Ultrathin triple-freedom inching work table

A workbench, degree of freedom technology, applied in workbenches, manufacturing tools, microlithography exposure equipment, etc., can solve the problems of high speed, large load, high dynamic characteristics, poor structural integrity, and high center of mass of lithography equipment. Achieve the effect of mature motion control technology, small inertia and low center of gravity
CN101075098AActive Publication Date: 2007-11-21TSINGHUA UNIV +1
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
TSINGHUA UNIV
Publication Date
2007-11-21

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Abstract

A super-thin operation table of 3-freedow micro-motion type consists of base of micro-motion table, rotator of micro-motion table and stator of micro-motion table. It is featured as forming said stator of micro-motion table by inserting 3-sets of driving unit coils into one coil framework, forming said rotator of micro-motion table by top slide cover and bottom slide cover, firm-jointing two said covers and suspending two said covers on base of micro-motion table through air-floating or magnetic-floating bearing.
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Description

technical field

[0001] The invention relates to a micro-motion workbench, in particular to an ultra-thin 3-degree-of-freedom micro-motion workbench, which is mainly used in semiconductor photolithography equipment and belongs to the field of ultra-precision micro-motion workbenches. technical background

[0002] The micro-motion table with high precision and fast response has an extremely important position in modern manufacturing technology, and is regarded as an important symbol of a country's high-tech development level. In ultra-precision machine tools, the ultra-precision micro-motion table is used to compensate the error of the feed system to achieve ultra-precision machining; in the manufacture of large-scale integrated circuits, the ultra-precision micro-motion table is used for micro-positioning in lithography equipment and micro-feeding; in the scanning probe microscope, the ultra-precise micro-motion table is used to measure the surface topography of the sample fo...

Claims

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