Plane parallel type three-freedom-degree precise positioning work table

Abstract

A plane parallel type three-freedom-degree precise positioning work table has three flexible branched chains which are total the same in structure and respectively and correspondingly arranged on the inner sides of three equal sides of a base of a triangular structure and a movable platform arranged on the inner sides of the three flexible branch chains and arranged at the center of the base, wherein the base, the three flexible branched chains and the movable platform are integrally formed, the three flexible branched chains are in flexible connection with the base, displacement input ends of the three flexible branched chains respectively correspond to three included angles of the base, the movable platform is in flexible connection with the three flexible branched chains, a groove is formed between the inner side of each included angle of the base and the corresponding flexible branched chain, a piezoelectric ceramic driver is horizontally arranged in the groove, one end of the piezoelectric ceramic driver is in hertz contact with the displacement input ends of the flexible branched chains, and the other end of the piezoelectric ceramic driver is fixedly connected on the base through bolts. The plane parallel type three-freedom-degree precise positioning work table is compact in structure, flexible to control, high in static and dynamic stiffness, high in kinematic accuracy, low in inertia, free of error accumulation, free of friction and heating and fast in responding.

Description

technical field [0001] The invention relates to a three-degree-of-freedom precision positioning workbench. In particular, it relates to a plane parallel three-degree-of-freedom precision positioning workbench. Background technique [0002] Micro / nano measurement and characterization is an important research content in biology, medicine, materials, mechanics and physics. Surface measurement and characterization systems and methods have become one of the hotspots in the world today. The micro / nano positioning system driven by piezoelectric ceramics has the advantages of high resolution, fast response, no friction and no heating problems, etc., and is widely used in the fields of micro / nano operation, measurement and processing. According to the motion form, the micro / nano positioning system driven by piezoelectric ceramics can be divided into two types: direct drive and peristaltic drive. The disadvantage of the direct-driven micro / nano positioning system is that the stroke ...

AI Technical Summary

Problems solved by technology

The lever mechanism is the simplest displacement amplification structure. The lever mechanism can be connected in series to obtain a higher displacement amplification ratio, but there is still parasitic rotational motion at the output point of the lever mechanism displacement.

The notable feature of the SR (Scott-Russell) mechanism is the linear motion of the displacement output point. Like the lever mechanism, the SR mechanism can also be nested to obtain a higher displacement magnification. However, the SR mechanism is usually used in a single-degree-of-freedom positioning system Among them, the structural complexity of the SR mechanism limits its application in the planar multi-degree-of-freedom positioning system, so current research focuses on the design, modeling and control of a single SR mechanism

[0004] The design of the planar precision positioning workbench system can be divided into series and parallel. The asymmetry of the series structure affects the application in the precision positioning platform, and the series structure will have error accumulation. The parallel structure is similar to the series structure. The ratio has better stability and dynamic characteristics, but the parallel structure must be decoupled by decoupler or control algorithm

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