Double-mass-block tuning fork angular rate gyroscope with structure decoupling capacity

Abstract

The invention discloses a double-mass-block tuning fork angular rate gyroscope with structure decoupling capacity. The gyroscope comprises an upper vacuum packaging cover plate, a lower silicon substrate and a middle monocrystalline silicon wafer, wherein a gyroscope mechanical structure is arranged on the middle monocrystalline silicon wafer; two substructures of the gyroscope mechanical structure are symmetrically distributed both sides of a mass block connecting mechanism and two truss / horizontal-straight-beam combined mechanisms; and a first U-shaped beam is arranged along the long side of each substructure, the truss / horizontal-straight-beam combined mechanisms are connected with the substructures through the first U-shaped beams, and the straight beam is arranged in the width direction of the substructure, and used for connecting the first U-shaped beams on both sides of the substructure. The gyroscope implements motion decoupling in the drive mode and detection mode, lowers the output quadrature error, implements the drive mode and detection mode as the first-order mode and second-order mode, effectively inhibits the drive same-direction mode, detection same-direction mode, Z-direction mode and other common interference modes, and has the advantages of favorable gyroscopic properties, high consistency and high vibration interference resistance.

Description

technical field [0001] The invention belongs to micro-electro-mechanical systems and micro-inertia measurement technology, in particular to a double-mass tuning fork angular rate gyroscope with structure decoupling capability. Background technique [0002] Micromachined inertial instruments include micromachined gyroscopes (MMG) and micromachined accelerometers (MMA). The use of microelectronic processing technology allows the complete integration of micromechanical structures and required electronic circuits on a silicon chip, thereby achieving a high degree of unity in terms of performance, price, volume, weight, and reliability. Therefore, this type of instrument has a series of advantages (such as small size, light weight, cheap price, high reliability, mass production, etc.), and has broad application prospects in both military and civilian fields. In civilian use, it is mainly used in the automotive industry, industrial monitoring and consumer products and robotics, s...

AI Technical Summary

Problems solved by technology

However, in the bulk silicon process, it is quite difficult to process the vertical torsion bar

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