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Spatial three-dimensional micro-displacement precise positioning device

A precision positioning and micro-displacement technology, which is applied in the direction of piezoelectric effect/electrostrictive or magnetostrictive motors, nanostructure manufacturing, electrical components, etc., can solve the problems of small piezoelectric ceramics, low unipolar lever amplification ratio, and Problems such as the positioning effect of the positioning device, to achieve the effect of eliminating the coupling phenomenon, eliminating the displacement coupling, and increasing the movement stroke

Active Publication Date: 2015-03-25
SHANDONG UNIV
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AI Technical Summary

Problems solved by technology

[0003] 1. Most of the existing positioning platforms focus on the planar two-degree-of-freedom design, which cannot realize three-dimensional movement in space;
[0004] 2. Due to the small output displacement of piezoelectric ceramics, it is often impossible to meet the requirements of large stroke positioning. The lever mechanism can achieve the purpose of amplifying the output displacement of piezoelectric ceramics, but the unipolar lever has a low amplification ratio, and in most cases cannot meet the large stroke positioning requirements. Itinerary positioning requirements;
[0005] 3. The traditional displacement amplification mechanism will have the phenomenon of displacement coupling after being driven by piezoelectric ceramics, which seriously affects the positioning effect of the positioning device and cannot meet the requirements of nanometer ultra-precision positioning

Method used

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  • Spatial three-dimensional micro-displacement precise positioning device
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  • Spatial three-dimensional micro-displacement precise positioning device

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Embodiment 1

[0042] Embodiment 1: A three-dimensional micro-displacement precision positioning device, its structure is as follows Figure 1-5 As shown, it includes: a fixed base 1 with four sides; a motion table 3 arranged in the center of the fixed base 1;

[0043] The X-axis directions on both sides of the moving platform 3 are respectively connected to the fixed base 1 through the first connection mechanism 2 and the second connection structure 5;

[0044] The Y-axis direction on both sides of the moving table 3 is connected to the fixed base 1 through the third connecting mechanism 12 and the fourth connecting structure 13; the Z-axis direction on the lower side of the moving table 3 is connected to the fixed base 1 through the fifth connecting mechanism 14. The base 1 is connected;

[0045] Wherein, the first connecting mechanism 2, the third connecting mechanism 12 and the fifth connecting mechanism structure 14 are identical; the structures of the second connecting mechanism 5 and...

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Abstract

The invention discloses a spatial three-dimensional micro-displacement precise positioning device which comprises a fixed base and a moving table, wherein the moving table is connected with the fixed base through three connecting mechanisms having a displacement amplifying function and other two connecting mechanisms arranged oppositely respectively; the other two connecting mechanisms play the effect of displacement decoupling and enhance the rigidity of a platform; the connecting mechanisms having the displacement amplifying function amplify piezoelectric ceramic output displacement by a piezoelectric ceramic driver and a secondary cascaded lever amplification mechanism which is arranged symmetrically, so that the working stroke of the positioning device is enlarged and the displacement decoupling function can be realized.

Description

technical field [0001] The invention relates to the technical field of micro-nano operation and high-precision positioning, in particular to a three-dimensional micro-displacement precision positioning device in space. Background technique [0002] With the rapid development of high-tech technologies such as microelectronic processing technology, communication technology, and ultra-precision processing technology, people have increasingly strong demands for mechanical devices with high-precision positioning functions, especially those that can achieve nanometer precision, large strokes, and multiple degrees of freedom. nanopositioning system. Piezoelectric ceramics are often used as drivers for precision positioning devices due to their advantages of no friction, large output, and output of micron-level or even nano-level displacements. Atomic force microscopes are an example. However, traditional positioning platforms often have the following defects : [0003] 1. Most of...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B25H1/00
CPCB82B3/0004B82Y40/00H02N2/02
Inventor 闫鹏杜志元
Owner SHANDONG UNIV
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