A super-resolution virtual structured light illumination imaging device and imaging method thereof
A technology of virtual structure and imaging method, which is applied in the directions of measuring devices, analyzing materials, and material analysis through optical means, which can solve problems such as poor lateral resolution of imaging systems, achieve widening of spatial frequency domain bandwidth, improve lateral resolution, The effect of increasing the spatial cutoff frequency
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[0039] The specific embodiment of the present invention is described in conjunction with the accompanying drawings. A super-resolution virtual structured light illumination imaging device of the present invention includes an LED light source 1, and is characterized in that a collimating beam expander 2, Scanning system 3 , beam splitting prism 4 , 1 / 4 wave plate 5 , illumination objective lens 6 , sample 7 , collecting lens 8 and CCD detector 9 .
[0040] The LED light source is an incoherent light source, the illumination of the sample is incoherent illumination, and the entire imaging process is incoherent imaging.
[0041] The scanning system 3 includes a scanning galvanometer, which changes the beam deflection angle.
[0042] Based on the imaging method of a super-resolution virtual structured light illumination imaging device, the detection sensitivity coefficient of the detection surface is modulated to obtain the instantaneous light intensity signal I(x) of the equivale...
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