Minisize three-dimensional self-scanning confocal microscope
A confocal microscope and self-scanning technology, applied in the field of inspection, can solve the problems of low frequency response of dynamic characteristics, limited application, complicated scanning mechanism, etc., and achieve direct three-dimensional self-scanning measurement of dynamic characteristic frequency response, dynamic characteristic frequency response High and stable effect
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[0011] The present invention will be described in further detail below in conjunction with the accompanying drawings.
[0012] Such as figure 1 As shown, the miniature three-dimensional self-scanning confocal microscope includes a point light source 1, a first microlens 2, a micro-optical beam splitter 3, a miniature three-dimensional self-scanner, a third microlens 10, a pinhole 11, and a miniature photodetector 12 and control device 13.
[0013] The miniature three-dimensional self-scanner includes a micro-scan mirror 4, a second micro-lens 5 and a double-comb linear scanner. Wherein, the double-comb linear scanner is composed of a mover 6 and two X-direction linear drivers 7 and Z-direction linear drivers 8 as stators, the second microlens 5 is located on the mover 6, and the X-direction linear driver 7 is used for The mover 6 is driven to move along the X direction, and the Z-direction linear driver 8 is used to drive the mover 6 to move along the Z direction.
[0014] ...
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