Array annular coupling three-axis full-decoupling micro gyroscope and processing method thereof

Abstract

The invention discloses an array annular coupling three-axis full-decoupling micro-gyroscope and a processing method thereof; the micro-gyroscope is of a tetragonal symmetrical structure, and mainly comprises an outer annular driving frame part, an inner annular driving coupling frame part, a sensitive detection mass block part, a corresponding coupling folding beam and the like, wherein four massblocks in the designed tetragonal symmetrical structure are completely consistent with the internal structure, each mass block comprises a driving transmission frame, two two-degree-of-freedom frames, two detection frames and corresponding coupling folding beams, and the driving transmission frames of the four mass blocks are coupled and connected through an outer ring and an inner ring to realize equal-amplitude differential driving; and the detection frames realize a full decoupling function through the coupling beams, so that relatively good measurement performance is achieved. The processing technology is simple, and good detection performance can be achieved.

Description

technical field [0001] The invention relates to the field of micro-electromechanical gyroscopes, in particular to a micro-gyroscope capable of array ring coupling and three-axis full decoupling and a processing method thereof. Background technique [0002] Compared with traditional gyroscopes, silicon micromechanical gyroscopes have the advantages of small size, light weight, low cost, high reliability, low power consumption, and mass production, and can be widely used in aviation, automobiles, medical care, photography, and consumer electronics and other fields, has broad application prospects. At present, the most widely used research and application is the single-axis gyroscope, which can only sensitively detect the angular velocity input in one direction, while the three-axis gyroscope can be sensitive to the angular velocity input in three directions at the same time. [0003] In terms of the development of three-axis gyroscopes, a company has already produced commerci...

AI Technical Summary

Problems solved by technology

A company has designed a monolithic integrated three-axis gyroscope product with a structural size of only 3.2×3.2 mm, but it has not achieved complete decoupling of each drive and detection direction, so it is difficult to achieve high performance

A university designed a vibrating ring silicon micro-gyroscope, which can theoretically measure angular velocity in three directions, but its structure and processing technology are complicated, and it is difficult to achieve better performance, so further research is needed to improve

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