Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Two-degree-of-freedom micro-positioning platform

A positioning platform and degree of freedom technology, applied to the parts of the instrument, the instrument, the shell, etc., can solve the problems of large volume and low natural frequency, and achieve the effect of small volume, compact structure and large range of motion

Inactive Publication Date: 2010-11-17
ZHEJIANG UNIV
View PDF2 Cites 35 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Some of the existing micro-positioning platforms only have a small range of motion (several microns to tens of microns), but the micro-positioning platforms with larger strokes generally have a lower first-order natural frequency (generally below 200Hz) and a smaller volume. big problem

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Two-degree-of-freedom micro-positioning platform
  • Two-degree-of-freedom micro-positioning platform
  • Two-degree-of-freedom micro-positioning platform

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0019] Below in conjunction with accompanying drawing and embodiment, the present invention is further described:

[0020] Such as figure 1 As shown, the present invention includes a base 9, an X-direction amplifying lever 11, a Y-direction amplifying lever 21, a composite parallel four-bar guiding mechanism, and a motion platform 15; the X-direction piezoelectric ceramic driver 14 and the Y-direction piezoelectric ceramic driver 18 are perpendicular to each other are placed in respective rectangular slots on the base 9, the output end of the piezoelectric ceramic driver 14 in the X direction is abutted against the input hinge 12 of the amplifying lever in the X direction by tightening the pre-tightening nut 16 in the X direction, and the fixed position of the amplifying lever in the X direction is The branch hinge 13 is hinged with the base 9, the output hinge 10 of the X-direction amplifying lever 11 is hinged with the middle part of one side of the composite parallel four-b...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a two-degree-of-freedom micro-positioning platform. The platform consists of a pedestal, an X-directional multiplying lever, a Y-directional multiplying lever, a compound parallel four-bar guide mechanism and a motion platform, wherein piezoelectric ceramic drivers in the X direction and the Y direction are vertical to each other and are arranged in two rectangular grooves on the pedestal respectively; and the output ends of the drivers are closely attached to the input hinges of the multiplying levers by screwing preload nuts. Because the multiplying levers with special structures and the compound parallel four-bar guide mechanism are adopted, the micro-positioning platform has compact structure and small volume, can ensure high frequency response while realizing large motion range; motion in the X direction and the Y direction can effectively decouple, and combination of the piezoelectric ceramic drivers and the flexible hinge platform ensures no friction of motion transfer, no clearance, high accuracy, high stability and quick response.

Description

technical field [0001] The invention relates to a micro-positioning device, in particular to a two-degree-of-freedom micro-positioning platform, which can realize micro-positioning with large stroke, high frequency response and high precision. Background technique [0002] The micro-positioning platform is a key component in the field of precision engineering, and has a wide range of applications in integrated circuit manufacturing, precision machinery, optical instruments and biomedical operations. At present, with the rapid development of the above fields, there are more and more requirements for micro-positioning platforms with large stroke (greater than 100 microns), high frequency response and small volume. Some of the existing micro-positioning platforms only have a small range of motion (several microns to tens of microns), but the micro-positioning platforms with larger strokes generally have a lower first-order natural frequency (generally below 200Hz) and a smaller...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G12B5/00G12B9/10
Inventor 王文朱珠余建平
Owner ZHEJIANG UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com