A super-resolution virtual structured light illumination imaging device and imaging method thereof

Abstract

The invention relates to an imaging device and an imaging method thereof, in particular to a super-resolution virtual structural light illuminated imaging device and an imaging method thereof, and aims to solve the problems in the prior art that by adopting the conventional microscopic imaging technique, only thinner biological samples can be measured and the transverse resolution of the imaging system is lower. The imaging device comprises an LED light source, wherein a collimation and beam expanding device, a scanning system, a beam splitter prism, a 1 / 4 wave plate, an illumination objective lens, a sample, a collecting lens and a CCD detector are placed in the light ray propagation direction of the LED light source in sequence. According to the super-resolution virtual structural light illuminated imaging device and the imaging method thereof, the object function of the sample is modulated by the illumination field, so that high frequency information can move to the low-frequency section, the object function can also be modulated in different directions by changing the direction of the illumination field, therefore high frequency components and low frequency components in the detection frequency spectrum can be distinguished from each other by changing the phase position of the illumination field in each illumination direction; besides, the imaging device and the imaging method thereof not only can improve the spatial-cut-off frequency of a scanning microscope system and the spatial frequency domain bandwidth, but also can be applied to the field of imaging measurement of industrial topography and thick biological samples.

Description

technical field [0001] The invention relates to an imaging device and an imaging method thereof, in particular to a super-resolution virtual structured light illumination imaging device and an imaging method thereof, belonging to the technical field of optical compact measurement. Background technique [0002] Optical microscopy is a long-established and important non-destructive technique widely used in fields such as biology and materials science. Structured Illumination Microscopy (SIM) was proposed by American scientist Gustafsson in 2000. Its principle is similar to the principle of Moiré fringes. By modulating the illumination function of the wide-field microscope, the optical intensity transfer function (OTF) of the entire optical system The translation and superposition are obtained, so that the frequency domain bandwidth of the system is increased and the cutoff frequency is increased. Usually, a sinusoidal grating is used to change the illumination intensity distr...

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Problems solved by technology

[0004] The purpose of the present invention is to solve the problem that the microscopic imaging technology in the prior art can only measure thinner biological samples, and the lateral resolution of the imaging system is poor

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