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Three-degree-of-freedom microoperation orthogonal parallel operating platform used for ultraprecise location

A degree of freedom, micro-manipulation technology, applied in the parts and instruments of the instrument, can solve the problems of the actual accuracy of components being difficult to meet, component manufacturing and assembly errors, etc., and achieve low processing and manufacturing costs, high positioning accuracy, and structural stress. good effect

Inactive Publication Date: 2012-05-09
JIANGSU UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, due to defects such as motion pair clearance, component manufacturing and assembly errors, and friction, the actual precision of components is difficult to meet the high-precision requirements of traditional machinery.

Method used

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  • Three-degree-of-freedom microoperation orthogonal parallel operating platform used for ultraprecise location
  • Three-degree-of-freedom microoperation orthogonal parallel operating platform used for ultraprecise location
  • Three-degree-of-freedom microoperation orthogonal parallel operating platform used for ultraprecise location

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Embodiment Construction

[0018] Such as figure 1 As shown, the present invention is made up of three major parts, and the one, the moving platform 4 that connects terminal operating part, and it can realize three-dimensional translation of space; The input required by the whole device is provided; the third is three flexible first, second and third branch chains 3, 5 and 7 connecting the dynamic platform 4 and the static platform 1, and the top of each branch chain is connected with the static platform 1 on At the drive points of the three piezoelectric ceramics 2, 6, and 8, the end of each branch chain is vertically connected to the moving platform, which is connected to the moving platform 4 in an orthogonal form.

[0019] The static platform 1 is composed of three panels, the three panels are a horizontal bottom panel and two vertical panels, and the two vertical panels are orthogonal to each other and are vertically orthogonal to the horizontal bottom panel. In the space surrounded by the three ...

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Abstract

The invention discloses a three-degree-of-freedom microoperation orthogonal parallel operating platform used for ultraprecise location, which realizes space three-dimensional translation ultraprecise location. The three-degree-of-freedom microoperation orthogonal parallel operating platform is provided with a static platform and a movable platform, wherein a piezoelectric ceramic driver is fixedly vertically arranged on each panel of the static platform, a drive of each piezoelectric ceramic driver is connected with the top end of a branched chain, the tail end of each branched chain is vertically connected with the movable platform, three branched chains are formed by sequentially serially connecting a flexible movable pair, a parallelogram structure, a first rotating pair and a second rotating pair according to position relationships of vertical, vertical and parallel among axial lines, the top end of each branched chain is a movable pair, the tail end of each branched chain is a second rotating pair, the three movable pairs are mutually orthogonal, and the three second rotating pairs are mutually orthogonal. According to the invention, the advantages of a parallel mechanism and a flexible movement pair are combined, a movement is generated by depending self elastic deformation, and output reaches high precision of micro level even nano level.

Description

technical field [0001] The invention relates to a parallel workbench combined with a parallel mechanism and a flexible motion pair, which can realize ultra-precise positioning of three-dimensional translation in space. Background technique [0002] With the development of modern machinery in the direction of miniaturization and high precision, the traditional positioning method of stepping motor plus precision screw can no longer meet the requirements of ultra-high precision. At present, the precision required in many engineering and experimental fields has reached the micron, submicron, or even nanometer level, such as micro-measurement, micro-positioning, bioengineering cell manipulation, micro-assembly and micro-surgery in micro-electro-mechanical systems MEMS, and optical fiber docking , accurate error compensation, fretting excitation and other fields. However, due to defects such as motion pair clearance, component manufacturing and assembly errors, and friction, the ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G12B5/00
Inventor 杨启志朱小兵陈龙黄国全吴伟光
Owner JIANGSU UNIV
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