The invention discloses an integrated type
six degrees of freedom precision positioning platform. The integrated type
six degrees of freedom precision positioning platform comprises a base, a lower platform component, a middle platform component and an upper platform component. The integrated type
six degrees of freedom precision positioning platform utilizes a piezoelectric ceramics
brake to enable the lower platform component to achieve rectilinear motion along an X direction and a Y direction of a coordinate
system, enable the middle platform component to achieve a rectilinear motion along an Z direction of the coordinate
system and a rotary oscillation around an axis which is parallel to the X axis and an axis which is parallel to the Y axis, and enables the upper platform component to rotate around the Z axis. The integrated type six
degrees of freedom precision positioning platform can achieve precise control position on the six
degrees of freedom and effectively avoids displacement
coupling among axes due to the fact that the middle platform component and the lower platform component are designed into a
symmetric structure. Meanwhile, the transmission platform can achieve integral manufacture, is driven by the piezoelectric ceramics
brake, has the advantages of being free from friction and
coupling, being high in precision, long in journey and high in
resolution rate and can meet complex manufacturing and operation requirements of nanometer science and technology studies.