Ultrathin triple-freedom inching work table

A workbench, degree of freedom technology, applied in workbenches, manufacturing tools, microlithography exposure equipment, etc., can solve the problems of high speed, large load, high dynamic characteristics, poor structural integrity, and high center of mass of lithography equipment. Achieve the effect of mature motion control technology, small inertia and low center of gravity

Active Publication Date: 2007-11-21
TSINGHUA UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Due to factors such as the frictional damping nonlinearity of the support system, the first two types of micro-motion stages cannot meet the requirements of high speed, large load, and high dynamic characteristics of lithography equipment.
The micro-motion table with voice coil motor / air support can meet the requirements of lithography equipment, but it has poor structural integrity, thick table body, high center of mass, etc., and its performance is limited to a certain extent.

Method used

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  • Ultrathin triple-freedom inching work table
  • Ultrathin triple-freedom inching work table
  • Ultrathin triple-freedom inching work table

Examples

Experimental program
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Embodiment Construction

[0023] As shown in FIG. 1 , the micro-motion worktable of the present invention consists of three parts: a micro-motion table base 1 , a micro-motion table mover 2 , and a micro-motion table stator 3 . The mover 2 of the micro-motion table includes two parts, respectively a mover lower cover 2a and a mover upper slide cover 2b, both of which are fixedly connected. The four corners of the micro-motion table base 1 are processed with bosses, which play the role of supporting the micro-motion table stator 3 . The stator 3 of the micro-motion table is interposed between the lower cover 2a of the mover and the upper slide cover 2b of the mover, and is fixedly connected to the base 1 of the micro-motion table through a boss.

[0024] The micro-motion workbench has 3 sets of electromagnetic force drive units, each set of drive units contains at least one electromagnetic force drive unit, and each electromagnetic force drive unit is composed of an upper permanent magnet assembly, a lo...

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Abstract

A super-thin operation table of 3-freedow micro-motion type consists of base of micro-motion table, rotator of micro-motion table and stator of micro-motion table. It is featured as forming said stator of micro-motion table by inserting 3-sets of driving unit coils into one coil framework, forming said rotator of micro-motion table by top slide cover and bottom slide cover, firm-jointing two said covers and suspending two said covers on base of micro-motion table through air-floating or magnetic-floating bearing.

Description

technical field [0001] The invention relates to a micro-motion workbench, in particular to an ultra-thin 3-degree-of-freedom micro-motion workbench, which is mainly used in semiconductor photolithography equipment and belongs to the field of ultra-precision micro-motion workbenches. technical background [0002] The micro-motion table with high precision and fast response has an extremely important position in modern manufacturing technology, and is regarded as an important symbol of a country's high-tech development level. In ultra-precision machine tools, the ultra-precision micro-motion table is used to compensate the error of the feed system to achieve ultra-precision machining; in the manufacture of large-scale integrated circuits, the ultra-precision micro-motion table is used for micro-positioning in lithography equipment and micro-feeding; in the scanning probe microscope, the ultra-precise micro-motion table is used to measure the surface topography of the sample fo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20B25H1/00
Inventor 朱煜张鸣李广尹文生徐登峰
Owner TSINGHUA UNIV
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