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Large-stroke micro-drive precision two-dimensional worktable

A large-stroke, micro-drive technology, applied in the direction of manufacturing tools, large fixed members, metal processing equipment, etc., can solve the problems of small strokes of flexible hinges, unfavorable workbench performance, hysteresis of piezoelectric ceramics, etc., to achieve large displacement range and output The effect of strong force and strong applicability

Inactive Publication Date: 2015-11-18
WUHAN UNIV OF SCI & TECH +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] At present, most of the ultra-precision micro-motion worktables that are widely used in practice include flexible hinge mechanisms and use piezoelectric ceramics as driving elements. Characteristics such as damping, small stroke, and hysteresis of piezoelectric ceramics have a negative impact on the improvement of table performance

Method used

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Embodiment Construction

[0025] For a better understanding of the present invention, below in conjunction with the attached Figure 1-3 The technical solution of the present invention will be further described with specific embodiments.

[0026] Such as figure 1 , 2 The large-stroke micro-drive precision two-dimensional workbench shown is mainly composed of a base, X and Y two-way feeding devices perpendicular to each other in the two-dimensional plane, and a top working table 8 on the top of the feeding device, and the Y-direction feeding device Set on the X-direction feed device. The X-direction feed device includes the X-direction large-stroke feed device and the X-direction micro-feed device 16, and the Y-direction feed device includes the Y-direction large-stroke feed device and the Y-direction micro-feed device 9; the Y-direction large-stroke feed device 9; The device is arranged on the X-direction micro-feeding device 16 and can move with the feeding action of the X-direction micro-feeding d...

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Abstract

The invention discloses a large-stroke micro-drive precise two-dimensional worktable which is mainly composed of a base, an X-direction feeding device, a Y-direction feeding device and a feeding device top worktable surface, wherein the X-direction feeding device and the Y-direction feeding device are mutually perpendicular in a two-dimensional plane, the Y-direction feeding device is arranged above the X-direction feeding device, the X-direction feeding device comprises an X-direction large-stroke feeding device and an X-direction micro-feeding device, the Y-direction feeding device comprises a Y-direction large-stroke feeding device and a Y-direction micro-feeding device, and the Y-direction large-stroke feeding device is arranged above the X-direction micro-feeding device and can move along with feeding motion of the X-direction micro-feeding device. A transition connecting plate of the base is connected with a machine tool. Due to the fact that fine precision drive of the worktable is matched with large-stroke displacement output, output force is large, the resolution ratio of displacement is high, the range of the displacement is large, and the large-stroke micro-drive precision two-dimensional worktable has a wide application prospect. Due to cooperation of a cooling system, the large-stroke micro-drive precision two-dimensional worktable avoids the machining difficulty that the feeding precision is influenced by heat generated by long-time precise machining and heating.

Description

technical field [0001] The invention relates to a large-stroke precision two-dimensional workbench with super-magnetic micro-drive, which is mainly used in the micro-feed in the process of precision and ultra-precision machining, and in the electromechanical integration system to achieve large-stroke feed and at the same time require the realization of precision For small displacement feed. Background technique [0002] Traditional large-stroke precision worktables generally use mechanical transmission displacement drives such as precision screw pairs and rolling (or sliding) guide rails, precision spiral wedge mechanisms, turbine-cam mechanisms, and gear-lever mechanisms. Due to mechanical friction, clearance, crawling and other reasons, its movement accuracy and positioning accuracy are difficult to reach the sub-micron or even nanometer level. To achieve submicron or even nanometer positioning, conventional drive and transmission methods are no longer suitable. [0003]...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B23Q1/25B23Q5/40
Inventor 余震吴再豪方毅唐秋华李千魏国前李公法
Owner WUHAN UNIV OF SCI & TECH
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