107results about How to "High displacement resolution" patented technology

The invention discloses an integrated type six degrees of freedom precision positioning platform. The integrated type six degrees of freedom precision positioning platform comprises a base, a lower platform component, a middle platform component and an upper platform component. The integrated type six degrees of freedom precision positioning platform utilizes a piezoelectric ceramics brake to enable the lower platform component to achieve rectilinear motion along an X direction and a Y direction of a coordinate system, enable the middle platform component to achieve a rectilinear motion along an Z direction of the coordinate system and a rotary oscillation around an axis which is parallel to the X axis and an axis which is parallel to the Y axis, and enables the upper platform component to rotate around the Z axis. The integrated type six degrees of freedom precision positioning platform can achieve precise control position on the six degrees of freedom and effectively avoids displacement coupling among axes due to the fact that the middle platform component and the lower platform component are designed into a symmetric structure. Meanwhile, the transmission platform can achieve integral manufacture, is driven by the piezoelectric ceramics brake, has the advantages of being free from friction and coupling, being high in precision, long in journey and high in resolution rate and can meet complex manufacturing and operation requirements of nanometer science and technology studies.

The invention discloses a spatial three-dimensional micro-displacement precise positioning device which comprises a fixed base and a moving table, wherein the moving table is connected with the fixed base through three connecting mechanisms having a displacement amplifying function and other two connecting mechanisms arranged oppositely respectively; the other two connecting mechanisms play the effect of displacement decoupling and enhance the rigidity of a platform; the connecting mechanisms having the displacement amplifying function amplify piezoelectric ceramic output displacement by a piezoelectric ceramic driver and a secondary cascaded lever amplification mechanism which is arranged symmetrically, so that the working stroke of the positioning device is enlarged and the displacement decoupling function can be realized.

A super-thin operation table of 3-freedow micro-motion type consists of base of micro-motion table, rotator of micro-motion table and stator of micro-motion table. It is featured as forming said stator of micro-motion table by inserting 3-sets of driving unit coils into one coil framework, forming said rotator of micro-motion table by top slide cover and bottom slide cover, firm-jointing two said covers and suspending two said covers on base of micro-motion table through air-floating or magnetic-floating bearing.

The invention relates to a piezoelectric drive device, in particular to a cylindrical driven clamping type piezoelectric wriggle linear motor to solve the problems that an existing drive clamping type wriggle motor cannot be powered off or self-locked and is not suitable for a compact, thin and long motion mechanism, and a driven clamping type wriggle motor is large in axial size and low in concentricity and control precision and needs an independent guide mechanism. The cylindrical driven clamping type piezoelectric wriggle linear motor comprises a guide rail, a drive mechanism, two annular gaskets and two sets of clamping mechanisms. The drive mechanism comprises a drive sleeve, a first piezoelectric stack and two clipping bodies. Each set of clamping mechanism comprises a clamping body, three second piezoelectric stacks and three flexible bodies. The middle of the drive sleeve is provided with the first piezoelectric stack, the clipping bodies, the gaskets and the clamping bodies are installed inside the drive sleeve from interior to exterior in a left-and-right symmetrical mode, the clipping bodies are in threaded connection with the drive sleeve, and the three flexible bodies are respectively and evenly distributed on the inner surfaces of the clamping bodies in the circumferential direction of the clamping bodies. The piezoelectric drive device is applied to the precise positioning and driving field.

The invention discloses a modularization moving-iron type six-freedom-degree maglev motion platform and is mainly applied to semiconductor lithography equipment. The motion platform comprises a pedestal, at least one maglev planar motor module and a somatosensory controller. Each maglev planar motor module is composed of a maglev planar motor rotor and a maglev planar motor stator so that a micro moving workbench can rotate in an X direction, in a Y direction and around a Z axis. Compared to the prior art, the motion platform provided by the invention has the following advantages: coils are optimized and the coils with different specifications can be adaptive to a certain thrust range so that combination can be carried out according to different carrying capacity requirements; and the provided motion platform also has the advantages of simple structure, high-efficient integration, saved production cost and the like.

The invention relates to an actuating platform with functions of slight swing prevention and pointing regulation and an actuating method. The platform comprises actuating rods, a lower base, an upper platform, a flexible hinge support, second-stage diamond-shaped displacement amplification mechanisms, piezoelectric piles and eddy current displacement sensors, wherein lower base is connected with the upper platform by the flexible hinge support, the lower ends of the actuating rods are fixed on the lower base, the actuating rods are arranged at diagonal lines in a paired way, the upper ends of the actuating rods are connected with the upper platform by a flexible hinge, piezoelectric drivers comprising the piezoelectric piles and the second-stage diamond-shaped displacement amplification mechanisms are connected in series onto the actuating rods, and the eddy current displacement sensors are arranged aside the actuating rods. A displacement signal of the upper platform is acquired by the eddy current displacement sensors, the actuating rods are driven to output the displacement along an axial direction by the piezoelectric drivers comprising the piezoelectric piles and the second-stage diamond-shaped displacement amplification mechanisms, the piezoelectric piles arranged at the diagonal lines in a paired way actuate coordinatively, the upper platform is driven to rotate along a diagonal direction, and high-accuracy regulation of a two-dimensional pointing angle and active control on slight swing of the pointing angle can be achieved.

The invention discloses a six-degree-of-freedom acupuncture robot for internal use of a magnetic resonance imager. The six-degree-of-freedom acupuncture robot comprises a Cartesian module, a swing module and an acupuncture module; the swing module is fixed onto the Cartesian module, the acupuncture module is fixed onto the swing module, the Cartesian module is used for controlling the motion of the swing module in X direction, Y direction and Z direction, and the X direction, the Y direction and the Z direction are perpendicular to one another; the swing module is used for controlling the acupuncture module to swing horizontally; the acupuncture module is used for controlling the pitching motion and the needle movement of the acupuncture module. Various forms of non-magnetic ultrasonic motor drive is adopted, prostate puncture with the desired position and posture can be realized, and based on the characteristics of power off and self-locking of an ultrasonic motor, adding of an extralocking device to keep the position is not needed; the overall system of the six-degree-of-freedom acupuncture robot is simple and compact and easy to miniaturize.

The invention discloses a variable-scale driving bionic dry adhesion mechanism. The mechanism comprises a wedge-shaped seta beam unit, a tangential loading unit, a variable-scale driving transmissionunit, a normal driving unit and a supporting outer frame, the wedge-shaped seta beam unit is used for contacting and adhering a target object, the tangential loading unit is used for carrying out tangential loading/unloading on the wedge-shaped seta beam, the variable-scale driving transmission unit transmits the driving displacement and the driving force to the tangential loading unit, the normaldriving unit serves as an active driving source of the mechanism and is used for loading/unloading the variable-scale driving transmission unit, and the supporting outer frame is used for supportingthe whole mechanism and keeping the relative positions of all parts of the whole mechanism. According to the variable-scale driving bionic dry adhesion mechanism, a traditional point loading mode is converted into a surface loading mode, stable tangential loading/unloading of the wedge-shaped seta beam under micro-displacement is realized through a variable-scale driving principle, so that the application requirements of space fragment cleaning and flexible circuit board nondestructive operation are met.

The invention relates to a rough-fine-movement laminated workbench with laser interferometer measurement. The workbench is mainly used in a lithography system. The laminated workbench comprises a fine movement bench, a rough movement bench, a balancing block, four vibration isolators, and a measuring frame. The rough movement bench comprises a rough movement bench frame, four moving iron electromagnetic driving modules, and four air bearings. The fine movement bench is arranged at the middle of the rough movement bench frame. The system also comprises a laser interferometer measurement assembly used in position feedback between a sheet bearing stage of a six degrees of freedom (DOF) positioning device and a pedestal. The laser interferometer measurement assembly is composed of a laser source, an optical path assembly, and a laser interferometer. With the laser interferometer measurement assembly, real-time six-DOF measurement can be carried out upon the movement part of the device. The workbench provided by the invention has a simple and compact structure. The mass of the movement parts is light. A rough movement bench driving motor adopts a lengthened rectangular coil group. On a basis that movement precision is not influenced, manufacturing difficulty of a large-scale halbach magnetic steel array is avoided, and driving motor stroke is increased, such that movement precision is improved.

The invention discloses a self-mixing interference orthogonal detection vibration measuring device and method. A single-mode semiconductor laser diode adjustable in constant current source control outputs incidence laser, one part of the incidence laser is reflected to a second photoelectric diode, and optical signals are converted into current signals which are detected by a second photoelectricdetection module and fed back to a collecting module; the other part of the incidence laser is irradiated on the surface of a to-be-detected object and is reflected to a first photoelectric diode according to the original path, and the optical signals are converted into the current signals which are detected by a first photoelectric detection module and fed back to the collecting module. Comparedwith a traditional self-mixing measuring device, the self-mixing interference orthogonal detection vibration measuring device has the advantages that the orthogonal self-mixing signals can be acquired, inverse tangent demodulation of the vibration signals is completed, signal demodulation difficulty of the system is reduced, high displacement resolution is achieved, demodulation precision of the vibration signals of the system is improved, and real-time and online measuring can be realized.

The invention relates to a bi-piezoelectric stack driving type precision rotary driving device, and belongs to the technical field of precision engineering. The bi-piezoelectric stack driving type precision rotary driving device comprises a support base, a rotary table, a stator assembly, a bearing and the like; the support base and the rotary table are connected through the bearing in a matched manner; the support base and the stator assembly are connected through a bolt; the rotary table and the stator assembly are contacted and matched through the front end of a driving foot; and the bearing, the support base and the rotary table are in interference fit. When an exciting electric signal acts on a stack type piezoelectric component, the stack type piezoelectric component performs axial elongation based on the inverse piezoelectric effect; therefore, the driving foot performs tangential displacement, so that the rotary table is driven to perform rotational motion; and the direction and the time sequence of driving voltage are changed, so that the rotary table can be controlled to perform forward rotation, inverse rotation and positioning stillness. The bi-piezoelectric stack driving type precision rotary driving device disclosed by the invention has the technical advantages of being simple in structure, high in positioning precision, large in stroke, rapid in response speed and the like, and has wide application prospect in the technical field of precision engineering.

The invention discloses a two-dimensional rapid deflection table combining a sensing unit with a constraint element and a method. The deflection table comprises an X axis angle displacement sensing measurement device and a Y axis angle displacement sensing measurement device which are located between a micro-angle swinging platform and a base and further comprises four linear voice coil motors, and a double-axis flexible hinge is arranged on the lower surface of the micro-angle swinging platform. The X axis angle displacement sensing measurement device and the Y axis angle displacement sensing measurement device each comprise a rigid support, a pair of flexible metal beams which extend out relative to the two sides of the rigid support and mass blocks which are fixedly connected with the tail ends of the flexible metal beams correspondingly. The positions, nearby the root, of the upper surface and the lower surface of each flexible metal beam are provided with electric resistance strain gauges in an attachment mode. The first voice coil motor and the third voice coil motor are oppositely arranged with the same specification and form a first actuator set. The second voice coil motor and the fourth voice coil motor are oppositely arranged with the same specification and are perpendicular to the first actuator set in a crossing mode. The voice coil motors are adopted for driving to achieve large angular travel, the constraint rigidity of the deflection table is improved through the flexible metal beams, and the mechanism stability is improved; and meanwhile, the deflection table serves as the sensing unit to perform real-time measurement of double-axis deflection angles in a strain feedback mode.

The invention relates to a precision sun sensor applied to an image stabilizing system. The precision sun sensor comprises a filtering system, a focusing lens and a PSD (Phase-Sensitive Detector), wherein the filtering system at least comprises a primary optical filter and a secondary optical filter, the primary optical filter is arranged at the right front end of the precision sun sensor for reflecting sunlight heat and attenuating energy of incident rays in an observation wave band; the focusing lens is arranged behind the primary optical filter and is used for gathering sunlight after primary filtering onto the focal position of the focusing lens; the secondary optical filter is arranged in right front of the focal plane of the focusing lens and is used for secondarily filtering gathered light rays; the PSD is arranged at the focal position of the focusing lens and is used for converting a solar facula energy signal into an electric signal and recognizing angular offset of the incident rays by an acquired four-quadrant electrical signal.

The invention relates to the field of testing, in particular to a TeraHertz wave Doppler interferometry instrument and method to solve the problems of the prior art. The instrument comprises a reference light adjusting device, a target detecting device and a data processing device. Interference signals processed by a THz wave beam splitter are filtered through a THz filter, and the filtered interference signals are detected through a THz wave detector; then signals output by the THz wave detector are recorded through an oscilloscope, and finally data acquired by the oscilloscope are analyzed and processed through a processor, so that the movement distance and speed of a target relative to an interferometer are obtained. The wavelength of the TeraHertz wave is larger than dust grains, and therefore dust penetrability is high. The wavelength of the TeraHertz wave is smaller than that of microwaves, so that displacement resolution is high. Furthermore, interference fringe frequency is low, and the bandwidth of a required probe and oscilloscope can be effectively reduced.

The invention relates to a complete common-path type microchip laser feedback interferometer which comprises a microchip laser, wherein a first spectroscope is arranged on an axis at an emitting end of the microchip laser; a first holophote is arranged on a reflected light path of the first spectroscope; a second holophote is arranged on the reflected light path of the first holophote; a first acousto-optic frequency shifter, a second acousto-optic frequency shifter and a second spectroscope are arranged on the reflected light path of the second holophote in turn; the second spectroscope is arranged on a transmission light path of the first spectroscope; a photoelectric detector is arranged on the transmission light path of the second spectroscope; a circular light path is formed by the first spectroscope, the first holophote, the second holophote, the first acousto-optic frequency shifter, the second acousto-optic frequency shifter and the second spectroscope; the laser emitted by the microchip laser once returns to a resonant cavity of the microchip laser through the circular light path, thereby modulating an output power of the laser and forming the reference feedback light; and the laser once passing by a circular path is reflected by a to-be-detected object and returns to the resonant cavity of the microchip laser through the circular light path again, thereby modulating the output power of the laser and forming the measuring feedback light. The complete common-path type microchip laser feedback interferometer can be widely applied to the unmatched target non-contact type accurate displacement measurement.