High-accuracy symmetrical parallel servo platform adopting linear drive and realizing movement decoupling

Abstract

The invention discloses a high-accuracy symmetrical parallel servo platform adopting linear drive and realizing movement decoupling. The servo platform comprises a base, a movement panel, a first guide track and a second guide track, wherein both the first guide track and the second guide track are fixed on the base and are mutually perpendicular, the movement panel can slide along the first guide track and the second guide track; linear drive devices are arranged on the first guide track and the second guide track in a matched manner, slide tracks are arranged at the side parts of the movement panel and are in sliding fit with the linear drive devices; the linear drive device on the first guide track drives the movement panel to move in the X direction, and the linear drive device on the second guide track drives the movement panel to move in the Y direction, so that movement decoupling in the X and Y movement directions is realized. Two long guide tracks fixed on the base and perpendicularly intercrossed in space are adopted, the overall rigidity of the movement platform is improved, torque caused when drive force of the parallel movement platform deviates from the mass center of the movement panel is further reduced, and torsion of the movement panel in a horizontal plane is effectively inhibited.

Description

technical field [0001] The invention relates to a motion servo platform, in particular to a two-degree-of-freedom symmetrical parallel direct drive motion decoupling high-precision servo platform. Background technique [0002] With the continuous development of human science and technology and industrial technology, and the continuous improvement of creativity, the manufacturing industry has gradually developed towards the microscopic field. In order to meet human needs, the fields of modern machining, nanotechnology, advanced optical devices, integrated circuit manufacturing and precision machinery require devices or parts to be smaller and smaller in size and higher in precision. Therefore, ultra-precision servo technology has gradually become the core technology of emerging industries such as information storage, precision imaging, precision machinery manufacturing, and semiconductor equipment. Operating systems and equipment. Therefore, establishing a high-precision mo...

AI Technical Summary

Problems solved by technology

[0003] Most of the two-dimensional motion platforms currently used in the market are serial two-dimensional planar motion platforms. The transmission platform is mostly driven by a rotating motor plus a ball screw. The specific structure is that the bottom rotating motor converts the rotary motion into a straight line through the screw Movement, so as to drive the upper rotary drive motor and the flat plate to move together, but this kind of rotary motor drive has problems such as driving gaps, the load mass of the bottom rotary motor is greater than the load mass of the upper motor, etc., ignoring people's further improvement of equipment positioning accuracy, speed and The appeal of acceleration, there is an inherent asymmetry in the design

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