This invention discloses a displacement and
mass sensing device and method based on a CrPS4 thin-film mechanical oscillator, comprising: a substrate, a CrPS4 thin film, the substrate including a
Si substrate, a SiO2 layer, a Si3N4 layer, and a Ti and Au composite layer; a groove is provided in the middle of the Ti and Au composite layer, the Si3N4 layer, and the SiO2 layer, and an
electrode composed of the Ti and Au composite layer is provided at the bottom of the groove; the middle part of the CrPS4 thin film is suspended above the groove; at a temperature of 4K, the CrPS4 thin-film mechanical oscillator has a
wide dynamic range of up to 85-93dB and a quality factor of up to 3000-4500, and the displacement and
mass sensitivities of the sensing device are 14-18 fm / Hz, respectively. 1 / 2 With a
mass of 0.9–1.7 μg, equivalent to the mass of a
proton or a
hydrogen atom, this opens up possibilities for distinguishing different chemical elements in future
inertial mass spectrometry measurements. The ultra-high mass sensitivity CrPS4 mechanical oscillator offers new opportunities for
mass spectrometry, magnetometers, and adsorption experiments.