66 results about "Drift error" patented technology

The invention relates to the technical field of drainage control, in particular to a liquid level sensing drainage control method and system based on electronic and floating ball cooperative detection, and the method comprises the steps: fusing the angular displacement, capacitance value and acceleration disturbance data of a floating ball, and constructing a liquid level state observer; a dynamic compensation factor is introduced to strip liquid shaking interference, and an accurate liquid level reference value is obtained; a composite control vector is constructed based on the liquid level deviation and the change rate, and a drainage instruction is generated through analysis to control a valve to act; meanwhile, a self-adaptive feedback adjustment mechanism is established, observer parameters are dynamically calibrated through liquid level response residual errors, and the drifting error of an actuator is offset; according to the technical scheme, the robustness of drainage control can be remarkably improved.

The invention relates to the technical field of ultra-precision intelligent manufacturing, in particular to an ultra-precision machining error compensation method based on multi-modal information fusion, a medium and equipment. The method comprises the following steps: acquiring three-dimensional shape data of a workpiece through an in-situ measurement device, synchronously acquiring temperature field and vibration data, constructing a multi-modal space-time tensor, inputting a physical information neural network to decouple a static geometric error, a time-varying thermal drift error and a dynamic vibration error, and generating a four-dimensional correction tool path to realize reverse compensation. According to the method, physical constraints are embedded through a PINN model, the problem of false thermal drift misjudgment in a traditional method is solved, experiments show that the RMS error of free-form surface machining is reduced to 5 nm or below, and the precision is improved by 70% or above; and meanwhile, error decoupling is endowed with physical interpretability, the small sample generalization ability is enhanced, and a technical basis is provided for process optimization.

The invention provides a temperature drift compensation method, device and equipment for a Hall current sensor, and relates to the technical field of Hall sensors. The method is applied to a temperature excursion compensation system, the temperature excursion compensation system comprises a temperature sensor, a microprocessor, a temperature excursion prediction model, a compensation signal generation module and a differential amplification circuit, and the temperature excursion compensation method comprises the following steps: acquiring environment temperature data of a Hall current sensor by using the temperature sensor; the microprocessor calculates a temperature drift error parameter corresponding to the current environment temperature data based on the environment temperature data and a temperature drift prediction model; the compensation signal generation module generates a corresponding compensation signal based on the temperature drift error parameter, and the compensation signal and the temperature drift error represented by the temperature drift error parameter are equal in size and opposite in direction; and superposing the compensation signal and an original sampling signal of the Hall current sensor through a differential amplification circuit to obtain a final current signal. The measurement accuracy of the Hall current sensor can be improved.

The invention relates to the technical field of unmanned aerial vehicles, provides an unmanned aerial vehicle fusion height estimation method, an unmanned aerial vehicle and a medium, and aims to solve the problem that a stable and credible height estimation value cannot be provided due to IMU measurement errors when both RTK and a barometer fail. The method comprises the following steps: performing high-frequency noise filtering on the original acceleration of the inertial measurement unit to obtain a first acceleration value; performing first-order difference on the speed of the global positioning system to obtain an acceleration compensation value; constructing a state space model containing a vertical speed, an acceleration and an accelerometer zero offset drift error; the first acceleration and the acceleration compensation value are fused through Kalman filtering, and drifting is estimated and stripped in real time; and outputting the smooth height by using trapezoidal integral. The device can output a whole-course continuous height estimation value with the drift distance smaller than 0.3 m / min and the bandwidth larger than or equal to 2 Hz, and is suitable for stable flight and uninterrupted operation when both the RTK and the barometer fail in complex scenes such as agricultural plant protection.

The invention relates to an aiming point dynamic stabilization and automatic calibration method fusing inertial measurement unit data, and belongs to the technical field of aiming equipment dynamic control. The method comprises the following steps: acquiring attitude data of an inertial measurement unit, and constructing a multi-source data matrix in combination with real-time position data of an aiming point and environmental interference data; after time sequence synchronization and drift suppression are carried out on multi-source data, associated feature vectors are extracted through multi-modal feature fusion; inputting a self-adaptive extended state observer to estimate total disturbance and generate an anti-interference compensation amount, constructing a kinetic model in combination with a nonlinear model prediction controller, solving a multi-objective optimization problem, and generating an attitude compensation control sequence to realize dynamic stability of an aiming point; and finally, aiming deviation is calculated in real time to trigger double-closed-loop calibration, an inner ring corrects the drift error of the inertial measurement unit, and an outer ring optimizes parameters of the observer and the controller. According to the invention, environmental interference and inertial drift are effectively suppressed, the dynamic aiming stability is improved, and the long-term aiming reliability is guaranteed through closed-loop calibration.

The invention belongs to the field of aerospace sensors, and discloses an intelligent wide-range pressure measurement system and method for an aero-engine. The system comprises a pressure acquisition module which comprises at least two pressure sensors with different measuring ranges and overlapped measuring intervals, and an electromagnetic valve group used for switching gas circuits of the pressure sensors; the intelligent control module communicates with an engine FADEC to obtain real-time working condition parameters, predicts the pressure change trend in combination with a pre-stored pneumatic model, switches gas circuits in advance before the pressure reaches a range critical point, triggers a special collection mode to lock an adaptive sensor under a transient working condition, and collects data at the highest sampling rate. The measurement method comprises the steps of working condition parameter acquisition, pressure trend prediction, advanced range switching and self-diagnosis calibration, and through multi-sensor data comparison under environment pressure or stable working conditions, temperature drift errors are dynamically compensated, and faults of the sensors and transmission pipelines are accurately diagnosed. According to the scheme, the problems of switching delay, data distortion, sensor precision drift and difficulty in fault discovery of a traditional system are effectively solved, high precision and stability of full-range pressure measurement are guaranteed, and reliable support is provided for precise regulation and control and flight safety of an aero-engine.

The application relates to the technical field of drainage control, in particular to a liquid level sensing drainage control method and system based on cooperation of an electronic device and a float ball, which comprises the following steps: fusing float ball angular displacement, capacitance value and acceleration disturbance data to construct a liquid level state observer; introducing a dynamic compensation factor to strip liquid sloshing interference and obtain an accurate liquid level reference value; constructing a composite control vector based on liquid level deviation and change rate to analyze and generate a drainage instruction to control a valve action; and simultaneously establishing an adaptive feedback adjustment mechanism to dynamically calibrate observer parameters by using liquid level response residual error and offset actuator drift error; and the technical scheme can significantly improve the robustness of drainage control.

The application provides a spacecraft autonomous navigation method and electronic equipment. The spacecraft autonomous navigation method comprises the following steps: determining technical indexes of an optical sensor according to navigation requirements, and determining a configuration of the optical sensor according to orbit information of the spacecraft; collecting a star map by using the optical sensor with the determined technical indexes and configuration, processing the star map, identifying a refraction star and extracting a refraction angle; and using a Kalman filtering algorithm to perform information fusion on information output by an inertial navigation system and a refraction apparent height calculated based on the refraction angle, so as to correct navigation errors and obtain corrected navigation information. The application corrects drift errors of the inertial navigation by astronomical navigation, maintains continuous navigation information by using the inertial navigation when the astronomical system is unavailable, and achieves the purpose of improving navigation accuracy.

The application relates to the technical field of hydrogeological monitoring, in particular to a hydrogeological dynamic monitoring and analysis system and method based on big data; specifically, hydrogeological data is collected in real time, data denoising, space-time calibration and error correction are carried out in combination with edge computing, noise and drift error are eliminated by adopting variational mode decomposition, geological model constraint and wavelet transform, and the storage and transmission efficiency is optimized by increment encoding and Huffman encoding, and a quadratic form check code is generated to ensure data reliability; a space-time deep learning model and a self-attention mechanism are fused to predict a hydrological evolution trend, adaptive anomaly detection is realized by combining DBSCAN clustering and prediction error analysis; water resource allocation strategies are optimized through reinforcement learning, risk levels are evaluated in layers, and management schemes are generated, and finally, monitoring data, abnormal scores and decision results can be visually displayed. The application integrates multi-source data fusion, space-time modeling and intelligent decision-making, and improves hydrological monitoring precision and response efficiency.

The invention provides a spacecraft autonomous navigation method and electronic equipment. The autonomous navigation method for the spacecraft comprises the following steps: determining a technical index of an optical sensor according to a navigation requirement, and determining a configuration of the optical sensor according to orbit information of the spacecraft; acquiring a star map by using an optical sensor with determined technical indexes and configuration, processing the star map, identifying a refraction star and extracting a refraction angle; and carrying out information fusion on the information output by the inertial navigation system and the refraction apparent height calculated based on the refraction angle by using a Kalman filtering algorithm so as to correct the navigation error and obtain the corrected navigation information. The drifting error of the inertial navigation is corrected through the astronomical navigation, and the navigation information is kept continuous through the inertial navigation when the astronomical system is unavailable, so that the purpose of improving the navigation precision is achieved.

The application discloses a kind of MEMS device temperature drift error test methods based on space heat flow dynamic analysis, it belongs to the field of novel sensor device.The application solves the problem of low precision and poor real-time of existing test methods.The method of the application is as follows: first, install the MEMS device in a sealed high-low temperature chamber, then install a temperature sensor on the surface of the MEMS device;then, adjust the environmental temperature in the high-low temperature chamber from the lowest working temperature of the MEMS device to the highest working temperature according to the designed temperature control interval and temperature control time, and record the environmental temperature of the MEMS device and the output data of the MEMS device in real time during the rising process of the environmental temperature in the high-low temperature chamber;subtract the recorded output data of the MEMS device from the reference value of the output data of the MEMS device to obtain the temperature drift error data of the MEMS device.The method of the application can be applied to the test of temperature drift error of MEMS device.

The application provides a high-temperature drift compensation method and system for a resistivity signal while drilling, and belongs to the technical field of measurement while drilling. The method comprises the following steps: functionally dividing a resistivity measurement system while drilling to construct a set of sensing link nodes; injecting a temperature-sensitive disturbance excitation signal into the resistivity measurement system while drilling to obtain a composite excitation signal set, and extracting a multi-dimensional response observation vector of the composite excitation signal set; establishing a temperature-sensitive mapping relationship matrix of the set of sensing link nodes and the multi-dimensional response observation vector; adaptively calculating the number of decoupling compensation channels of the temperature-sensitive mapping relationship matrix to obtain the number of decoupling compensation channels; and constructing a multi-channel decoupling compensation model for compensating and fusing the original resistivity signal of the resistivity measurement system while drilling. Through fine modeling and channel-by-channel compensation of the temperature drift of each node of the sensing link, residual drift error is effectively reduced, and the resistivity measurement accuracy while drilling is improved.

The invention discloses a main cable strand torsion detection method and system based on angles of a torpedo clamp and a gyroscope, and the method comprises the steps: completing the arrangement of a hardware system required by monitoring, and completing the adjustment, so that the axis of the torpedo clamp is parallel to the axis of a cable strand; the gyroscope continuously collects an angular velocity signal of cable strand torsion; collecting the angular velocity at the current moment and angular velocity predicted values at not less than two midpoint moments and the next moment within the set integral step length, and further carrying out weighted calculation on the sampling points to obtain angle increment; a reset signal is triggered through magnetic encoder hardware to form zero-crossing counting, and functional correction of angle accumulation of the gyroscope without an upper limit but with a drift error is completed by combining an angle accumulation formula and integrating segmented angle increment and turn number metering; measuring error correction is completed through an environment compensation model; and finally outputting an angle for eliminating the influence of temperature drift and construction vibration.

The invention discloses a temperature drift self-compensation system of a torque sensor, and belongs to the technical field of sensor measurement and signal compensation. The system mainly solves the technical problem that the measurement precision of the torque sensor is reduced due to the change of environment temperature. The system comprises a multi-dimensional signal sensing module, an intelligent fusion processing module, a self-calibration management module and an integrated output interface module, and torque and temperature distribution signals are synchronously collected through a multi-sensor array arranged on a torque sensitive element; and carrying out real-time fusion calculation and nonlinear correction on the temperature drift error by using an embedded multivariable compensation algorithm, optimizing compensation parameters by combining online learning and offline calibration, and finally outputting standardized anti-interference torque data through high-density integrated packaging. According to the invention, dynamic self-compensation of temperature drift is realized, and the measurement precision and long-term stability of the torque sensor in a full temperature range are significantly improved.

The invention relates to the technical field of inertial navigation, and discloses a temperature compensation method and system for an inertial navigation accelerometer, and the method comprises the steps: receiving a digital pulse frequency signal from an I / F conversion circuit, the digital pulse frequency signal comprising a superposed temperature drift error of a quartz accelerometer and the I / F conversion circuit; calling a high-order nonlinear temperature compensation algorithm integrated in the central chip according to the current environment temperature to obtain a corresponding temperature compensation value; and the received digital pulse frequency signal is corrected by using the temperature compensation value to obtain a target acceleration measurement value, so that the hardware cost is reduced, the high measurement precision of the system is kept, and the use requirement of high-precision inertial navigation is met.

This invention relates to the field of silicon pressure sensor detection technology, and more specifically, to a method, compensation circuit, and mainboard for compensating the measurement accuracy of silicon pressure sensors. This invention proposes a method for linear calibration, which can correct nonlinear errors as needed. This invention integrates a temperature detection module into the target silicon pressure sensor, enabling temperature detection of the target silicon pressure sensor, and provides a temperature compensation method that can promptly correct the temperature drift error of the target silicon pressure sensor. Furthermore, the resources consumed by the linear calibration and temperature compensation calculations of this invention are far less than those of traditional lookup table methods or other conventional methods. This invention solves the problem of two types of errors existing in current silicon pressure sensors.

Disclosed are systems, apparatuses, methods, and non-transitory media for improving user equipment (UE) positioning by reducing round-trip-time (RTT) measurement errors that may result from clock-drift between network nodes. In some aspects, RTT measurement error can be mitigated through modifications to resource signaling schedules at a UE and / or gNB, for example, based on resource configuration information specifying a time-gap for signaling resource transmission.

The invention relates to the technical field of industrial measurement, and discloses a collaborative automatic measurement system for industrial field multivariable features, comprising: an acquisition module for generating a sampling data stream with a synchronous timestamp generated by a hardware synchronous clock; the wave velocity calculation module is used for extracting the real-time deviation amount of the main variable sampling value relative to the reference value and determining the real-time wave velocity of the propagation medium by using a first-order linear modulation equation; the dynamic addressing module is used for calculating the propagation lag time length of the auxiliary variable relative to the main variable, and backtracking in the historical cache queue according to the propagation lag time length so as to extract the auxiliary variable historical sampling value with the aligned time sequence; according to the method, time axis accumulated drift errors caused by violent evolution of propagation medium attributes can be countered, and it is ensured that the system maintains extremely high measurement fidelity and physical stability under the full-dynamic working condition.

The present application relates to the technical field of wireless communication, in particular to a time synchronization method based on propagation path prediction and agent strategy.The present application constructs a channel scene fingerprint by extracting multi-dimensional features of wireless signals, identifies a wireless transmission scene and adaptively updates an observation noise covariance matrix of a Kalman filter to dynamically suppress environmental interference;collects node state data to establish a local clock source temperature-frequency model, predicts future cumulative drift error and initiates a preemptive synchronization request only when the error is out of limit;uses a hardware logic unit to construct a multi-phase parallel sampling circuit to obtain an air interface timing deviation with sub-clock cycle accuracy;and intelligently switches a closed-loop correction mode and a digital hold mode according to signal state.The present application effectively overcomes the coupling effects of non-line-of-sight propagation multipath effect and crystal oscillator nonlinear drift through a hierarchical asynchronous control architecture, and realizes nanosecond-level high-precision continuous time synchronization in a complex denial environment.

This invention discloses an optical power measurement method, control device, and optical power measurement equipment, relating to the field of optical power measurement technology. The optical power measurement equipment includes multiple signal conditioning circuits, each including a photoelectric conversion circuit, an optical power detection circuit, and an analog-to-digital conversion circuit. The method generates and sends hard-timing pulses in response to a trigger signal, controlling each channel to sequentially complete photoelectric conversion, voltage conversion, and analog-to-digital conversion, and filtering the digital signal. Subsequently, the operating temperature, temperature compensation coefficient, and calibration coefficient containing multiple sub-coefficients are acquired, and temperature compensation is performed on the signal. Then, based on the power range of the signal, the corresponding sub-calibration coefficients are matched, and the optical power measurement signal is calculated through linear fitting and transmitted to the host computer. Thus, the technical solution of this invention can solve the problems of low accuracy, narrow dynamic range, and large temperature drift error in existing multi-channel power meter measurement equipment for synchronous optical power measurement.

The invention relates to the technical field of navigation and positioning, in particular to a motion behavior constrained height estimation method, which comprises the following steps of: sensing a motion state of a pedestrian, and acquiring an initial elevation estimation value of a current floor; judging whether the initial elevation estimation value meets a rough correction condition or not, and performing rough correction on the initial elevation estimation value when the initial elevation estimation value meets the rough correction condition; performing current floor identification according to the roughly corrected elevation to obtain an identification result, and judging whether floor revisit exists or not according to the motion state of the pedestrian and the identification result; and if the floor revisit exists, judging whether the coarse-corrected elevation has a drift error, and performing secondary correction on the coarse-corrected elevation according to the historical height estimation information of the current floor to obtain a final elevation estimation value of the current floor under the condition that the drift error exists. Therefore, the problem of barometric drift error accumulation caused by long-time cross-floor positioning in an indoor three-dimensional space is solved, and the precision and robustness of barometric altimetry are improved.

The present disclosure discloses a method, apparatus and system for motion tracking. The method includes: acquiring inertia information and pace ranging information of feet of a target object; determining step length information according to the inertia information and the pace ranging information; determining pace direction information according to the inertia information, and determining motion direction information of the target object according to the pace direction information; and determining a motion position of the target object according to the motion direction information and the step length information, and accordingly determining the motion track according to the motion position. By applying the technical schemes provided by embodiments of the present disclosure, the problem that an obvious accumulated drift error is likely to occur in direction estimation in the prior art, which interferes with position determination and brings negative effects can be solved, and beneficial effects of improving positioning accuracy and stability are achieved.

This invention discloses a continuous measurement method for track ride comfort based on inertial navigation data, belonging to the field of track inspection technology. The method first acquires time-stamped MEMS-IMU three-dimensional attitude acceleration data and ground-penetrating radar electromagnetic echo data during the operation of a track inspection vehicle; it extracts inherent frequency features through time-domain identification of track structure modal parameters, constructs target-free correction constraints using standard design modal parameters, and compensates for inertial navigation drift errors through online self-calibration of multi-source errors across the entire temperature domain; it establishes a mapping correlation model between ride comfort parameters and substructure deformation parameters, outputting a comprehensive evaluation result of track ride comfort over the entire mileage. This invention achieves long-distance continuous high-precision measurement without discrete targets, can correlate apparent deformation and substructure defects in a unified coordinate system, accurately locates the root cause of ride comfort anomalies, and is suitable for track lifecycle health inspection in scenarios without GNSS signals.

The invention discloses a tool and a method for measuring the crimping size of a ground wire hydraulic connecting pipe fitting. The method comprises the following steps: S1, initializing a measurement basis and synchronizing with a data stream; s2, extracting a slice sequence based on curvature topology; s3, defect factor calculation based on dynamics; s4, drifting correction prediction based on thermodynamics; s5, true value inversion reconstruction under multiple physical constraints is carried out; s6, holographic quality portrait generation and dispose.According to the method, random discretization is solved based on curvature locking slicing, the rheological topological structure of the surface of the pipe fitting can be accurately recognized by introducing the Gaussian curvature tensor analysis technology, and a rheological consistency area is adaptively locked for phase locking slicing; the method comprises the following steps: analyzing perspective microscopic hidden defects through a dynamic spectrum, mapping a crimping process into a high-dimensional state track by utilizing a nonlinear dynamic phase-space reconstruction and wavelet stiffness spectrum analysis technology, and sensitively capturing microsecond-level stiffness singular mutation points; and a time-delay drift error is eliminated through an entropy generation inversion truth value.

The application provides a SERF inertial measurement device nuclear spin lossless flip method, relates to the technical field of quantum precision measurement and inertial navigation, and lossless inverts the nuclear spin polarization direction by applying a specific radio frequency magnetic field to the SERF inertial measurement device. The frequency and amplitude of the applied radio frequency magnetic field change over time, so that the effective magnetic field experienced by the nuclear spin in the rotating coordinate system changes slowly from initially parallel to the polarization direction to the opposite polarization direction, thereby realizing lossless inversion of the nuclear spin polarization direction. The application has important significance for realizing online rapid measurement of nuclear polarization rate, developing a new type of inertial measurement output scheme and further suppressing system slow drift error.

The invention relates to the technical field of tunnel engineering monitoring, in particular to a tunnel vault settlement dual error correction method and system, and provides a comprehensive correction scheme for two kinds of system errors, datum point motion errors and measuring point drift errors existing in an oblique laser ranging method.The method comprises the steps that a tunnel section coordinate system is established, and initial parameters are obtained; collecting slope distance, laser beam angle and side wall spacing data in real time; estimating the displacement of the sensor by using the convergence quantity of the side wall and updating the position; calculating coordinates and settlement of an actual laser irradiation point B according to the sensor position, the slope distance and the angle; the geometric height difference between the arch crown point A and the irradiation point B is calculated and designed according to the geometric shape of the tunnel section; and finally, adding the settlement volume of the point B and the geometric height difference to obtain the corrected vault settlement volume. The method can effectively eliminate centimeter-level measurement deviation caused by two kinds of system errors, remarkably improves the monitoring precision, can be directly integrated in an existing monitoring system, and has engineering application value.

The application belongs to the technical field of intelligent sensors, and relates to a loss-preventing bracelet patient falling risk early warning system based on an intelligent sensor. The intelligent sensor is internally integrated with an ultra-wideband positioning module and an inertial measurement unit. The original signals collected by the inertial measurement unit are input into a double-path band-pass filter after fast Fourier transform. The first band-pass filter extracts signals in a frequency band of 0.5 Hz to 3 Hz, and the bracelet space position is calculated in combination with the ultra-wideband absolute coordinate; the second band-pass filter extracts signals in a frequency band of 3 Hz to 10 Hz, and the phase coherence feature of a gait cycle is extracted by inputting a sliding window autocorrelation function calculation module. The measurement signals are physically divided in the frequency domain, the parallel coupling dependence of positioning and motion analysis on complete original signals is eliminated, the superposition of spatial drift errors and high-frequency interference is eliminated, and false alarms caused by normal fast motion close to the boundary are avoided.

The invention discloses a thermal drift error evaluation method, a non-common-path heterodyne interference mirror group and a system, the method is used for the non-common-path heterodyne interference mirror group in a uniform temperature field, and the interference mirror group comprises a light beam splitter, a measurement reflector and a reference reflector; the method comprises the following steps: a beam splitter receives two parallel beams with different frequencies emitted by a laser light source, and divides each parallel beam into a reflected beam and a transmitted beam; the reflection part serves as a reference beam, and the transmission part serves as a measurement beam; the measuring reflector receives the measuring light beam and reflects the measuring light beam to the light beam splitter; the reference reflector receives the reference light beam and reflects the reference light beam to the light beam splitter; and evaluating the thermal drift error of the non-common-path heterodyne interference mirror group based on the optical device material, the optical path structure and the environment temperature change in the interference mirror group. According to the invention, a thermal drift error evaluation model is established, and the test error of thermal drift is reduced.

The invention relates to the technical field of engineering survey and structural health monitoring, in particular to an automatic building settlement monitoring target device, which comprises a multi-dimensional environment sensing module, a data processing module, a data processing module, a data processing module and a data processing module, wherein the multi-dimensional environment sensing module is used for synchronously acquiring original settlement measurement data, structural vibration acceleration data and multi-point medium temperature data of building monitoring points; outputting an original multi-dimensional sensing signal set; and the abnormal feature early warning and cleaning module is used for carrying out data integrity verification on the signals by utilizing a preset numerical interval threshold value and an electrical parameter detection algorithm based on the original multi-dimensional sensing signal set, and rejecting outlier data exceeding a statistical threshold value by utilizing a statistical outlier algorithm. According to the invention, thermal error compensation of a physical level and adaptive filtering of a statistical level are closely combined through an edge fusion resolving module, observation covariance parameters of Kalman filtering are dynamically adjusted by using structural vibration data, and the measurement accuracy is improved while the long-period temperature drift error of the sensor is eliminated. And misleading of high-frequency vibration interference to the measurement weight is automatically reduced.

The invention discloses a calibration device of a pushing mechanism and a mechanical device calibration method based on the calibration device.The device comprises an actuator, a force sensor and a calibration pusher which are mechanically connected in sequence, force transmission can be conducted in sequence, and the calibration pusher comprises a push rod and a mechanical calibration element which are mechanically connected; the mechanical calibration element is used for applying a known standard force; the self-calibration module is connected with the force sensor and the mechanical calibration element and used for obtaining detection force data of the force sensor and standard force data reversely applied to the push rod by the mechanical calibration element in the self-calibration process in the process that the actuator applies force to the calibration pusher. And the calibration coefficient of the force sensor is determined according to the comparison result of the detection force data and the standard force data, so that the drift error of the force sensor can be corrected, the force detection accuracy is improved, the self-calibration of the device is realized, the calibration stability and reliability are guaranteed, and the overall efficiency of MEMS test work is improved.