Large-stroke micro-drive precise two-dimensional worktable
A technology of large stroke and worktable, which is applied in the field of giant magnetic micro-drive large stroke precision two-dimensional worktable, can solve the problems of small stroke of flexible hinge, unfavorable performance of worktable, hysteresis of piezoelectric ceramics, etc. The effect of large output force and strong applicability
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[0025] In order to better understand the present invention, the following is attached Figure 1-3 The technical scheme of the present invention will be further described with the specific embodiments.
[0026] Such as figure 1 , 2 The large-stroke micro-drive precision two-dimensional worktable shown is mainly composed of a base, X and Y bidirectional feed devices that are perpendicular to each other in a two-dimensional plane, and a top work table 8 on the top of the feed device. Y-direction feed device Set on the X-direction feeding device. X-direction feeding device includes X-direction large-stroke feeding device and X-direction micro-feeding device 16, Y-direction feeding device includes Y-direction large-stroke feeding device and Y-direction micro-feeding device 9; Y-direction large-stroke feeding device The device is arranged on the X-direction micro-feeding device 16 and can move with the feeding action of the X-direction micro-feeding device 16. The large-stroke micro-...
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