The utility model relates to the technical field of
semiconductor component manufacturing, in particular to a
wafer basket for feeding and discharging of a
manipulator, which comprises a bottom plate, upright posts, guide posts and a top plate. Stand columns are arranged on two sides of the
tail and the middle of the top of the bottom plate respectively, guide columns are arranged on two sides of the head of the top of the bottom plate respectively, and the stand columns and the guide columns are equal in height; the top plate is fixed to the tops of the stand columns and the guide columns. A plurality of grooves which are provided with three open surfaces and are used for mounting wafers are uniformly distributed in the vertical directions of the stand columns and the guide columns, the non-open side of the groove of the
tail stand column is arranged on the
tail side, and the non-open sides of the grooves of the middle stand column and the head guide column are arranged on the outer sides. The
wafer lifting basket for feeding and discharging of the
manipulator is composed of the base plate, the stand columns, the guide columns, the top plate and other simple components, and compared with a special
wafer conveying box and a wafer
loader, the wafer lifting basket is simpler in structure, so that the manufacturing cost is reduced, the wafer lifting basket is suitable for small-batch wafer test
verification scenes, and the problem that the cost of an existing scheme is too high is effectively solved.