Measuring device and method for transparent substance and reflector based on digital microscope and data synthetic technique

A technology of digital micromirrors and transparent objects, applied in measurement devices, optical devices, instruments, etc., can solve problems such as moving workbenches, errors, system complexity, etc., to simplify system structure, improve measurement dynamics, and improve system measurement. The effect of resolution

Inactive Publication Date: 2007-12-19
SHANGHAI UNIV
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Problems solved by technology

The disadvantage of this method is that the worktable needs to be moved, and the stitching process will also introduce errors
[0003] In order to obtain double measurement images, the conventional method is to use split beams, and then project them into the corresponding two sets of measurement optical paths. At the same time, if the intensity of the beams is to be modulated, different modulation devices need to be added, which makes the system complicated.

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  • Measuring device and method for transparent substance and reflector based on digital microscope and data synthetic technique
  • Measuring device and method for transparent substance and reflector based on digital microscope and data synthetic technique
  • Measuring device and method for transparent substance and reflector based on digital microscope and data synthetic technique

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Embodiment Construction

[0018] Preferred embodiment of the present invention is described in detail as follows in conjunction with accompanying drawing: A preferred embodiment that the present invention is used for transparent object measurement is: referring to Fig. 1 and Fig. 3, semiconductor laser 4 emits laser light source and becomes collimated light source after collimating lens 3 , projected onto the digital micromirror 1, adjust the digital micromirror bracket to generate two beams of horizontal conjugate reflected light: one beam passes through the mirror 5, adjust the mirror frame so that the reflected beam is projected onto the transparent object 6 to be measured, and then transmitted to the CCD8 Receive; the other beam passes through the reflector 9, adjust the reflector frame so that the reflected beam is projected onto the transparent object 6 to be measured, and transmitted to the CCD7 for reception. CCD7 and CCD8 simultaneously transmit the collected data to computer 10 for data proces...

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Abstract

A morphology measurement device of transparent object based on digital micro-lens and data synthetic technology consists of a digital micro-lens, a light source illumination unit, two image receiving units with CCD video cameras and two reflectors. It is featured as utilizing multifunction of reflector and spectroscope as well as light beam modulator undertaken by digital micro-lens in measurement system and applying phase-shift digital hologram technique for realizing high-resolution outline measurement of object to be measured.

Description

technical field [0001] The invention relates to a method and device for measuring the shape of a transparent material or a reflective material, in particular to a method and a device for measuring a non-contact high-resolution shape based on a digital micromirror. Background technique [0002] The non-contact digital object shape measurement method can use digital interferometry technology, fringe projection technology, digital holography technology, etc. for high-precision measurement. Due to the use of phase processing technology in these methods, the depth measurement resolution can be very high, reaching the nanometer level, but the lateral resolution is limited by the resolution of the CCD and the size of the array. If the method of enlarging the object first and then measuring it is adopted, the resolution is improved, but the measurement range is reduced, and it is also limited by the diffraction limit of the optical system. In order to solve this contradiction, the ...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
Inventor 周文静于瀛洁张之江倪萍郑华东陈刚
Owner SHANGHAI UNIV
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