High spatial resolution biaxial differential confocal spectrum microscopic imaging method and apparatus
A dual-axis differential confocal and high spatial resolution technology, applied in the field of spectral measurement, can solve the problems of low collection efficiency, unfavorable light source intensity fluctuation suppression, insufficient spatial resolution, etc., to improve sensitivity, improve anti-interference ability, improve The effect of lateral resolution
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Embodiment 1
[0049] In this embodiment, the light source 1 is a laser, the polarization modulation device 29 is a radially polarized light generator, the dichroic light splitting system 8 is a Notch filter, the data processing system 21 is a computer, and the first detector 22 is a first CCD detector , the second detector 35 is a second CCD detector.
[0050] Such as figure 2 , image 3 and Figure 6 As shown, the illumination objective lens 2 and the collection objective lens 7 are symmetrically distributed on both sides of the normal line 5 of the measurement surface, and the included angle between the illumination optical axis 4 and the normal line 5 of the measurement surface is θ 1 6. The angle between the collection optical axis 20 and the normal line 5 of the measurement surface is θ 2 37, where θ 1 = θ 2 , taking the 5 directions of the normal line of the measuring surface as the measuring axis, establishing a system coordinate system (x, y, z), a high spatial resolution dual...
Embodiment 2
[0065] In this embodiment, the polarization modulation system 29 is a radially polarized light generator, the dichroic spectroscopic system 8 is a Notch filter, the first detection system 11 is a first point detector, the second detection system 12 is a second point detector, and the data The processing system 21 is a computer, the first detector 22 is a first CCD detector, and the second detector 35 is a second CCD detector.
[0066] Such as figure 1 , Figure 4 , Figure 5 and Figure 7 As shown, the embodiment 1 Figure 6 Replace the first CCD detector in the Figure 7 Two point detectors with the same parameters, namely the first point detector 11 and the second point detector 12, can constitute the second embodiment. The positions of the first point detector 11 and the second point detector 12 correspond to the positions of the first virtual pinhole 24 and the second virtual pinhole 23 in Embodiment 1, respectively. The positions of the first virtual pinhole 24 and ...
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