Three-degree of freedom flexible precision positioning workbench

A precision positioning and degree of freedom technology, applied in the field of micro-operating systems, can solve problems such as uneven distribution of imprinting force, limitation of processing accuracy and quality, and easy stretching and deformation of silica gel, so as to achieve micro-feeding and precise positioning, and eliminate abnormalities. Linear, compact effect

CN101770182AInactive Publication Date: 2010-07-07TIANJIN UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2010-07-07
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a three-degree of freedom flexible precision positioning workbench. In a structure of the workbench, six piezoelectric ceramic drivers are adopted, the tail of each driver is connected with a substrate through bolts, and the top end is in threaded connection with a ball joint to realize hertz contact; a flexible structure of the positioning workbench mainly comprises the substrate, six flexible branched chains with identical structures and a movable platform supported by the flexible branched chains; and three position sensors are used for measuring the actual output of the movable platform and are respectively fixed between a rigid support and the movable platform. The precision positioning workbench has the characteristics of high resolution ratio and high speed of dynamic response, and can be used as an assisted positioning platform of a nano-imprint lithography positioning system to realize microscale feeding and precision positioning.
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Description

Technical field

[0001] The invention belongs to a micro operating system, in particular to a flexible precision positioning worktable with two translational movements and one rotation which can be applied to an imprinting photoetching system. Background technique

[0002] Nano devices include nano electronic devices and nano optoelectronic devices, which can be widely used in electronics, optics, micromechanical devices, new computers, etc. It is the most dynamic research field in the research field of new materials and new devices, and it is also the miniaturization of components , Intelligence, high integration and other mainstream development directions. Because of the potential huge market and national defense value of nano-devices, the methods, approaches, and processes of their design and manufacturing have become the research and investment hotspots of many scientists, governments and large enterprises. At present, the design and manufacture of nanodevices are in a period...

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Embodiment Construction

[0018] The specific implementation, structure, features and effects provided by the present invention will be described in detail below with reference to the accompanying drawings and embodiments.

[0019] See Figure 1~4 , A three-degree-of-freedom precision positioning table for nanoimprint lithography systems. It includes a rigid support 7 and a base 2 connected to the top of the rigid support 7. A movable platform 4 with a rectangular cross section is connected in the middle of the base 2 through six flexible branches. Two of the six flexible branch chains are respectively arranged along the midline direction of the upper and lower two opposite sides of the moving platform 4, and the other four flexible branch chains are located in pairs on the left and right opposite sides of the moving platform. The left and right groups of flexible branch chains are arranged symmetrically with respect to the vertical symmetry axis of the moving platform, and the axes of the two flexible b...