Quartz flexure accelerometer

An accelerometer and flexible technology, which is applied in the field of quartz flexible accelerometers, can solve the problem of reaching the detection limit of tiny capacitance detection circuits, low output signal-to-noise ratio of capacitive signal sensors, and difficult breakthroughs in the accuracy of capacitive quartz flexible accelerometers. and other problems, to achieve the effect of enhancing the sealing, improving the measurement range and improving the measurement accuracy

Active Publication Date: 2017-08-29
青岛智腾微电子有限公司
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AI Technical Summary

Problems solved by technology

The output capacitance change of the capacitive signal sensor in the quartz flexible accelerometer is proportional to the square of the displacement, and the resolution is limited. To obtain high resolution, the size of the system needs to be appropriately widened. At the same time, it is affected by electronic noise, mechanical thermal noise and the environment. Influenced by factors such as parasitic capacitance, the output signal-to-noise ratio of the capacitive signal sensor is low, reaching the detection limit of the tiny capacitance detection circuit, and the accuracy of the capacitive quartz flexible accelerometer is difficult to break through μg 0 / ppm level

Method used

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Embodiment Construction

[0032] The present invention will be described in detail below through specific embodiments with reference to the accompanying drawings. Those skilled in the art should understand that this description is exemplary, and the present invention is not limited to this specific embodiment, and those skilled in the art can make various modifications and changes to it, and these modifications and changes should belong to a part of the content of the present invention .

[0033] figure 1 It is a front view showing the packaging structure of a quartz flexible accelerometer according to a specific embodiment of the present invention.

[0034] Such as figure 1 As shown, the quartz flexible accelerometer of the present invention includes a meter head 1 and a servo circuit 2 . The servo circuit 2 and meter head 1 form a closed-loop feedback system, which works according to Newton's laws of mechanics, and indirectly measures the acceleration of the carrier by measuring the inertial force...

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Abstract

The invention provides a quartz flexure accelerometer which can improve the measurement precision, is good in sealing performance, and is high in stability. The accelerometer comprises a servo circuit and a meter. The meter comprises an upper torquer, a detection quality assembly, a lower torquer, and a housing. The upper torquer comprises a compensation ring, a magnetic steel, a magnetic pole piece, and an upper yoke. The lower torquer comprises a compensation ring, a magnetic ring, a magnetic pole piece, and a lower yoke. The detection quality assembly comprises a gold-plated film quartz pendulous reed and two torquer coils which are pasted on the quartz pendulous reed.

Description

technical field [0001] The invention relates to a quartz flexible accelerometer, in particular to a quartz flexible accelerometer with a welded sealing structure. Background technique [0002] Quartz flexible accelerometer is a mechanical uniaxial pendulum type, differential capacitance type, torque rebalance type (force feedback type) accelerometer, which is sensitive to physical quantities such as acceleration, speed, distance, swing, tilt, and vibration. The quartz flexible accelerometer is mainly composed of a servo circuit and a meter head to form a closed-loop feedback system. According to Newton's law of mechanics, the acceleration of the carrier is indirectly measured by measuring the inertial force on the carrier. It has the advantages of simple structure, small size, long life, high precision and sensitivity, small temperature coefficient, stable performance, etc. It is widely used in inertial navigation systems of aircraft, missiles, rockets, ships, vehicles, and ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/08G01P15/125
Inventor 刘军王晓雷宋银良刘哲李强
Owner 青岛智腾微电子有限公司
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