The invention relates to a Y-shaped cavity orthogonal polarization
laser-based force and
mass measurement method and device. The device consists of a Y-shaped cavity orthogonal polarization
laser, a gas diaphragm
capsule, a force-applying unit, an
operating point selection and
control unit and a
signal acquisition and
processing unit. A force to be measured or the self-gravity of an object to be measured is transferred to an ultra-
thin diaphragm of the gas diaphragm
capsule through the force-applying unit, the ultra-
thin diaphragm is subjected to elastic deformation, the volume of sensing gas in the gas diaphragm
capsule is caused to be changed, the
refractive index of sensing gas in a P subsection of the Y-shaped cavity orthogonal polarization
laser communicated with the gas diaphragm capsule correspondingly changes, thus, the optical length difference between a
resonant cavity of S polarized light and a
resonant cavity of P polarized light is caused to be changed, the beat
frequency difference between the S polarized light and the P polarized light is finally caused to be changed, and the change value of the beat
frequency difference is directly proportional to the size of the inputted force. The Y-shaped cavity orthogonal polarization laser-based force and
mass measurement method and device have the characteristics of
high resolution,
large dynamic range, high
linearity, direct digital output and the like, and the device can be used as a micro / nano force and micro / nano
mass measurement standard transferring instrument through optimizing structural parameters.