75 results about "Hemispherical resonator gyroscope" patented technology

The invention provides an internal-external double-electrode type miniature hemispherical resonance gyroscope and a preparation method thereof. The internal-external double-electrode type miniature hemispherical resonance gyroscope comprises a single-crystal silicon substrate, a central fixed supporting column, a miniature hemispherical resonator, external electrodes, external-electrode metal welding plates, a glass substrate, metal leads, round welding wire discs, external-electrode metal connecting columns, internal electrodes and a seed layer. The internal-external double-electrode type miniature hemispherical resonance gyroscope and the preparation method provided by the invention have the beneficial effects that an MEMS bulk silicon processing process and a surface silicon processing process are combined for manufacture; different driving and detection modes and different working modes can be provided, and the working in a system needing complex control can be achieved; the internal electrodes and the external electrodes can be utilized for respectively carrying out driving and detection, the parasitic capacitance between a driving electrode and a detection electrode can be reduced and the detection accuracy can be improved; and the metal leads and the round welding wire discs are provided for the internal electrodes and the outer electrode so as to bring convenience for signal application and signal extraction.

The invention discloses a double-wafer integrated-form silicon-based ultrathin micro-hemispherical resonator gyroscope. The double-wafer integrated-form silicon-based ultrathin micro-hemispherical resonator gyroscope comprises a first silicon wafer, a second silicon wafer, a micro-hemisphere casing, driving electrodes and detecting electrodes. The micro-hemispherical casing is arranged between the first silicon wafer and the second silicon wafer. The casing bottom of the micro-hemispherical casing is fixedly connected with the second silicon wafer, and the upper edge of the micro-hemispherical casing is in contacted with the lower surface of the first silicon wafer. The driving electrodes are arranged on the periphery of the micro-hemispherical casing and between the first silicon wafer and the second silicon wafer. One ends of the driving electrodes are fixedly connected with the second silicon wafer, and the other ends of the driving electrodes are movably connected with the first silicon wafer. One ends of the detecting electrodes are fixedly connected with the first silicon wafer, and the other ends of the detecting electrodes are movably connected with the inner wall of the micro-hemispherical casing. The double-wafer integrated-form silicon-based ultrathin micro-hemispherical resonator gyroscope has the advantages of small volume, light weight, low cost, high reliability, low power consumption, mass production and the like, is expected to be widely used in the fields of aerospace, automobile, medical treatment, photography, electronics consumption and the like, and has very broad application prospects.

A vibrational gyroscope includes a piezoelectric ring having a central opening, and a hemispherical resonator having a central opening and mounted over the opening of the central opening of the piezoelectric ring. A plurality of electrodes delivers a voltage to the piezoelectric ring. A plurality of electrodes provides signal readout that corresponds to angular velocity. The hemispherical resonator can be glued to the piezoelectric ring. The hemispherical resonator preferably vibrates in the third vibration mode. A plurality of capacitive electrodes can be located at nodes and at antinodes of the vibration of the hemispherical resonator, and provide a signal readout that corresponds to the angular velocity. The piezoelectric ring is segmented, non-segmented, or includes an outer segmented portion and an inner non-segmented portion. The inner non-segmented portion can be used to excite the resonator into a vibration mode, and the outer segmented portion provides a readout signal and is used to adjust the vibration of the resonator. The piezoelectric ring includes a conductive coating used to conduct excitation voltage to the piezoelectric ring.

The invention provides a piezoelectric driven and detected miniature hemispherical resonant gyroscope and a manufacturing method thereof. The gyroscope comprises a monocrystalline silicon base, a center-fixed supporting column, a miniature hemispherical resonator, a common electrode, eight film piezoelectrics and eight uniformly-distributed signal electrodes, wherein the monocrystalline silicon base and the miniature hemispherical resonator are connected through the center-fixed supporting column; the common electrode has the same shape as that of the miniature hemispherical resonator and is located between the miniature hemispherical resonator and the piezoelectrics; the piezoelectrics have the same shapes as those of the signal electrodes and are located between the common electrode and the signal electrodes. The miniature hemispherical resonator is excited to work by adopting a piezoelectric driven manner, and a drive mode and a detection mode are matched with each other. The gyroscope is manufactured by combining an MEMS (Micro-Electromechanical Systems) bulk silicon processing process and a surface silicon processing process. According to the piezoelectric driven and detected miniature hemispherical resonant gyroscope and the manufacturing method thereof, the miniature gyroscope is driven and detected by using the inverse piezoelectric effect and the piezoelectric effect, so that the gyroscope has the characteristics of high degree of integration, low power consumption, convenience in mass production, and the like.

The invention provides a compensation control method and system for the damping non-uniformity of an all-angle hemispherical resonator gyroscope. According to the method, through fitting calculation and real-time compensation, drift errors caused by damping non-uniformity can be effectively inhibited, and through the period integration technology, scale factor errors and residual sine and cosine errors existing in a loop after fitting compensation can be fundamentally eliminated, and the problem of strong angle dependence caused by a damping non-uniform error is solved, so that the control precision of the gyroscope can be improved. The system comprises a capacitor driving and detection module, an AD data acquisition module, a multiplication coherent demodulation module, an error parameter identification module, an amplitude phase control loop module, a fitting calculation module, a period integration module, a driving synthesis and control module and a DAC digital-to-analog conversion module. According to the technical scheme of the invention, the technical problem of drift error caused by non-uniform damping of the full-angle hemispherical resonator gyroscope is solved.

The invention relates to a force feedback control system and method for a hemispherical resonator gyroscope and belongs to the technical field of control of inertial instruments; the control system and method are applied to a force feedback working mode of the hemispherical resonator gyroscope, and the method is a way to implement a hemispherical resonator gyroscope control method. By using a hemispherical resonator gyroscope force feedback circuit designed by using the method, it is possible to synchronously track the operating frequency of the hemispherical resonator gyroscope, demodulate the amplitude and phase of gyroscope wave node signals, and modulate high-voltage signals of force feedback control signals; in addition, not by modifying the configuration of a controller but just correcting controller parameters, it is possible to meet different environmental application needs of the hemispherical resonator gyroscope.

The invention discloses a fused quartz micro-hemispheric resonance gyroscope packaged based on an SOI and a processing method of the fused quartz micro-hemispheric resonance gyroscope. The fused quartz micro-hemispheric resonance gyroscope packaged based on the SOI comprises a glass substrate, an SOI sealing shell, a fused quartz micro-hemispheric shell resonator, a micro-hemispheric shell support post, a reference electrode, 8 sensitive electrodes, 16 exciting electrodes, a round metal bonding pad and a cylindrical electrode through hole. The electrodes are located below a spherical shell lip, so that an eccentric error caused by a problem of bonding alignment accuracy when the micro-hemispheric shell resonator and the electrode are assembled can be avoided; and an outer lip edge is added to the spherical shell lip, so that the opposite area of the electrode and the spherical shell lip is increased and the detection accuracy can be improved. The advantages of an SOI wafer are fully utilized and the micro-hemispheric resonance gyroscope is packaged, so that the packaging technology of the whole gyroscope is greatly simplified; and the micro-hemispheric resonance gyroscope is provided with 8 sensitive electrodes and 16 exciting electrodes, so that an all-angle working mode can be adopted and the dynamic property of the micro-hemispheric resonance gyroscope is strengthened.

The invention provides an all-angle control signal detection system of a piezoelectric hemispherical resonator gyroscope. The all-angle control signal detection system comprises the hemispherical resonator gyroscope, two phase-locked loops, a demodulator module, a parameter calculator module, a PI controller module and a modulator module. The X axis and the Y axis of the hemispherical resonator gyroscope are a 0-degree electrode axis and a 45-degree electrode axis respectively. The 0-degree electrode axis and the 45-degree electrode axis are connected with the phase-locked loops respectively. The phase-locked loops are connected with the demodulator module which demodulates same-direction and orthogonal reference signals output by the two phase-locked loops. The parameter calculator module is connected with the demodulator module. The PI controller is connected with a parameter calculator. The modulator is connected with the PI controller and the hemispherical resonator gyroscope. By designing and controlling a closed-loop circuit of the hemispherical resonator gyroscope, all-angle detection and control of the hemispherical resonator gyroscope are achieved.

The invention provides an installation error compensation method for a harmonic oscillator and an external base of a hemispherical resonant gyroscope (HRG) and relates to the technical field of inertia. The invention aims to improve the output precision of the hemispherical resonant gyroscope. The method comprises the following steps: calculating an installation error vector according to the installation error between the harmonic oscillator and the external base; calculating the variable quantity of an excitation capacitance between the harmonic oscillator and the external base according to the vibration displacement relationship and the installation error vector of the harmonic oscillator; calculating an excitation coefficient and an excitation amplitude after change according to a relational expression between the variable quantity of the excitation capacitance and the excitation coefficient; according to a gyroscope output error model, calculating the gyroscope output error and performing error compensation. By the application of the installation error compensation method provided by the invention, the influence of the installation error between the harmonic oscillator and theexternal base on the gyroscope output accuracy can be quantitatively analyzed; according to the gyroscope output accuracy, the output of the hemispherical resonant gyroscope is compensated, so that the output accuracy of the hemispherical resonant gyroscope is improved.

The invention discloses an online laser trimming system and method for a micro-hemispherical resonator gyroscope with a frequency measurement function. The system comprises a laser processing module, a frequency measurement module, a supporting module and a control module, the micro-hemispherical resonator gyroscope is arranged on the supporting module and has degrees of freedom of multi-directional movement and rotation; the frequency measurement module comprises a vibration element and a laser vibration meter, the vibration element is fixedly connected to the micro-hemispherical resonator gyroscope, and the laser vibration meter faces the side part of the micro-hemispherical resonator gyroscope; the control module is in communication connection with the frequency measurement module so as to obtain the trimming opening depth and diameter required by the micro-hemispherical resonator gyroscope; and the laser processing module is located around the micro-hemispherical resonator gyroscope so as to complete trimming of the micro-hemispherical resonator gyroscope based on the needed trimming opening depth and diameter. The system is applied to the technical field of vibrating gyroscopes, the depth of removal mass is controlled in the trimming process, meanwhile, online frequency measurement can be achieved, the trimming effect can be observed in time, and the trimming efficiency is greatly improved.

The invention relates to a method for acquiring a vibration mode angle of a hemispherical resonator gyroscope with an electrode angle error. The invention relates to the method for acquiring the vibration mode angle of the hemispherical resonator gyroscope when the electrode angle has an error. The invention aims to solve the problem of low navigation accuracy caused by the fact that the hemispherical resonator gyroscope cannot accurately measure the angle when the error exists in the angle of a detection electrode. The method comprises the following steps: 1, mounting and fixing the hemispherical resonator gyroscope on a rotary table; 2, performing parameter excitation till that the vibration signal amplitude of the harmonic oscillator is unchanged; 3, collecting vibration signals detected by the 0-degree detection electrode and the 45-degree detection electrode on the gyroscope and the angle of the rotary table; 4, obtaining E, R and S; 5, establishing an angle measurement equation considering an electrode angle error; 6, performing initial parameter setting on a nonlinear identification algorithm; 7, obtaining an estimated electrode angle error; and 8, obtaining the vibration mode angle of the hemispherical resonator gyroscope when the electrode angle has the error. The invention is used in the technical field of inertia.

The invention relates to a method for acquiring a vibration mode angle of a hemispherical resonator gyroscope in case of inconsistent forward amplification coefficients, and in particular relates to the method for acquiring the vibration mode angle of the hemispherical resonator gyroscope in case of inconsistent forward amplification coefficients. The invention aims to solve the problem that the navigation accuracy is reduced because the hemispherical resonator gyroscope cannot accurately measure information such as the angle of a carrier when forward amplification coefficients are inconsistent. The method comprises the steps of 1 fixing a gyroscope on a turntable to coincide a gyroscope sensitive shaft with a turntable rotating shaft; 2 applying excitation voltage to an excitation electrode on the gyroscope to carry out parameter excitation until the amplitude of a vibration signal of a harmonic oscillator is not changed; 3 rotating the turntable at a constant speed, and collecting vibration signals detected by 0-degree and 45-degree electrodes on the gyroscope and the angle of the turntable; 4 obtaining E, R and S signals; 5 designing an extended Kalman filter and setting initial parameters; 6 estimating a forward amplification coefficient ratio; and 7 obtaining the vibration mode angle of the hemispherical resonator gyroscope when the forward amplification coefficients are inconsistent. The invention belongs to the technical field of inertia.

The invention discloses a micro-hemispherical resonator gyroscope based on borosilicate glass annealing forming and a preparing method of the micro-hemispherical resonator gyroscope. A silicon wafer is used as a substrate to form a silicon substrate, a cylindrical cavity and a center supporting pillar in the circle center of the cavity are etched on the upper surface of the silicon wafer, and the center supporting pillar is connected with the center of a hemispherical resonator to form a suspension structure. Meanwhile, eight flat plate type electrodes are evenly distributed on the periphery of the cylindrical cavity in the upper surface of the silicon wafer and around the hemispherical resonator, and the eight flat plate type electrodes are composed of the four driving electrodes and the four detection electrodes. All the driving electrodes and all the detection electrodes are not in contact with the hemispherical resonator, identical gaps exist, and the driving electrodes and the detection electrodes are arranged in sequence alternately. The prepared glass metal blowing type micro-hemispherical resonator gyroscope has the advantages of being simple in structure, low in surface stress, high in symmetry and the like, and therefore the micro-hemispherical resonator gyroscope can have stable performance and a wider application range.

The invention belongs to the field of hemispherical resonant gyroscopes, particularly relates to a hemispherical resonant gyroscope harmonic oscillator metallizing process in a satellite inertial navigation system, and particularly provides a method for rapidly estimating the film thickness uniformity of a hemispherical harmonic oscillator based on optical simulation. The method includes the stepsthat cavity measuring and sample measuring are carried out in a vacuum cavity of coating equipment, and parameter data is acquired; three-dimensional models of a coating cavity and a coating sample are established according to the measured parameter data; in the three-dimensional models, the relative positions of the coating samples and targets are at least adjusted, the illumination parameter irradiance of the surface of the coating sample, namely the hemispherical harmonic oscillator is acquired through optical simulation, and the film thickness uniformity is estimated according to the irradiance. By means of the method, the film thickness uniformity can be effectively estimated, machine losses caused by repeated trials are avoided, and the cost is greatly reduced.

The invention provides an annular glass surrounded glass-blown miniature hemispherical resonant gyroscope and a manufacturing method thereof. The gyroscope comprises a cuboidal silicon base, a hemispherical shell type central resonator, an annular glass shell and eight metal electrodes formed on annular glass, wherein the eight electrodes are uniformly distributed around the central resonator, consist of four drive electrodes and four detection electrodes and are connected to pins through leads; the drive electrodes and the detection electrodes can achieve electrostatic drive and detection through applying positive and negative voltage to corresponding pins; the hemispherical shell type central resonator and peripheral annular glass are manufactured by adopting a glass blowing process. The gyroscope adopts an MEMS (Micro-Electromechanical Systems) process for processing, is simple in structure, small in volume and relatively high in accuracy, and has great development prospects.

The invention discloses a micro hemisphere resonant gyro based on SOI (Silicon-On-Insulator) encapsulation and a processing method thereof. The micro hemisphere resonant gyro based on SOI encapsulation comprises a glass substrate, a micro hemisphere shell harmonic oscillator, two reference voltage wire leading posts, an electrode, an SOI sealing wall, an SOI crystalline silicon wafer upper layer, a silicon dioxide layer, a first electrode hole, a second electrode hole, a spherical shell support handle, a round metal electrode region and a metal lead wire. The electrode is positioned right above the spherical shell lip edge; the defect of inconsistent capacitive gap size due to bonding alignment precision during the assembly bonding is avoided; the processing error is reduced; the gyro precision is improved. The processing method of the micro hemisphere resonant gyro based on SOI encapsulation has the advantages that the advantages of the SOI wafers are sufficiently utilized, so that the encapsulation of the whole gyro is greatly simplified; the height and the diameter of the spherical shell handle can be easily controlled; in addition, the support intensity is high; collapse cannot easily occur.

The invention discloses an optimized control method and control circuit for hemispherical resonator gyro fuzzy PID based on a genetic algorithm and a clone algorithm. The method comprises the following steps that a dynamic model of a hemispherical resonator is established; a rotation rate error signal of a hemispherical resonator gyro is calculated; a fuzzy PID controller structure is designed, and an initial value of a fuzzy PID controller parameter is preliminarily selected by using an immune cloning algorithm; the fuzzy PID controller parameter is optimized through the genetic algorithm. The control circuit is achieved based on FPGA and comprises a PID control unit, a fuzzy control unit, a clone algorithm unit and a genetic algorithm unit, wherein the PID control unit is used for achieving PID control of the hemispherical resonator gyro, the fuzzy control unit is used for adjusting a control parameter of the fuzzy PID controller, the clone algorithm unit is used for preliminarily selecting the initial value of the fuzzy PID controller parameter, and the genetic algorithm unit is used for achieving the optimization of the fuzzy PID controller parameter. The optimized control method and control circuit for the hemispherical resonator gyro fuzzy PID based on the genetic algorithm and the clone algorithm improve the stability, optimization time, robustness and control precisionof the gyroscope, and greatly increase the computing speed.

The invention discloses a HRG (Hemispherical Resonator Gyros) space spherical surface sphere core aligning device and aligning method. The aligning device comprises a laser light source unit, a laser signal detection unit and a transverse moving unit, wherein the laser light source unit is used for generating stable linear laser and irradiating the laser on the spherical surface of a sample element; the laser signal detection unit is used for recognizing whether the incident linear laser irradiated on the spherical surface of the sample element and the reflecting linear laser obtained through the spherical surface reflection are overlapped or not; the transverse moving unit is used for installing the spherical surface of the sample element and transversely moving the spherical surface of the sample element in a direction vertical to the incident linear laser so as to regulate the relative position of the spherical surface of the sample element and the laser light source unit. The laser spherical surface reflection aligning method is used; the relaying on holes obtained through mechanical processing is not needed; the high-precision space spherical surface sphere core-laser center alignment can be realized; the final electrode position deviation is modified through 1.3+ / -0.4 degrees to 0.0+ / -0.2 degrees.

The invention provides a hemisphere harmonic oscillator characteristic parameter identification method based on an LMS algorithm. The method comprises the steps of collecting a detection signal of a vibrating gyroscope, carrying out the data processing, multiplying the detection signal with a reference signal, and solving to obtain a parameter equation under an elliptical coordinate system. Through amplitude control, orthogonal control and frequency control, the parameters are gradually converged to a stable state. An LMS algorithm parameter identification model is constructed according to thecalculated parameter equation under the elliptic coordinate system. And according to the output of the LMS algorithm parameter identification model, solving is carried out to obtain a to-be-solved characteristic parameter, and a characteristic parameter identification function is realized. The method has conciseness, only a hemispherical resonator gyroscope needs to be connected into a drive detection device, and other solutions are completed by the processor. The method has applicability, and the drive detection device can be suitable for measurement of most of hemispherical resonators. Themethod has real-time performance and accuracy, can be used for testing after the gyroscope is assembled, is accurate in test result and can be directly used.

The invention relates to a hemispherical resonator gyroscope precision assembly device based on spectral confocal and an adjusting method thereof, the relative position relation between a base and a resonator is detected through a color confocal sensor according to the position relation between the base and the resonator, the device is constructed to adjust the X axis, the Y axis and the Z axis of the device, and meanwhile, the detection method of the device is formed according to the debugging process. Submicron-level precision accurate measurement and adjustment of the gap between the harmonic oscillator and the base electrode of the hemispherical resonator gyroscope are realized, the development requirement of the high-precision hemispherical resonator gyroscope is met, and development of novel inertial devices and weaponry in China is promoted. Through detection of a color confocal sensor, gaps between the harmonic oscillator and the base electrode in the X-axis direction, the Y-axis direction and the Z-axis direction can be detected and adjusted, gyroscope assembly efficiency is improved, and gap consistency adjustment precision is not affected by positioning precision of a displacement table. The device belongs to an optical non-contact measurement method, and a problem that the surface of a workpiece is scratched or polluted in a contact measurement method is solved.

The invention discloses an integrated micro-hemispherical resonator gyro and a processing and packaging method thereof. The integrated micro-hemispherical resonator gyro comprises a hemispherical resonator, a supporting handle, an upper glass substrate, a lower glass substrate, a middle silicon substrate, peripheral anchor point structures, electrodes, first electrode holes, bonding pads, a metalmask layer, a metal lead and a second electrode hole, wherein the upper glass substrate, the middle silicon substrate and the lower glass substrate are sequentially arranged from top to bottom, the peripheral anchor point structures are arranged on the periphery of the middle silicon substrate, the hemispherical resonator is arranged in the middle silicon substrate, the electrodes are evenly distributed on the periphery of the hemispherical resonator, the upper glass substrate is provided with the first electrode holes, the first electrode holes are provided with the bonding pads, the second electrode hole is formed in the center of the lower glass substrate, and the bottom end of the metal mask layer is connected with the second electrode hole through the metal lead. The integrated micro-hemispherical resonator gyro is small in size, good in structural integrity, high in precision and sensitivity and long in service life; the processing and packaging method can shorten the productioncycle and is suitable for batch production.

The invention discloses a standing wave azimuth angle measurement method based on asymmetric parameter identification of a hemispherical resonator gyroscope detection path, and belongs to the technical field of inertia. According to the invention, the problem of measurement error of a standing wave azimuth angle caused by inconsistent gains of X / Y detection signals, non-orthogonal X / Y detection electrodes and phase difference of the X / Y detection signals is solved. An improved angle measurement equation is established based on the gain ratio, the detection electrode deflection angle and the phase difference, error parameters are identified by using a nonlinear least square method or an extended Kalman filtering method, so that the accurate azimuth angle of the harmonic oscillator standing wave is calculated, the problem of inaccurate angle measurement caused by detection errors is solved, and the measurement precision of the hemispherical resonator gyroscope is improved. The method can be applied to the technical field of inertia.

The invention discloses a hemispherical resonator gyroscope temperature error indirect compensation method which is characterized by comprising the following steps: acquiring gyroscope output and resonance frequency of a hemispherical resonator gyroscope at a constant temperature; calculating the output drift of the hemispherical resonator gyroscope at each temperature point, and taking the output drift as a reference value for evaluating the temperature error compensation effect; indirectly measuring the temperature of the harmonic oscillator based on the hemispherical resonant frequency; and establishing an indirect compensation model of the temperature error and the resonant frequency based on a multiple regression theory. From the perspective of reducing the temperature error of the hemispherical resonator gyroscope, the resonant frequency of the hemispherical resonator is used for indirectly measuring the internal temperature of the resonator based on the corresponding relation between the internal temperature of the resonator and the resonant frequency, and in a temperature model, an independent variable is replaced by the resonant frequency from temperature, so that the temperature error of the hemispherical resonator gyroscope is reduced. A temperature error model and a multiple regression model of resonant frequency and resonant frequency change rate are established, and the temperature error model is used for compensating gyroscope output, so that the gyroscope output precision can be effectively improved.

The invention relates to the technical field of gyroscopes, in particular to a full-angle hemispherical resonator gyroscope exciting electrode error compensation method, which comprises the following steps of: placing a gyroscope in a static environment, periodically giving an orthogonal loop pulse signal P, changing an orthogonal control force of the gyroscope, and changing a gain difference and a frequency tracking loop according to a sum value, the output of the frequency tracking loop of the next gyro control period after the kth pulse signal is applied is recorded and subtracted to obtain a corresponding disturbance value, and the upper computer controls the orthogonal control force provided by the excitation A electrode to be multiplied according to the value corresponding to the minimum disturbance value. The method provided by the invention can effectively eliminate the inconsistent gain error of the excitation electrode, so that the precision of the gyroscope is ensured.

The invention relates to a multivariate temperature compensation system and method for a hemispherical resonator gyroscope based on a BP neural network, and the method comprises the steps: extracting multiple groups of temperatures, temperature gradients and temperature change rates through a temperature measurement element and a temperature measurement circuit, extracting data information of a harmonic oscillator through an electrode by an analog-to-digital converter, inputting the data information into a normalization module, and carrying out the calculation, acquiring information such as multiple groups of gyroscope frequencies, standing wave azimuth angles and gyroscope output, extracting sample characteristics by adopting a radial basis kernel function, training a BP neural network, and establishing a compensation model weight relation; and embedding the compensation model into a gyroscope control program, so that online compensation of gyroscope output in a temperature change environment is realized. The temperature characteristic of the gyroscope can be effectively improved, and the zero-bias stability of the gyroscope during long-time working is improved.

The invention belongs to the field of hemispherical resonant gyroscopes, and particularly relates to a hemispherical resonator mandrel vibration detection circuit and a hemispherical resonator mandrelvibration detection device. The hemispherical resonator mandrel vibration detection circuit comprises a plurality of pairs of interdigital electrodes arranged around a hemispherical resonator mandrel, wherein each pair of interdigital electrodes and the hemispherical resonator mandrel locally form a detection capacitor; each detection capacitor is connected with a voltage detection circuit; eachvoltage detection circuit comprises an operational amplifier and an operational amplifier capacitor; two ends of each operational amplifier capacitor are connected to an inverting end and an output end of the corresponding operational amplifier respectively; one interdigital electrode of each detection capacitor applies a constant voltage, the other interdigital electrode of the detection capacitor is connected with the inverting end of the corresponding operational amplifier, and the non-inverting end of the operational amplifier is grounded; and an output end of each operational amplifier outputs an operational amplifier output voltage, and whether the mandrel vibrates or not is judged according to whether the voltage is changed or not. The hemispherical resonator mandrel vibration detection circuit and the hemispherical resonator mandrel vibration detection device are simple in structure, and can detect the vibration condition of the mandrel in a non-contact manner.

The invention provides a glass-metal-blown miniature hemispherical resonant gyroscope and a manufacturing method thereof. The gyroscope comprises a cuboidal silicon base, a hemispherical shell type central resonator and eight electrodes, wherein the eight electrodes are uniformly distributed around the central resonator, consist of four drive electrodes and four detection electrodes and are connected to pins through leads; the drive electrodes and the detection electrodes can achieve electrostatic drive and detection through applying positive and negative voltage to corresponding pins; the central resonator and the hemispherical shell type electrodes are manufactured by adopting a glass metal blowing process. The gyroscope adopts an MEMS (Micro-Electromechanical Systems) process for processing, is simple in structure, small in volume and relatively high in accuracy, and has great development prospects.

The invention relates to a hemispherical resonator gyroscope, in particular to a hemispherical resonator gyroscope sine wave amplitude and phase detection method based on IIR (Infinite Impulse Response) filtering, which comprises the following steps of: converting an analog signal output by the gyroscope into a digital signal, performing multiplication demodulation on the digital signal, filtering out double-frequency signal components through a signal filter, and calculating the sine wave amplitude and phase of the hemispherical resonator gyroscope. The signal filtering uses an IIR filter. According to the method, the IIR filter is adopted, the method has the characteristics of small order and small delay, the frequency doubling signal brought by demodulation is filtered based on the IIR, the delay of the signal can be reduced, and the precision of resolving the vibration displacement parameter of the gyroscope is improved. Compared with a traditional filtering algorithm based on FIR, the time delay is reduced by 10 times while the same precision and noise level are obtained, and the consumption of hardware resources in the FPGA is reduced by about 10 times.