Three-degree-of-freedom large-stroke micro-positioning platform achieving driving force decoupling
A technology of micro-positioning platform and degree of freedom, which is applied to the parts of the instrument, the instrument, the shell, etc., can solve the problems of affecting the performance of the positioning platform, low response ability, and low carrying capacity, so as to improve the rotational stiffness and motion accuracy, improve Motion accuracy, effect of high natural frequency
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[0020] The present invention will be further explained with the accompanying drawings. The embodiments of the present invention are to better enable those skilled in the art to better understand the present invention, and do not limit the present invention in any way.
[0021] Such as Figure 1 to Figure 3 , A three-degree-of-freedom large-stroke micro-positioning platform with driving force decoupling, comprising a micro-movement platform base, which sequentially includes a bottom plate 1, a middle part, and a top part from bottom to top, and the bottom plate 1 is provided There are positioning holes 8, and bosses 4 are arranged on the four top corners of the bottom plate 1 to support the top part; a parallel plate guide mechanism 6 is connected between two adjacent bosses 4, a parallel plate guide mechanism A central boss 7 is provided in the middle of the base plate 1. A voice coil motor driver 2 is arranged at the central boss 7 at one end in the X direction and the Y direct...
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