867results about How to "Frictionless" patented technology

The invention relates to a three-chain six-freedom parallel flexible hinge micro motion device, wherein it comprises base platform, movable platform, driver on the base platform, and three support rods via flexible joints connected to the driver and movable platform. Said driver comprises three flexible plates on the base platform and piezoelectric ceramic driver connected to the flexible plates; three flexible plates are integrated processed, while each plate is connected to two piezoelectric ceramic drivers in right angle. The invention has compact structure and low installment error.

This invention relates to an electromagnetic progressive shaping method for plate moving coils and a device, in which, said device includes a computer control system, an electromagnetic force generation system and a three-shaft digital control shaping system including a plate clamping elevating device, a supporting model frame and an electromagnetic shaping clamping rod, in which, the computer controls the coil to move downward along the contour of a model profile from the top according to the contour data of the model profile and the plate is formed partly relying on the magnetic force of coil till to the bottom of the model and finish the entire process.

The invention discloses a flexible micro-positioning stage with two degrees of freedom, the design of the flexible micro-positioning stage with two degrees of freedom comprises a flexible mechanism and an integral structure, two piezoelectric ceramic drivers are adopted in the structure, the tail part of each driver is connected with a base through a bolt, and the top end of each driver is connected with a spherical joint through a thread, thereby realizing Hertz contact. The flexible mechanism of the positioning stage mainly comprises three parts of the base, flexible branched chains with entirely consistent structures and a supporting movable platform thereof. Two displacement sensors are used for measuring actual output of the movable platform and respectively fixed between the base and the movable platform through an L-shaped support and a Z-shaped support. The flexible micro-positioning stage is characterized by high resolution and fast dynamic response speed, and can be taken as an auxiliary positioning platform of a nano-imprint lithography positioning system for realizing micro-feeding and precise positioning.

The invention discloses a three-degree of freedom flexible precision positioning workbench. In a structure of the workbench, six piezoelectric ceramic drivers are adopted, the tail of each driver is connected with a substrate through bolts, and the top end is in threaded connection with a ball joint to realize hertz contact; a flexible structure of the positioning workbench mainly comprises the substrate, six flexible branched chains with identical structures and a movable platform supported by the flexible branched chains; and three position sensors are used for measuring the actual output of the movable platform and are respectively fixed between a rigid support and the movable platform. The precision positioning workbench has the characteristics of high resolution ratio and high speed of dynamic response, and can be used as an assisted positioning platform of a nano-imprint lithography positioning system to realize microscale feeding and precision positioning.

The invention provides a pneumatic type soft motion robot based on an earthworm motion principle. The robot comprises a first body part, a second body part and a third body part, wherein the first body part is connected with the second body part through a first telescopic part, the second body part is connected with the third body part through a second telescopic part, and the first body part and the second body part are controlled by a controller arranged on the second body part to stretch and retract; and mechanical steel bristles are arranged at the lower portion of the first body part and the lower portion of the third body part. By the adoption of the robot, a robot motion model is established according to the earthworm motion mechanism, and through the mechanical steel bristles, pneumatic control replacement and simulation of stretching and retracting of transverse muscles and longitudinal muscles of an earthworm, the robot can conduct complex actions of walking straightly, making a turn, crossing an obstacle and the like in a severe environment. Through intelligent control, the robot can be used in industrial pipeline exploration and disaster search and rescue.

The invention provides a six-degree-of-freedom quasi-zero-rigidity vibration isolation system based on a Stewart platform. The system comprises an upper platform, a lower platform and six same landing legs fixed between the upper platform and the lower platform through hinge blocks. The three hinge blocks are distributed in an equilateral triangle mode, two corresponding landing legs are fixed to each hinge block, the adjacent landing legs are perpendicular, and the upper platform has six degrees of freedom relative to the lower platform. The six landing legs have the quasi-zero-rigidity characteristic, so that the vibration isolation system has the quasi-zero-rigidity characteristic on the six degrees of freedom, the all-order resonant frequency of the vibration isolation system is small, and the wide vibration isolation frequency range is achieved. The system has the advantages of being high in bearing capacity and low in resonant frequency, has the good restraint effect on low-frequency vibration, and is suitable for vibration isolation of flywheel systems and optical cameras in the spaceflight field and vibration isolation of equipment such as precision machine tools and precision measuring systems in the civil field.

The invention discloses a two-degree-of-freedom micro-positioning platform. The platform consists of a pedestal, an X-directional multiplying lever, a Y-directional multiplying lever, a compound parallel four-bar guide mechanism and a motion platform, wherein piezoelectric ceramic drivers in the X direction and the Y direction are vertical to each other and are arranged in two rectangular grooves on the pedestal respectively; and the output ends of the drivers are closely attached to the input hinges of the multiplying levers by screwing preload nuts. Because the multiplying levers with special structures and the compound parallel four-bar guide mechanism are adopted, the micro-positioning platform has compact structure and small volume, can ensure high frequency response while realizing large motion range; motion in the X direction and the Y direction can effectively decouple, and combination of the piezoelectric ceramic drivers and the flexible hinge platform ensures no friction of motion transfer, no clearance, high accuracy, high stability and quick response.

The invention discloses a magnetic suspension linear motion platform based on the combination of permanent magnets and electromagnets. The electromagnets are vertically installed in a suspensoid, array permanent magnets are arranged on the surface of a guide rail, the suspension of the suspensoid can be realized by utilizing the principle of holopolarity repulsion between the electromagnets and the permanent magnets; and meanwhile, an eddy current displacement sensor is combined to realize the stable suspension of the suspensoid above the guide rail; two pairs of electromagnets are horizontally installed in the suspensoid, which can provide guidance for the linear motion of the platform by combining with the eddy current displacement sensor; a linear motor stator is fixed on a base, a linear motor rotor is fixed on the suspensoid, a grating ruler is arranged on the surface of the guide rail, and the reading head of the grating ruler is installed on the suspensoid, thus the precise linear positioning motion of the suspensoid can be realized. The platform provided by the invention can realize the functions such as super cleaning, high speed, long stroke, precise positioning motion and the like, which can not be realized by the traditional scheme that a rotary servo motor is utilized to drive, a precise ball screw is utilized to transmit and a slide guide is utilized to support, and has the advantages of good load bearing characteristic and stable suspension performance.

A precise positioning platform consists of output platform, base, three gentle and agreeable mechanisms, three piezoelectric drivers, three positioning devices, three displacement sensors and controllers. It is featured as arranging mechanism and sensors in 120 degree angle towards outside along output platform to ensure precision, stability and linearity of movement and to provide translation in X and Y direction as well as rotation in Z direction, using drivers to ensure quick response speed for achieving nanoresolution and subnauoprecision of positioning.

The invention provides an MDOF (multiple-degree-of-freedom) magnetic suspension motor, belonging to the technical field of motors. A magnetic suspension technology is combined with an MDOF motor technology to design the MDOF magnetic suspension motor. A spherical type MDOF magnetic suspension motor, a cylinder type MDOF magnetic suspension motor and a flat plate type MDOF magnetic suspension motor are provided, wherein a stator and a rotor of a rotating machine unit of the spherical type MDOF magnetic suspension motor are fixedly connected with a deflection motor unit and a suspension motor unit mainly by a primary structure and a secondary structure; a stator and a rotor of a rotating machine unit of the cylinder type MDOF magnetic suspension motor are fixedly connected with primary structures and secondary structures of an axial thrust and suspension motor unit respectively; and a primary structure and a secondary structure of a bilateral linear motor unit of the flat plate type MDOF magnetic suspension motor are fixedly connected with a primary structure and a secondary structure of an oriented suspension motor unit respectively. The MDOF control windings of the three motors are independent mutually and are not coupled; the same secondary structure is used for the suspension control and the deflection control, thereby being simple in structure; and the rotors are supported by adopting a magnetic suspension way, thus the friction does not occur, the speed is high and the service life is long.

The invention discloses a two-degree of freedom precise positioning work table, which comprises a base, a moving platform, a rigid support which is connected with the bottom of the base, and four flexible branched chains which are connected between the moving platform and the base, wherein each flexible branched chain comprises a moving block and three groups of flexible plate spring structures; each flexible plate spring structure consists of two '-'-shaped flexible plate springs; a first group and a second group of the flexible plate spring structures are respectively positioned at the left side and the right side of the moving block; the lower ends of the two '-'-shaped flexible plate springs of a third group of the flexible plate spring structures are connected with the side wall of the upper end of the moving block, and the upper ends thereof are connected with the side wall of the moving platform; four piezoelectric ceramics driving devices are respectively horizontally arranged; a ball-shaped joint of each driving device is supported on the side wall of the lower end of the moving block; and conducting strips of two position sensors are respectively connected with the upper plane of the rigid support and the lower plane of the moving platform. The positioning work table can be taken as an auxiliary positioning platform of a nanometer embossing photoetching positioning system to realize the microscale feeding and the precise positioning.

A movable optical element adjusting and positioning device relates to a photoetching apparatus. A movable lens set in the device is fixed on a main lens cone by a laminated spring plate and can move along an optical axis or carry out horizontal inclination adjustment under the action of a driving motor. The driving of the driving motor adopts a long handle of a level mechanism in a driving mechanism of a gapless flexible bearing, and a short handle thereof drives the movable lens set to move along the optical axis. The adjusting and positioning device achieves an axial movement accuracy which can be lower than 0.5 microns and a horizontal adjustment accuracy which can reach 0.5mrad. The adjusting and positioning device has compact structure, stable operation, no friction or lubrication, low hysteresis and good repeatability, and the movement stroke of the movable lens set can reach 0.2 mm and the linearity is good.

A plane parallel type three-freedom-degree precise positioning work table has three flexible branched chains which are total the same in structure and respectively and correspondingly arranged on the inner sides of three equal sides of a base of a triangular structure and a movable platform arranged on the inner sides of the three flexible branch chains and arranged at the center of the base, wherein the base, the three flexible branched chains and the movable platform are integrally formed, the three flexible branched chains are in flexible connection with the base, displacement input ends of the three flexible branched chains respectively correspond to three included angles of the base, the movable platform is in flexible connection with the three flexible branched chains, a groove is formed between the inner side of each included angle of the base and the corresponding flexible branched chain, a piezoelectric ceramic driver is horizontally arranged in the groove, one end of the piezoelectric ceramic driver is in hertz contact with the displacement input ends of the flexible branched chains, and the other end of the piezoelectric ceramic driver is fixedly connected on the base through bolts. The plane parallel type three-freedom-degree precise positioning work table is compact in structure, flexible to control, high in static and dynamic stiffness, high in kinematic accuracy, low in inertia, free of error accumulation, free of friction and heating and fast in responding.

The invention discloses a spatial three-dimensional micro-displacement precise positioning device which comprises a fixed base and a moving table, wherein the moving table is connected with the fixed base through three connecting mechanisms having a displacement amplifying function and other two connecting mechanisms arranged oppositely respectively; the other two connecting mechanisms play the effect of displacement decoupling and enhance the rigidity of a platform; the connecting mechanisms having the displacement amplifying function amplify piezoelectric ceramic output displacement by a piezoelectric ceramic driver and a secondary cascaded lever amplification mechanism which is arranged symmetrically, so that the working stroke of the positioning device is enlarged and the displacement decoupling function can be realized.

The invention discloses a testing system of a plate high temperature forming limit diagram. The testing system comprises a biaxial drawing device, a material heat / force simulation testing device and a measurement analysis device, wherein the biaxial drawing device is used for carrying out drawing deformation on a sample after the sample is heated by the material heat / force simulation testing device; the measurement analysis device is used for obtaining sample deformation data and analyzing and calculating the sample transformation data so as to obtain the plate forming limit diagram. According to the testing method of the plate high temperature forming limit diagram, by designing the biaxial drawing device and corresponding samples at different strain states, the temperature and the strain velocity of a sample transformation area can be controlled accurately by using the material heat / force simulation testing device; and moreover the deformation area is free from friction during the drawing process; the operation is simple; the forming limit diagrams under different temperatures and strain velocities of a plate can be obtained; and important references are provided for process design and mold design in the plate tepidity forming technology.

The present invention provides a workpiece three-dimensional dimensions automatic detection system and method based on laser scanning. The system comprises a three-dimensional moving platform, a three-dimensional moving platform numerical control module, a laser scanning sensor, a laser scanning sensor numerical control module, a laser scanning sensor rotating mechanism, a power module and detection software, and belongs to the technical field of three-dimensional scanning and digital analysis. According to the system, the numerical control three-dimensional moving platform is used, so that total dynamic measurement is implemented, manual movement detection is replaced, and detection efficiency is improved; a pneumatic floating slideway is used, so that movement precision is improved; thelaser scanning sensor rotating mechanism is assembled on a Z-axis pneumatic floating slideway, so that deflexion of the laser scanning sensor can be implemented, and a workpiece is scanned from different angles; and a blue line sweeping laser scanning sensor is selected, so that anti-interference is strong, and measurement precision is high.

The invention discloses an installation structure of a train roof jumper cable of the urban rail. A first high-voltage connector casing, a first high / low voltage connector, a second high / low voltage connector and a first low-voltage connector casing are positioned in the top of a first compartment; a second high-voltage connector casing, a third high / low voltage connector, a fourth high / low voltage connector and a second low-voltage connector casing are positioned in the top of a second compartment; the first high / low voltage connector on the first high-voltage connector casing is connected to the third high / low voltage connector on the second high-voltage connector casing via the jumper cable; and the second high / low voltage connector on the first low-voltage connector casing is connected with the fourth high / low voltage connector on the second low-voltage connector casing via the jumper cable. The installation structure has the advantages that the operation space is large, the installation environment is simple, and the structure is safer and more reliable; the service life is longer; the cable path is shorter, and the cost is reduced greatly; the sealing performance is higher; the whole installation structure can be dismounted rapidly, the occupation space is small, and the structure is beautiful and tidy; and it is not required to reconstruct end wall and channel structures, the workload is low, and the cost is lower.

The invention provides a tracked magnetic suspension vehicle / a conveyer, which comprise a track, permanent magnets, a suspension seat and a driving wheel. The track is fixedly connected with the permanent magnet or a magnetizer, the suspension seat is fixedly connected with the permanent magnet, and the permanent magnet on the track and the permanent magnet on the suspension seat have homopolarity (or heteropolarity) and are arranged oppositely, generate magnetic suspension repulsive force (or attractive force) opposite to gravitational attraction, reduce or eliminate friction force when a vehicle runs, and reduce energy dissipation. The tracked magnetic suspension vehicle has the advantages of no energy consumption during suspension, low energy consumption during running, and energy saving. The tracked magnetic suspension vehicle achieves trackless magnetic suspension, also can run on a road, and is not limited by railway track any more. The tracked magnetic suspension vehicle also can be used as a magnetic suspension conveyer, and is energy-saving, clean and dustless.

The invention relates to a static pressure air suspension direct drive turntable, which comprises a base, a base connection block, a rotating shaft, a torque motor rotor, a torque motor stator and a torque motor installation frame, wherein the torque motor rotor is fixedly installed on the rotating shaft, and the torque motor stator is connected with the torque motor installation frame; an upper air suspension ring is installed at the upper part of the rotating shaft, and a first air bearing assembly which corresponds to the upper air suspension ring is arranged above the torque motor installation frame; a lower air suspension ring is installed at the lower part of the rotating shaft, and a second air bearing assembly which corresponds to the lower air suspension ring is arranged below the torque motor installation frame; and the base connection block is arranged below the second air bearing assembly, the base is arranged below the base connection block, and the base connection block and the base form a third air suspension bearing assembly. The static pressure air suspension direct drive turntable has high dynamic and static performance and precision, and the comprehensive requirements on the moving performance, bearing capability and no working environment pollution of the turntable under the limiting operating conditions of advanced electronic manufacturing, optical detection and manufacturing and the like can be simultaneously satisfied.

The invention relates to an active maglev electromagnetic catapult for aircraft carriers. The active maglev electromagnetic catapult comprises a maglev guide rail fixed on a catapult base, a catapult platform sleeved on the guide rail, and a linear motor. The shipboard aircraft catapult platform is supported by active maglev supporting technology and is driven by the high-power linear catapult motor, and catapult-assisted take-off of shipboard aircrafts is achieved. The active maglev supporting technology is introduced, a catapult platform position control system and a speed control system are provided, and accordingly positioning precision and catapulting speed of the catapult platform are increased greatly, electrification is achieved and the service life is prolonged. The active maglev electromagnetic catapult has the advantages of adjustable supporting rigidity and damping, no friction, no need of lubrication, no environment pollution and the like.

A magnetic suspension spherical active joint belongs to the technical field of electromechanical integration. The magnetic suspension spherical active joint comprises a base, a joint stator, a joint rotor, a rotor arm and a detection control system, wherein the base and the joint stator are fixed into a whole; the inside of the joint stator is a spherical inner surface with an opening in shape; the joint rotor is arranged inside the joint stator; the joint rotor and the rotor arm are fixed into a whole; the rotor arm extends to the outer end through the opening of the joint stator; certain air gap exists between the spherical inner surface of the joint stator and the spherical outer surface of the joint rotor when both are concentric; and the joint stator is provided with at least two clamping mechanisms and a plurality of sensors for detecting the position and the moving speed of the joint rotor. Magnetic suspension technology and motor technology are integrally applied to realize suspension support of the spherical joint and drive the joint rotor to rotate. The invention has simple and compact structure, favorable dynamic performance and rapid response speed, and realizes no friction and no abrasion between the spherical joint rotor and the joint stator.

The invention discloses an electric screw driver having a magnetic force overload protector. The screw driver comprises a shell, a motion delivering mechanism which comprises a motor, a motor gear, a driving shaft gear and a driving shaft, and a screw driver component which comprises a screw driver head, an output shaft and a head cover connected to a mounting slot, wherein a sleeve is arranged on one end of the driving shaft close to the screw driver head; more than two big permanent magnets are arranged outside the sleeve at equal intervals; small permanent magnets having a same number of the big permanent magnets are arranged on the output shaft in the sleeve at equal intervals; a U-shaped shifting fork is fixedly connected to two end faces of the sleeve after being inserted from the exterior of the shell; and the U-shaped shifting fork drives the sleeve to axially slide on the driving shaft. The magnetic force overload protector has simple structure, is capable of efficiently performing the overload protection function, generates no friction and noise, is environment-friendly, and can be set with different limited torques by regulating the shifting fork on the shell.

The invention discloses a two-stage micro-displacement amplification mechanism which is characterized in that two triangle displacement zooms are arranged and respectively are a first stage triangle displacement zoom and a second stage triangle displacement zoom, each triangle displacement zoom comprises four sloping sides; the input end of the first stage triangle displacement zoom is linked with a driven element; the output end of the first stage triangle displacement zoom is linked with the input end of the second stage triangle displacement zoom. In the optimized scheme, flexibility hinges are respectively arranged at the joint of the displacement input end and the four sloping sides of the triangle displacement zoom and the joint of the displacement output end and the four sloping sides; the displacement input end of each triangle displacement zoom is provided with a positioning step. Two-stage micro-displacement amplification mechanism provided with by the invention has the advantages of zero friction, zero clearance and zero delay, and is easy to maintenance and service; the mechanism avoids oversized elastic counterforce caused by structural distortion, ensures direction stabilization of the displacement output; the displacement enlargement ratio of the two-stage displacement amplification is greatly improved, and the mechanism has very high practicability.

The invention relates to a piezoelectric actuator, in particular to an inner driving type passive clamping piezoelectric actuator. The problems that according to an existing inner driving type clamping piezoelectric actuator, self locking cannot be achieved during outage, a driver is slow in running speed, and requirements for machining accuracy of a clamping body and a guiding track are high are solved. The inner driving type passive clamping piezoelectric actuator comprises a guiding track, driving bodies, a driving piezoelectric stack, two clamping piezoelectric stacks and two clamping bodies. Each clamping body comprises a piezoelectric stack pre-tightening piece, two clamping triangle amplified flexible hinges, two clamping piezoelectric stack supporting bodies and two clamping heads. Each driving body comprises two driving triangle amplified flexible hinges, two driving piezoelectric stack supporting bodies and two driving piezoelectric stack pre-tightening pieces. The driving bodies connected with the clamping bodies are arranged between the two clamping bodies. The driving bodies and the clamping bodies are placed in grooves of two arms of the guiding track. The piezoelectric actuator is used in a micro-driving process.

The invention discloses a two-freedom-degree, large-travel and large-load micro-positioning platform which comprises an upper platform and a lower platform. The lower platform is provided with a base. The upper platform comprises a central movable platform. The movable platform is connected with the base through four flexible standing columns. The four flexible standing columns are distributed at four corners below the movable platform. Each flexible standing column is formed by serially connecting two flexible hook hinges. Each flexible hook hinge is formed by two coplanar circular flexible hinges in a penetration manner. Each of two adjacent movable blocks of four movable blocks is driven by a voice coil motor to move in a translation manner. The two-freedom-degree, large-travel and large-load micro-positioning platform has the advantages that the voice coil motors are used as drivers, and large-travel motion range and submicron-level resolution are provided; the movable platform and the base are connected through the flexible standing columns, and the radial rigidity of the positioning platform is quite large.

The invention discloses a double-reed large-turning angle flexible joint, relates to the technical field of mechanical kinematic pairs, and solves the problem that the conventional flexible hinge is small in motion range. The double-reed large-turning angle flexible joint is characterized in that a first shell is integrally formed by a 210-degree arc plate and a 90-degree arc plate; the side wall of the 210-degree arc plate and the side wall of the 90-degree arc plate are integrally connected, and the thickness of the 90-degree arc plate is smaller than that of the 210-degree arc plate; the 210-degree arc plate of the first shell is arranged outside a 90-degree arc plate of a second shell, the 90-degree arc plate of the first shell is arranged inside a 210-degree arc plate of the second shell, and a gap is formed between the first shell and the second shell; a first flexible plate is inserted into the first shell and the second shell through a first through groove and a second through groove; a second flexible plate is inserted into the first shell and the second shell through the remaining parts of the first through groove and the second through groove. The double-reed large-turning angle flexible joint is applied to the field of large-stroke precision transmission mechanisms and flexible transmission.

The invention relates to a long-distance air-flotation linear guide rail unaffected by air pipe disturbance, comprises an air flotation shaft and at least two air flotation sleeves, wherein the air flotation sleeves are sleeved on the air flotation shaft and are both connected with an air storage sleeve in a sealing way; the air storage sleeve is connected with a guide bearing member which is in follow-up with a moving member; the long-distance air-flotation linear guide rail also comprises a long-distance linear guide rail which is used for providing support and guidance for long-distance motion, wherein a sliding block can be slidably arranged on the long-distance linear guide rail and fixedly connected with the air flotation shaft; an air storage cavity is arranged between the air storage sleeve and the air flotation shaft; and the shaft center of the air flotation shaft is provided with an air inlet channel which is connected with a compressed air inlet pipe and communicated with the air storage cavity; and the air storage cavity is provided with an air outlet which is communicated with air outlets of all air flotation sleeves through air pipes. The invention can effectively realize long distance, eliminate the influence of resistance generated by the motion of the sliding block due to bending of air pipes and is high in reliability and convenient to install, use and maintain.

The invention provides a flexible back supporting device for a large-caliber reflector. The supporting device comprises the large-caliber reflector, a lens back plate, a supporting plate, a joint plate, a screw, flexible branch hinges, sliding flexible hinge supports, a flexible hinge connecting rod and a driving system. The three flexible branch hinges and the joint plate together form a combined hinge to constrain three degrees of horizontal moving freedom of the large-caliber reflector, the pitching and deflecting movements of the large-caliber reflector are achieved through flexible hinge blocks of the sliding flexible hinge supports and the driving system, when the driving system is tightly locked, the two degrees of rotating freedom of the large-caliber reflector are constrained, and the degree of the plane inner rotating freedom of the large-caliber reflector is constrained through the flexible hinge connecting rod. The flexible hinge structure is adopted as the supporting and positioning mechanism of the large-caliber reflector, nanoscale positioning precision is achieved, and the structural stability and the precision stability are ensured through matched design of the flexibility and the moving precision of the large-caliber reflector. The flexible back supporting device has the advantages of being simple in structure, stable in movement, free of friction or gaps, needless for lubrication and high in moving sensitivity.

The invention discloses an accompanying vibration type oil storage atomize which comprises the following components: an oil storage element (1) and a porous vibration element (2), wherein the oil storage element (1) comprises a central passage (104) and an oil tank (103) surrounding the central passage; a base (105) is arranged at the bottom of the oil storage element (1); two inwards-raised oil inlets (120) are formed in the sidewall of the central passage (104); air inlets (121) are formed in the base (105), and are communicated with the central passage (104) through an airflow; the porous vibration element (2) is positioned in the central passage (104), and comprises a vibration cavity (202) and an oil guide element (203) positioned in the vibration cavity (202); a plurality of micropores (207) are formed in the sidewall of the vibration cavity (202); an upper end cover (201) is arranged at the upper part of the vibration cavity (202), and a lower end cover (204) and a vibration source connecting end (206) connected with the lower end cover (204) are arranged at the lower part; the vibration cavity (202) is sleeved with a spring (205).

The invention discloses a two-degree-of-freedom nanometer positioning platform. The nanometer positioning platform comprises a movable platform and a base which are connected with each other through a flexible branched chain in an x-axis direction and a flexible branched chain in an y-axis direction. As adopting a flexible parallel connection structure, the nanometer positioning platform has the advantages of high rigidity, high precision, low inertia, compact structure, no error accumulation and the like; and as adopting a flexible plate spring as a transmission component, the nanometer positioning platform has the advantages of no mechanical friction and no gap. Furthermore, based on the elastic deformation of materials, the tiny deformation generated by the flexible plate spring and a tiny working space at the tail end of an actuator, the nanometer positioning platform can effectively eliminate the defects of non-linearity and the like of a parallel connection mechanism; and two piezoelectric ceramic drivers are used for respectively driving the two flexible branched chains, so that a relative position of a template and a substrate in an imprint lithography process can be initiatively adjusted. The two-degree-of-freedom nanometer positioning platform provided by the invention can be taken as an auxiliary positioning platform of a nanometer imprint lithography positioning system, and can implement micro-scale feeding and precise positioning.