151 results about "Hemispherical resonator gyroscope" patented technology

The invention discloses a hemispherical resonator gyroscope inertial navigation system error online calibration method, device and system and a readable storage medium. The method comprises the following steps: establishing a dynamic observation equation of a gain error and a misalignment angle error; adaptively extracting error features of different time scales, and constructing a high-dimensional feature vector; decoupling the gain error and the misalignment angle error to obtain an error estimation value; constructing a dynamic compensation matrix, and correcting and measuring the angular velocity in real time; an online self-correction mechanism of the error compensation model is designed, and a compensation matrix is dynamically adjusted to adapt to dynamic changes of errors; an adaptive time sequence regression model is introduced to predict an error long-term drift trend, and a nonlinear compensation method is combined to actively counteract an error accumulation effect; dynamically adjusting the optimization rate of the compensation matrix through stability analysis; and dynamically optimizing error model parameters based on convergence evaluation of error residual errors. According to the invention, the limitation of a traditional method in a dynamic environment, especially the coupling problem of a gain error and a misalignment angle error, is solved.

The invention discloses a hemispherical harmonic oscillator high-precision equal-mass-density modification method, which comprises the following steps: determining the axis direction of a central anchor post of a hemispherical harmonic oscillator through multi-position detection analysis, and taking the axis direction as a measurement basis; measuring three-dimensional contour point cloud coordinates of the outer spherical surface and the inner spherical surface and eccentric coordinates relative to the axis reference, and establishing actual contour models of the outer spherical surface and the inner spherical surface; a modification area and a corresponding removal thickness are determined, and a three-dimensional modification removal model is established; carrying out three-dimensional continuous modification removal processing on the to-be-modified areas of the outer spherical surface and the inner spherical surface by adopting an etching method; and evaluating a modification result according to the middle surface diameter and thickness distribution of the section circles of the outer spherical surface and the inner spherical surface. According to the invention, the mass trimming of the three-dimensional spherical shell of the hemispherical resonator can be realized, and the hemispherical resonator with relatively symmetrical mass density distribution can be obtained through the combined mass trimming of the outer spherical surface and the inner spherical surface, so that the precision of the hemispherical resonator gyroscope can be improved.

The invention discloses an error self-calibration method of a hemispherical resonator gyroscope. The error self-calibration method comprises the following steps: realizing mapping and transition between modals; identifying and eliminating transient errors generated in the mode switching process; the error compensation process is optimized, and the adaptive capacity of the system to complex dynamic changes is enhanced; the control parameters of the gyroscope in different modes are automatically adjusted; the correction of an error mode is optimized, and the output precision is improved; transient errors are recognized and eliminated in real time, and system output signals are smoothed; constructing a mode switching decision support and prediction algorithm, judging a mode switching opportunity, predicting an error after switching and compensating the error in advance; system control and calibration parameters are adjusted in real time; layered optimization is carried out on errors of different modal hierarchies; and error self-learning and system optimization are realized by combining adaptive learning and a global optimization strategy. According to the method, the transient error problem caused in the mode switching process can be effectively solved, and global optimization and error correction can be carried out in real time.

The invention discloses a hemispherical resonator gyroscope inertial navigation system temperature compensation method and compensation system, and the method comprises the steps: constructing a dynamic temperature space model, and achieving temperature drift characteristic modeling; designing an incremental adaptive neural network structure to enable the compensation model to adapt to the temperature change, and optimizing the compensation precision through a successive approximation incremental learning mode; temperature compensation and increment optimization are carried out in real time through combination of a dynamic temperature space model and an increment adaptive neural network, and compensation precision is maintained through dynamic updating of a temperature space and an increment learning mechanism of the increment adaptive neural network; output signal drift and compensation errors are monitored through a self-adaptive feedback mechanism, a dynamic temperature space model and incremental self-adaptive neural network parameters are dynamically adjusted, and the stability and the compensation effect are improved through an online correction and model self-optimization mechanism. According to the method, the problems of insufficient temperature drift modeling precision, poor adaptability and compensation precision attenuation after long-time operation in a traditional compensation method are solved.

The invention discloses a hemispherical gyroscope phase-locking control optimization method and device, and the method comprises the steps: changing the vibration mode azimuth angles of a hemispherical resonator gyroscope, collecting the phase-locking frequency in real time for each vibration mode azimuth angle, and calculating the phase-locking optimization control force in real time according to the collection result, substituting the phase locking frequency and the phase locking optimization control force into an electrode driving excitation model to calculate a driving signal in real time and transmit the driving signal to a driving electrode, and after the phase locking frequency is stable, collecting a stable phase locking optimization control force corresponding to the vibration mode azimuth angle; according to all the vibration mode azimuth angles and the corresponding stable phase-locking optimization control force, constructing a relation model of the two, solving the relation model to obtain phase-locking optimization parameters, calculating the phase-locking optimization control force according to the phase-locking optimization parameters and the relation model, and substituting the phase-locking optimization control force into an electrode driving excitation model to calculate a driving signal. Therefore, the compensation for the driving signal when the hemispherical resonator gyroscope works normally is realized. According to the invention, the influence of the circumferential frequency difference on the output precision of the harmonic oscillator can be eliminated.

The invention provides a hemispherical resonator full spherical surface quality-rigidity combined trimming method and system, and belongs to the field of solid-state vibrating gyroscopes. The invention aims to solve the problem of low trimming efficiency caused by mass and rigidity coupling in the trimming frequency splitting process because etching is not carried out on a full-hemispherical shell in the existing trimming process of the hemispherical harmonic oscillator. A laser Doppler vibration meter is used for obtaining the low-frequency axis, high-frequency axis orientation and frequency splitting decomposition value of a hemispherical resonator, a focused ion beam is controlled to conduct rigidity fine adjustment on the positions of the four high-frequency axes in a high-latitude area, and quality-rigidity coupling fine adjustment is conducted on the positions of the four low-frequency axes in a low-latitude area. Etching on the full-hemispherical shell is realized, the quality and rigidity of the hemispherical harmonic oscillator can be decoupled, and the trimming efficiency of the hemispherical harmonic oscillator is improved; the mass and the rigidity are decoupled through mass-rigidity combined trimming, and the uniformity of the mass and the rigidity of the hemispherical resonator gyroscope is improved; the method has certain universality and can be popularized and used for mass rigidity trimming of harmonic oscillators in different shapes.

The invention discloses a hemisphere gyroscope driving crosstalk rapid self-identification and compensation method and device, and the method comprises the steps: carrying out four rounds of experiments according to a resonant frequency and a preset amplitude range, gradually increasing the amplitude in the preset amplitude range in each round, and for each amplitude, carrying out the self-identification and compensation of the driving crosstalk of a hemisphere gyroscope. A driving signal is calculated in real time within a set time range and transmitted to a driving electrode, and a detection signal of a detection electrode is collected at the same time; the method comprises the following steps: acquiring a detection signal simplification model, decomposing the detection signal according to the detection signal simplification model, constructing a crosstalk parameter identification model according to all driving signals and corresponding detection signals, solving the parameter identification model, and substituting crosstalk identification parameters into a crosstalk compensation model so as to realize crosstalk compensation of the detection signal when the hemispherical resonator gyroscope works normally. According to the method, the accuracy of driving crosstalk compensation of the hemispherical gyroscope can be effectively improved, so that the control precision and the zero-bias stability of the gyroscope are improved.

The invention relates to the technical field of gyroscopes, and discloses a hemispherical resonator gyroscope scale error compensation method, device and equipment and a medium. The method comprises the following steps: acquiring a target temperature value, and acquiring a target resonant frequency value according to the target temperature value; according to the target resonant frequency value and a pre-calibrated temperature compensation coefficient, calculating to obtain a target electrode asymmetric error coefficient; according to the asymmetric error coefficient of the target electrode, a target gyroscope scale factor is obtained through calculation, and according to the target gyroscope scale factor, the output angular velocity of the target gyroscope is obtained through calculation. According to the scheme of the embodiment, the asymmetric error of the gyroscope electrode is subjected to temperature compensation correction, so that the scale error of the hemispherical resonator gyroscope can be reduced, and the precision of the gyroscope can be improved.

The invention provides a hemispherical resonator gyroscope which comprises a hemispherical resonator, a driving electric substrate and a detection electric substrate, the hemispherical resonator is of a hemispherical structure, the driving electric substrate is of a flat plate type structure, and the detection electric substrate is of an inner spherical surface structure. A first conductive film layer is arranged on the inner surface of the hemispherical harmonic oscillator, a second conductive film layer is arranged on the end face of the lip edge, the detection electric substrate is provided with a detection electrode, and the driving electric substrate is provided with a potential electrode and a driving electrode. The detection electrode and the first conductive film layer form a detection capacitor, and the driving electrode and the second conductive film layer form a driving capacitor. The detection electrode and the driving electrode are separately arranged, so that the coupling of the driving signal and the detection signal can be reduced. The detection electric substrate is of an inner spherical surface structure, so that the area of a detection capacitor formed by the detection electrode and the first conductive film layer can be increased, and the intensity of a detection signal is improved. The driving electric substrate is of a flat plate type structure, and the potential electrode and the driving electrode are arranged on the driving electric substrate, so that the processing and assembling difficulty can be reduced.

The invention relates to an automatic test method and system for the zero offset of a hemispherical resonator gyroscope. The automatic test system composed of a double-shaft servo turntable control module, a gyroscope control module and a PC (Personal Computer) upper computer is built; a servo turntable control instruction and a gyroscope control instruction are sent through a serial port according to a certain program through an automatic test logic built in a PC upper computer, a gyroscope vibration mode angle is controlled to be automatically switched from 0 degree to 360 degrees (the step length can be set), and turntable angle and gyroscope vibration mode angle data under each vibration mode angle are synchronously collected; and substituting the acquired data into the error model, completing zero offset error parameter identification by adopting a nonlinear least square method, generating an error compensation formula, and writing the error compensation formula into a gyroscope control unit in real time to realize compensation.

A fluctuating magnetic field output drift optimization method for a hemispherical resonator gyroscope comprises the following steps: step 1, primary optimization: calculating a quaternion as a state value of Kalman filtering by using a Gauss-Newton iteration method through measured magnetic field intensity and acceleration, and obtaining a primary optimization estimated value of the quaternion according to the state value; step 2, conversion correction; and step 3, secondary optimization: taking the corrected quaternion as a state quantity, then taking the quaternion obtained by the first Kalman filtering as an observed quantity, carrying out second Kalman filtering, and completing secondary optimization of the quaternion, in the above method, obtaining an optimal estimated quaternion through Kalman filtering, and finally obtaining an optimal estimated quaternion through Kalman filtering. And then compensating the drift of the gyroscope by using a complementary filtering algorithm to obtain a corrected quaternion, and carrying out second optimization on the quaternion through Kalman filtering by using the obtained quaternion and the optimal estimated quaternion obtained by Kalman filtering, thereby reducing the output drift of the hemispherical resonator gyroscope through the optimization method.

The invention discloses a hemispherical resonator gyroscope initial alignment and navigation method based on dual-mode switching, and belongs to the field of hemispherical resonator gyroscope control. According to the invention, the problem that the single working mode of the hemispherical resonator gyroscope is difficult to meet different requirements in the initial alignment and navigation process is solved. According to the method disclosed by the invention, the precision of the hemispherical resonator gyroscope in an initial alignment stage can be improved compared with a single full-angle mode, and meanwhile, the range of the hemispherical resonator gyroscope in a navigation stage can be improved compared with a single force balance mode. The advantages of the two modes can be combined, different requirements for the precision and the measuring range of the hemispherical resonator gyroscope in different stages can be met by switching the two control modes, and the problem that the single working mode of the hemispherical resonator gyroscope is difficult to meet different requirements in the initial alignment and navigation process is solved. The method can be applied to mode switching of the hemispherical resonator gyroscope.

The invention discloses a hemispherical resonator gyroscope two-channel measurement and control system detection, driving and phase error iterative compensation method, and belongs to the technical field of inertia. According to the invention, the problem of unexpected drift of the standing wave angular rate output by the gyroscope due to detection channel errors, driving channel errors and signal phase delay errors is solved. According to the method, iterative compensation is carried out through the compensation matrix to achieve effective suppression of a single error, coupling interference between errors is effectively reduced through compensation scheme design, and finally the optimal compensation effect on the three errors is achieved. Through iterative compensation of detection, driving and phase errors, the signal detection precision and excitation application precision of the double-channel measurement and control system of the rate integration hemispherical resonator gyroscope are improved, and the problem of unexpected drift of the standing wave angular rate caused by gain and drift angle errors and phase delay errors generated by a detection channel and a driving channel of the measurement and control system is effectively solved. The method provided by the invention can be applied to error compensation of a hemispherical resonator gyroscope double-channel measurement and control system.

The invention discloses a hemispherical resonator gyroscope scale factor self-compensation system and method. An X-axis electrode and a Y-axis electrode are respectively connected with a buffer amplifier, an analog-to-digital converter and a demodulation unit through switches; one output of the demodulation unit is connected with the excitation signal demodulation unit and the scale factor compensation unit, the other output of the demodulation unit is connected with the control unit through the low-pass filtering unit, the output of the control unit is connected with the scale factor compensation unit and the two signal modulation units, and the two signal modulation units are respectively connected with an X-axis electrode and a Y-axis electrode through the digital-to-analog converter; and the output of the excitation signal generator is connected with the Y-axis signal modulation unit and the excitation signal demodulation unit. A Y-axis sine excitation signal response amplitude is extracted through an excitation signal demodulation unit, and a scale factor change relation can be obtained according to a ratio relation between the amplitude and an amplitude reference value. According to the invention, the self-compensation of the scale factor can be completed, the problem that the performance of the gyro scale factor is reduced due to temperature change and aging is solved, and the temperature stability and long-term working stability of the gyro scale factor are improved.

The invention relates to the technical field of inertial measurement, in particular to a hemispherical resonator gyroscope full-angle mode start optimization control method which comprises the following steps: S1, data collection and preprocessing, S2, deep learning model establishment, S3, random drift compensation, S4, delay compensation, S5, vibration asymmetry test and trimming, S6, integration and test, and S7, continuous optimization. The method comprises the steps of comprehensive data collection, deep learning model establishment, random drift compensation, delay compensation, vibration asymmetry test and trimming, integration and test, continuous optimization and the like. The technical problems that when the hemispherical resonator gyroscope is started in a full-angle mode, dynamic response prediction is inaccurate, random drift compensation is insufficient, the delay influence of a hemispherical resonator gyroscope control system is large, vibration is asymmetric, and the stability and accuracy of system performance are insufficient are solved. The integrated application of the series of steps improves the overall performance and reliability of the system.

The invention relates to a hemispherical resonator and hemispherical gyroscope parameter and defect identification system and method, and belongs to the technical field of hemispherical resonator gyroscopes. According to the invention, automatic identification of damping non-uniformity, rigidity non-uniformity and 1-3-order quality defect parameters is respectively carried out on the fused quartz hemispherical resonator before and after film coating and the gyroscope header after base assembly, so that the full-flow coverage test of the hemispherical resonator gyroscope is realized; various parameters are identified in the whole process from harmonic oscillator machining forming to the gauge outfit state, the testing precision, the system reusability, the operation convenience and consistency are greatly improved, and the production efficiency is improved.

The invention discloses a detection device and a detection system for harmonic oscillator capacitors of a hemispherical resonator gyroscope, and relates to the technical field of capacitor detection, the detection device comprises a signal detection circuit, a modulation compensation circuit, a differential amplification circuit and a control circuit, the signal detection circuit is connected with the output ends of the two harmonic oscillator capacitors; the modulation compensation circuit is correspondingly connected with two input ends of the signal detection circuit; the differential amplification circuit is correspondingly connected with two output ends of the signal detection circuit; the control circuit is configured to output modulation voltage to the two input ends of the modulation compensation circuit according to a voltage signal of the output end of the differential amplification circuit, and zero setting is carried out on voltage at the connecting positions of the two output ends of the modulation compensation circuit and the two input ends of the signal detection circuit. According to the invention, the modulation compensation circuit is adopted to enable the output ends of the two harmonic oscillator capacitors to work near zero voltage, the circuit has the characteristics of ultrahigh linearity, extremely low temperature drift, rapidness and stability, errors caused by power supply drift can be eliminated, and the detection precision is improved.

The invention relates to the technical field of gyroscope detection, in particular to a dynamic analysis system based on a hemispherical resonator gyroscope, the dynamic analysis system comprises a bearing chassis and a regulation and control mounting seat, the top surface of the bearing chassis is provided with an annular sliding rail coaxially arranged with a welding hole, and the annular sliding rail is slidably connected with a monitoring assembly and an adjusting assembly which are integrally arranged; a clamping assembly used for fixing a sensitive base is arranged between the annular sliding rail and the welding hole, the regulation and control mounting seat is arranged above the bearing chassis and is connected with the bearing chassis through a fixing support, a chuck used for fixing an excitation cover is arranged at the top of the regulation and control mounting seat, and the axis of the chuck is overlapped with the axis of the welding hole; dynamic monitoring and real-time adjustment of the hemispherical resonator gyroscope in the assembling process are achieved, the assembling precision can be monitored at any point position, and by dynamically adjusting assembling parameters and eliminating interference of environment noise and mechanical vibration, independent detection operation in the assembling process can be reduced, and the overall production efficiency can be improved.

The invention relates to the field of hemispherical resonator gyroscope manufacturing, in particular to a high-uniformity metallization coating method and device for a fused quartz hemispherical resonator. The method comprises the following steps of: fixing a special tool of the hemispherical harmonic oscillator and the hemispherical harmonic oscillator; the distance between the surface of the sputtering target and the surface of the special tool, the relative distance between the center of the sputtering target and the center of the special tool and the included angle between the hemispherical harmonic oscillator and the horizontal plane of the special tool are adjusted; carrying out surface cleaning on the hemispherical harmonic oscillator, and then carrying out film plating; the film uniformity distribution condition is obtained by sampling an accompanying plating sheet and measuring a film layer step.

The invention relates to a temperature drift compensation method for a hemispherical resonator gyroscope, which comprises the following steps of: designing a hemispherical resonator gyroscope temperature estimation model taking parameters such as a heater on-off state of a thermal control subsystem, heater on / off action time, cabin plate temperature, partition plate temperature and the like as input through on-orbit data analysis; a neural network model is constructed to learn the nonlinear uncertain drop process of the temperature of the hemispherical resonator gyroscope in the closed state of the heater; and a compensation model between the temperature of the hemispherical resonator gyroscope and the constant drift is established. According to the invention, the on-orbit temperature compensation problem of the hemispherical resonator gyroscope is solved, the measurement precision of the hemispherical resonator gyroscope is improved, a frequency measurement circuit and a temperature control circuit do not need to be additionally designed, and the cost is saved.

In order to solve the problems that in an existing hemispherical harmonic oscillator quality leveling technology, the inherent rigid axis positioning efficiency is low, and manual intervention is relied on, the invention provides a method for rapidly positioning the azimuth of an inherent rigid axis of a hemispherical harmonic oscillator based on pulse broadband excitation and quasi standing wave response and a corresponding leveling device. Through an analytical expression of a main standing wave and an auxiliary wave in a second-order four-amplitude resonance working mode, a double-excitation vibration stopping system (comprising two knocking hammers and a vibration stopping hammer with the azimuth difference of 22.5 degrees odd times) is ingeniously designed, and the azimuth of an inherent rigid shaft is quickly positioned by combining orthogonal detection signals. According to the method, the limitation on the excitation direction and the detection direction is relaxed, and through the design of the vibration stopping hammer, the positioning efficiency of the inherent rigid shaft is improved, and the extraction precision of residual vibration on the characteristic parameters can be avoided. The formed hemispherical resonator leveling device provides reliable technical support for batch production of high-precision hemispherical resonator gyroscopes.

The invention relates to a calibration method for X / Y channel phase delay errors of an all-angle hemispherical resonator gyroscope, and belongs to the technical field of inertial device error calibration, and the calibration method comprises the following steps: S1, based on an average method, establishing an all-angle hemispherical resonator gyroscope nonlinear error model containing the X / Y channel phase delay errors; s2, performing parameter calibration on the all-angle hemispherical gyroscope nonlinear error model containing the X / Y channel phase delay error based on a moving phase to obtain a calibrated X / Y channel phase delay error; and S3, compensating the output of the full-angle hemispherical resonator gyroscope by using the calibrated X / Y channel phase delay error. The parameter identification work can be carried out offline, the problem of calculation of a large amount of real-time data is avoided, the calibration result is high in reliability, high in universality and simple to operate, the full-angle hemispherical resonator gyroscope is high in precision and good in practicability after compensation, and the problems that in the prior art, the calibration result is not reliable, and the precision is poor after compensation are solved.

The invention discloses a force balance hemispherical resonator gyroscope null drift compensation method and device, electronic equipment and a computer readable storage medium, and the method comprises the steps: setting a hemispherical resonator gyroscope in a force balance mode, pushing a vibration mode azimuth angle to a damping simple vibration shaft, enabling a sensitive shaft of the hemispherical resonator gyroscope to be vertical to the ground, and enabling the sensitive shaft to face upwards, changing the environment temperature of the hemispherical resonator gyroscope, the method comprises the following steps: acquiring circuit temperatures, actually measured resonant frequencies and zero-offset output measured values of a gyroscope in real time, constructing a regression model according to each circuit temperature and the corresponding actually measured resonant frequencies and zero-offset output measured values, solving the regression model to obtain fitting parameters, and substituting the fitting parameters into a zero-offset output compensation model to obtain a zero-offset compensation model. And calculating according to the zero offset output compensation model to obtain a compensated zero offset output value. The amplification factor difference of the circuit is reflected by the sampling temperature of the circuit, the zero drift is estimated and compensated by the two characteristics at the same time, and the compensated gyroscope can basically inhibit the influence of the zero drift.

The invention relates to a multi-gyroscope automatic calibration system and method for hemispherical resonator gyroscopes. The system comprises a rate turntable, a communication module of the rate turntable, a multi-gyroscope control system and a PC (Personal Computer) upper computer module, the PC upper computer module is used for realizing multi-gyroscope automatic calibration logic control and instruction sending and receiving of double serial ports, and is respectively butted with a rate turntable and a communication module thereof, and a multi-gyroscope control system and a communication module thereof; the PC upper computer module sends a rotary table control instruction and a gyroscope control instruction through a serial port according to a certain program through a built-in self-calibration method logic, achieves synchronous action of the rate rotary table and the multi-gyroscope control system, collects gyroscope control system output data needed by the self-calibration method in real time, and obtains the multi-gyroscope control system output data according to the mathematical operation process described by the method. A result obtained through calculation is a system error numerical value of the hemispherical resonator gyroscope, verification information returned by the multi-gyroscope control system and the rate turntable communication module is verified in real time, and the correctness of the flow of the self-calibration method is monitored. According to the invention, automatic continuous calibration compensation of a plurality of calibration error terms is realized.

The invention discloses a hemispherical gyroscope driving detection circuit phase shift identification method, electronic equipment and a computer readable storage medium, and the method comprises the steps: controlling a DAC output end of a hemispherical resonator gyroscope main control chip to be connected with an input end of a pre-amplification detection circuit, calculating a driving signal in real time, and transmitting the driving signal to a driving electrode; detection signals of the detection electrode are collected in real time, phase shift identification parameters of the detection circuit are calculated according to all the detection signals of the detection electrode collected when the hemispherical resonator gyroscope is in a phase shift identification state of the detection circuit and a modulation-demodulation algorithm, and then the phase shift angle of the detection circuit is solved; the output end of the control drive amplification circuit is connected with the input end of the pre-amplification detection circuit, the same method is adopted to calculate and obtain the phase shift identification parameters of the drive circuit, and the phase shift angle of the drive circuit is solved. According to the invention, the phase shift of the driving circuit and the detection circuit is separated and identified, so that the influence of the phase shift of the circuit on the null shift of the harmonic oscillator is reduced, and the null-bias stability of the hemispherical gyroscope is greatly improved.

The invention discloses an excitation circuit and system of a hemispherical resonator gyro, and relates to the technical field of hemispherical resonator gyroscopes, the excitation circuit comprises a sampling circuit, a controller, a digital-to-analog conversion circuit and a signal amplification circuit, the sampling circuit is connected with the controller and the hemispherical resonator gyro, and the digital-to-analog conversion circuit is connected with the signal amplification circuit. The vibration sensor is used for collecting vibration signals of a hemispherical resonator of the hemispherical resonator gyroscope and outputting the vibration signals to the controller, the controller is connected with the digital-to-analog conversion circuit and used for generating digital excitation signals according to the vibration signals and outputting the digital excitation signals to the digital-to-analog conversion circuit, and the digital-to-analog conversion circuit is connected with the signal amplification circuit. The signal conversion circuit is connected with the hemispherical resonator gyroscope and used for converting the digital excitation signal into an analog excitation signal and outputting the analog excitation signal to the signal amplification circuit, and the signal amplification circuit is connected with the hemispherical resonator gyroscope and used for amplifying the analog excitation signal and outputting the analog excitation signal to a capacitor electrode of the hemispherical resonator gyroscope, so that the accuracy of the excitation signal is improved, and the hemispherical resonator keeps stable vibration in a four-wave amplitude vibration mode.

1. The name of the design product: hemispherical resonator gyro flat plate electrode. 2. The use of the design product: inertial measurement. 3. The design points of the design product: in shape. 4. The picture or photo that best indicates the design points: perspective view.

The invention discloses a micro-hemispherical electrode, a preparation method thereof and a micro-hemispherical resonator gyro, and the preparation method comprises the following steps: separating a high-pressure film layer and a metal bottom film layer on a quartz surface by a bottom layer pattern with a set line width; forming an insulating film layer with an annular main body structure on the high-voltage film layer; a plurality of electrode film layers and GND film layers are formed on the insulating film layer and the metal bottom film layer, the plurality of electrode film layers are located on the insulating layer and are distributed at intervals in the circumferential direction by taking the high-voltage film layer enclosed by the inner ring of the insulating layer as the center, and the electrode film layers and the GND film layers are separated by frame patterns with set line widths; the GND film layer extends inwards from the edge of the quartz surface to the inner ring close to the insulating layer. According to the invention, the problems of signal instability and circuit board short circuit damage caused by uneven electric field of the micro hemispherical resonator gyroscope can be effectively improved.

The invention discloses a spherical surface standing wave three-dimensional procession effect three-axis integrated miniature gyroscope spherical shell resonance structure, the structure comprises a spherical harmonic oscillator, a plurality of electrodes and a shell, and the electrodes are used for measuring the vibration mode of the spherical harmonic oscillator to realize the measurement of the angular velocity of three-axis rotation; a supporting column is arranged in the center of the spherical harmonic oscillator, an inner spherical shell is arranged on the outer layer of the spherical harmonic oscillator, the supporting column comprises a plurality of U-shaped supporting beams, an anchor area sphere and a base, the inner spherical shell is constructed to be in a thickness non-uniform distribution form, and the lower end of the inner spherical shell is provided with a hole structure for the supporting column to penetrate through. Wherein the lower boundary of the hole is overlapped with the upper boundary of the base. The electrodes are arranged on the outer side of the spherical harmonic oscillator, a gap between the outer wall of the spherical harmonic oscillator and the inner wall of each electrode is a capacitance gap, the electrodes are arranged around the equator of the spherical harmonic oscillator every 45 degrees, the electrodes are arranged at the 45-degree positions of an upper hemisphere and a lower hemisphere every 90 degrees, and the electrodes are embedded in the upper face of the shell. The three-axis angular velocity measuring device has the remarkable effects that the structure is simple, the space limitation of two-dimensional precession of a traditional hemispherical resonant gyroscope is broken through, and the three-axis angular velocity measurement is realized under a single structure by utilizing the space precession characteristic of spherical harmonic standing waves under the action of multi-degree-of-freedom inertia force.

The utility model discloses a kind of hemispherical resonator gyroscopes and flat plate electrodes, flat plate electrode includes quartz sheet, its upper surface is equipped with by the frame pattern with set line width is separated GND film layer and multiple electrode film layers, multiple electrode film layers are arranged in circumferential interval, GND film layer is extended from quartz upper surface edge to surround multiple electrode film layers by inside;Multiple grooves are equipped on the lateral wall surface of quartz sheet, groove extends to the lower surface of quartz sheet and is penetrated, groove includes a ground groove and multiple electrode grooves, multiple electrode grooves and multiple electrode film layers one-to-one correspondence, each electrode film layer extends to the groove wall of corresponding electrode groove by inside, ground groove is located between two adjacent electrode grooves, the region corresponding to GND film layer and ground groove extends to the groove wall layer covering ground groove by inside.The utility model can solve the problem that hemispherical resonator gyroscope assembly reverse welding is difficult, vibration is easy to fall off.