography, and high-resolution microscopic imaging in the field of biomedicine. Background technique [0002] Confocal microscopy technology has been widely used in the field of high-resolution imaging and detection with its unique three-dimensional tomographic imaging capabilities. It is difficult to take into account the time, which restricts the further improvement of its resolution. In order to fundamentally break through the diffraction limit and realize high-resolution, large field of view and large working distance microscopic imaging and measurement, domestic and foreign scholars have done a lot of research, and have proposed many non-traditional confocal microscopic imaging principles and super-resolution methods. ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/24G01B11/00
Inventor 赵维谦邱丽荣江琴刘大礼
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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