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Super-resolution array virtual structure light lighting imaging device and method

A virtual structure and imaging device technology, which is applied in measuring devices, analyzing materials, and analyzing materials through optical means, can solve the problems of low measurement efficiency, achieve high measurement efficiency, improve the lateral resolution of the system, and increase the spatial cutoff frequency Effect

Active Publication Date: 2016-07-13
HARBIN INST OF TECH
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Problems solved by technology

[0004] The purpose of the present invention is to solve the problem that the microscopic imaging technology in the prior art can only measure thinner biological samples. When measuring thicker samples, as the incident distance increases, the diffracted light incident by parallel light is significantly affected by the scattering effect , the problem of low measurement efficiency

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  • Super-resolution array virtual structure light lighting imaging device and method

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Embodiment Construction

[0041] The specific embodiment of the present invention is described in conjunction with the accompanying drawings. A super-resolution array virtual structured light illumination imaging device of the present invention includes an LED light source 1, and a collimating beam expander 2, a scanning system 3, Microlens array 4, collimator lens 5, dichroic prism 7, 1 / 4 wave plate 9, illumination objective lens 10, sample 11, collection lens 6 and CCD detector 8, and the distance between the centers of adjacent illumination spots is the illumination light field space period Integer multiples of .

[0042] The LED light source is an incoherent light source, the illumination of the sample is incoherent illumination, and the entire imaging process is incoherent imaging.

[0043] The scanning system 3 includes a scanning galvanometer, which changes the beam deflection angle.

[0044] In the super-resolution virtual structured light illumination imaging method of this embodiment, the de...

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Abstract

The invention relates to an imaging device and method, in particular to a super-resolution array virtual structure light lighting imaging device and method, and aims to solve the problem that microscopic imaging technology can only measure thin biological samples, thereby being low in measuring efficiency in the prior art.The device comprises an LED light source 1, a collimating beam expander 2, a scanning system 3, a micro lens array 4, a collimating lens 5, a beam splitting prism 7, a one-fourth wave plate 9, a lighting object lens 10, a sample 11, a collection lens 6 and a CCD (charge coupled device) detector 8.Detection light spots obtained by scanning of each time are directly stacked on the mirror surface to obtain primary detection data, scanning different in phase lighting is performed in each direction, and super-resolution images are obtained through image reconstruction.The super-resolution array virtual structure light lighting imaging device and method expands spatial frequency domain bandwidth and is suitable for the measuring field of industrial shape and thick biological sample imaging.

Description

technical field [0001] The invention relates to an imaging device and an imaging method thereof, in particular to a super-resolution array virtual structured light illumination imaging device and an imaging method thereof, belonging to the technical field of optical compact measurement. Background technique [0002] Optical microscopy is a long-established and important non-destructive technique widely used in fields such as biology and materials science. Structured Illumination Microscopy (SIM) was proposed by American scientist Gustafsson in 2000. Its principle is similar to the Moiré fringe principle. By modulating the illumination function of a wide-field microscope, the optical intensity transfer function (OTF) of the entire optical system is translated. and superposition, so that the frequency domain bandwidth of the system increases and the cutoff frequency increases. Usually, a sinusoidal grating is used to change the illumination intensity distribution of the wide-...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/01
CPCG01N21/01
Inventor 张甦王宝凯邹丽敏谭久彬
Owner HARBIN INST OF TECH
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