Three-differential focasing micro-three-dimensional super-resolution imaging method

Abstract

The present invention belongs to the field of optical microscopic imaging and micro measurement technology, and is one 3D three-differential confocal microscopic imaging method with very high S / N ratio and 3D super resolution imaging capacity. The present invention fuses the three-differential confocal scanning method with high axial resolution and pupil filtering confocal scanning method with high transverse resolution to constitute the 3D pupil filtering three-differential confocal microscopic imaging method. The method may be used in measuring 3D surface appearance, 3D fine structure, micro step, micro channel, IC line width, etc.

Description

Technical field [0001] The invention belongs to the technical field of optical microscopic imaging and microscopic measurement, and relates to a three-differential confocal microscopy three-dimensional super-resolution imaging method with high performance-to-noise ratio and three-dimensional super-resolution imaging capabilities, which can be used to measure the three-dimensional surface topography, Three-dimensional microstructures, microsteps, microgrooves, integrated circuit line widths, etc. Background technique [0002] The idea of ​​confocal microscope was first proposed by the American scholar M. Minsky in 1957, and was granted a US patent in 1961, with the patent number US3013467. The confocal microscope places the point light source, the point object and the point detector in the corresponding conjugate positions to form a point illumination and point detection microscope imaging system with unique tomographic capabilities in optical microscopy imaging. The basic princip...

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Problems solved by technology

[0004] Generally speaking, the above-mentioned new confocal microscopes and super-resolution methods and technologies have improved the imaging resolution characteristics of confocal microscopes and solved the needs of many confocal microscopes for super-resolution microscopic imaging measurements, but they still have the following problems to be solved urgently : First, the existing various forms of confocal microscopes use the detected light intensity signals to directly perform imaging processing, which are easily affected by factors such as light intensity fluctuations, background light interference, and environmental temperature drift. Confocal microscope imaging The signal-to-noise ratio of the system is low; the second is that the axial tomographic accuracy of the confocal microscope is limited by the nonlinearity of the axial intensity response curve, and the existing super-resolution technology is likely to cause the increase of side lobes and axial response during the super-resolution imaging process. The increase of curve nonlinearity error

However, the three-differential confocal microscopy imaging method is mainly used to improve the axial resolution of the confocal microscope, but fails to improve the lateral resolution of the confocal microscope. The existing super-resolution pupil filter is used for three-dimensional super-resolution of the confocal microscope. When imaging, it is necessary to perform both lateral super-resolution and axial super-resolution, and the effect of three-dimensional super-resolution is usually not particularly significant

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