A super-resolution array scanning structured light illumination imaging device and imaging method thereof

Abstract

The invention relates to an imaging apparatus and an imaging method thereof, and concretely relates to a super-resolution array scanning structure light illumination imaging apparatus and an imaging method thereof. The purpose of the invention is to solve the problems of only measurement of a thin biological sample through a microscopic imaging technology, obvious influences of the scattering effect on incident diffracted lights of parallel lights, and low measurement efficiency in the prior art. The apparatus comprises an LED light source, and a light intensity modulator, a collimating beam expander, a scanning system, a microlens array, a collimating lens, a light splitting prism, a 1 / 4 wave plate, an illumination objective lens, a sample, a collecting lens, a CCD light intensity detector and a data collection card are sequentially arranged along the light propagation direction of the LED light source; and detection light spots obtained after every scanning are directly superposed on an image plane to obtain initial detection data, illumination scanning in different phases is carried out three times in every direction, and a super-resolution image is obtained through image reconstruction. The apparatus and the method widen the spatial frequency domain bandwidth, and are suitable for being used in the measurement fields of industrial morphology and imaging of thick biological samples.

Description

technical field [0001] The invention relates to an imaging device and an imaging method thereof, in particular to a super-resolution array scanning structured light illumination imaging device and an imaging method thereof, belonging to the technical field of optical compact measurement. Background technique [0002] Optical microscopy is a long-established and important non-destructive technique widely used in fields such as biology and materials science. Structured Illumination Microscopy (SIM) was proposed by American scientist Gustafsson in 2000. Its principle is similar to the principle of Moiré fringes. By modulating the illumination function of the wide-field microscope, the optical intensity transfer function (OTF) of the entire optical system The translation and superposition are obtained, so that the frequency domain bandwidth of the system is increased and the cutoff frequency is increased. Usually, a sinusoidal grating is used to change the illumination intensit...

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Problems solved by technology

[0004] The purpose of the present invention is to solve the problem that the microscopic imaging technology in the prior art can only measure thinner biological samples. When measuring thicker samples, as the incident distance increases, the diffracted light incident by parallel light is significantly affected by the scattering effect , the problem of low measurement efficiency

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