Two-degree-of-freedom micro-positioning platform

A positioning platform and degree of freedom technology, applied to the parts of the instrument, the instrument, the shell, etc., can solve the problems of large volume and low natural frequency, and achieve the effect of small volume, compact structure and large range of motion

Inactive Publication Date: 2010-11-17
ZHEJIANG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Some of the existing micro-positioning platforms only have a small range of motion (several microns to tens of microns), but the micro-positioning platforms with larger strokes generally have a lower first-order natural frequency (generally below 200Hz) and a smaller volume. big problem

Method used

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  • Two-degree-of-freedom micro-positioning platform
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  • Two-degree-of-freedom micro-positioning platform

Examples

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Embodiment Construction

[0019] Below in conjunction with accompanying drawing and embodiment, the present invention is further described:

[0020] Such as figure 1 As shown, the present invention includes a base 9, an X-direction amplifying lever 11, a Y-direction amplifying lever 21, a composite parallel four-bar guiding mechanism, and a motion platform 15; the X-direction piezoelectric ceramic driver 14 and the Y-direction piezoelectric ceramic driver 18 are perpendicular to each other are placed in respective rectangular slots on the base 9, the output end of the piezoelectric ceramic driver 14 in the X direction is abutted against the input hinge 12 of the amplifying lever in the X direction by tightening the pre-tightening nut 16 in the X direction, and the fixed position of the amplifying lever in the X direction is The branch hinge 13 is hinged with the base 9, the output hinge 10 of the X-direction amplifying lever 11 is hinged with the middle part of one side of the composite parallel four-b...

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Abstract

The invention discloses a two-degree-of-freedom micro-positioning platform. The platform consists of a pedestal, an X-directional multiplying lever, a Y-directional multiplying lever, a compound parallel four-bar guide mechanism and a motion platform, wherein piezoelectric ceramic drivers in the X direction and the Y direction are vertical to each other and are arranged in two rectangular grooves on the pedestal respectively; and the output ends of the drivers are closely attached to the input hinges of the multiplying levers by screwing preload nuts. Because the multiplying levers with special structures and the compound parallel four-bar guide mechanism are adopted, the micro-positioning platform has compact structure and small volume, can ensure high frequency response while realizing large motion range; motion in the X direction and the Y direction can effectively decouple, and combination of the piezoelectric ceramic drivers and the flexible hinge platform ensures no friction of motion transfer, no clearance, high accuracy, high stability and quick response.

Description

technical field [0001] The invention relates to a micro-positioning device, in particular to a two-degree-of-freedom micro-positioning platform, which can realize micro-positioning with large stroke, high frequency response and high precision. Background technique [0002] The micro-positioning platform is a key component in the field of precision engineering, and has a wide range of applications in integrated circuit manufacturing, precision machinery, optical instruments and biomedical operations. At present, with the rapid development of the above fields, there are more and more requirements for micro-positioning platforms with large stroke (greater than 100 microns), high frequency response and small volume. Some of the existing micro-positioning platforms only have a small range of motion (several microns to tens of microns), but the micro-positioning platforms with larger strokes generally have a lower first-order natural frequency (generally below 200Hz) and a smaller...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G12B5/00G12B9/10
Inventor 王文朱珠余建平
Owner ZHEJIANG UNIV
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