The invention discloses an
eddy current displacement sensor for a high temperature
magnetic bearing in an axial direction, which belongs to the field of
eddy current displacement sensors. The sensor is mainly composed of four parts of a working probe, an auxiliary probe, a
signal processing circuit and a temperature compensation circuit, wherein the main probe and the auxiliary probe are mainly composed of a high temperature enameled wire, a
ceramic coil skeleton, a high temperature
adhesive and a high temperature
coaxial cable; the
signal processing circuit is mainly composed of an oscillating circuit, a detection circuit and a calibration circuit; the temperature compensation circuit is mainly composed of a temperature drift compensation circuit and a
time drift compensation circuit, thetemperature drift compensation circuit is mainly composed of a Pt100 three-wire
system temperature acquisition circuit, a
signal conditioning circuit and a divider; and the
time drift compensation circuit is mainly composed of a Pt100 three-wire
system temperature acquisition circuit and two probe
differential circuits. Uncompensated signals firstly pass through a
subtractor to eliminate bias
voltage temperature drift errors of temperature drift and then pass through a division circuit to eliminate sensitivity temperature drift errors, and the sensor is mainly applied to the high temperaturemagnetic bearing in an axial direction.