Method for controlling shape of femtosecond laser induction crystalline silicon surface micro-nano structure

Abstract

The invention relates to a method for controlling the shape of a femtosecond laser induction crystalline silicon surface micro-nano structure. According to the method, on the basis of control over the geometrical shape of a single-point femtosecond laser induction crystalline silicon surface periodic micro-nano structure, direct-writing line width is adjusted and regulated through control over the linear polarization direction of the femtosecond laser and the laser direct writing direction, the minimum line width surface periodic micro-nano structure is obtained when the laser direct writing direction and the linear polarization direction are parallel, and the maximum line width surface periodical micro-nano structure is obtained when the laser direct writing direction and the linear polarization direction are perpendicular. The method has the advantages that through simple adjustment based on laser polarization states and application of a femtosecond laser impulse sequence, the geometrical shape of the femtosecond laser induction crystalline silicon surface periodic structure can be accurately controlled, so that accurate controllable parameters are provided for generation of a femtosecond laser direct-writing induction large-area periodic structure, and the method is suitable for manufacturing femtosecond laser direct-writing accurate induction large-area surface periodic structure.

Description

technical field [0001] The invention relates to the field of application of femtosecond lasers, in particular to a method for controlling the morphology of micro-nano structures on the surface of crystal silicon induced by femtosecond lasers. Background technique [0002] In 1965, Birnbaum first induced a regular corrugated structure on the surface of a semiconductor with a ruby ​​laser. Since then, researchers have used various continuous and pulsed lasers to induce periodic structures on the surface and interior of various materials. Femtosecond laser processing has the advantages of low pollution and the ability to process devices with various complex shapes, and has a wide range of applications in the field of micro / nano processing. The generation of femtosecond laser-induced surface periodic structures can realize laser-processed structures on the nanoscale, and has potential important applications in photonics, optoelectronics, thermal radiation sources, and bio-optica...

AI Technical Summary

Problems solved by technology

However, the difficulty in precise control of this surface periodic micro-nano structure still restricts its wide application.