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48results about How to "Inhibit gas flow" patented technology

Method and apparatus for improving breakdown voltage of integrated circuits formed using a dielectric layer process

A method and apparatus for depositing a dielectric layer. The apparatus includes a semiconductor processing chamber configured for use in a dielectric layer deposition process, the semiconductor processing chamber being associated with at least a length, a width, a height, and a volume, one or more gas sources containing one or more gases used in the barrier layer deposition process, and one or more gas flow controllers coupled to the one or more gas sources, the one or more gas flow controllers configured to provide one or more controlled amounts of one or more gas flows to the semiconductor processing chamber during semiconductor processing. One or more gas lines coupled to the one or more gas flow controllers for receiving one or more gas flows from the one or more gas flow controllers, and a pumping system is coupled to the semiconductor processing chamber, the pumping system configured to remove a quantity of gas from either the semiconductor processing chamber or the one or more gas lines. A 3-way valve is coupled to the pumping system and the process chamber, the 3-way valve being configured to allow the one or more gas flows to be sent to the pumping system or to the process chamber.
Owner:SEMICON MFG INT (SHANGHAI) CORP

Solenoid isolation valve

The disclosure of U.S. patent application Ser. No. 11/161,914 including the specification, drawings and abstract is incorporated herein by reference in its entirely. An improved pilot-operated, “instant-on”, solenoid isolation valve discloses a new fluid passage route to save cost of drilling a longitudinal hole within the primary piston. Also, a new feature of primary piston assembly with a movable seal piston having a specific circumferential surface matching to valve body chamber to restrict fluid from front side into back side of the primary piston to produce pressure difference to induce instant valve open when solenoid is energized initially. It also introduces a channel hole in the flange of the sleeve assembly as a communication channel of supply of gas into the chambers of the back side of primary piston assembly. The diameter of the channel hole is not critical to determine in this new invent. As long as the size of the hole is smaller than that of the bleed hole, it can maintain pressure difference between the front side and back side of primary piston during valve opening operation. In addition, since the pilot piston and the primary piston assembly operate independently, the travel stroke of the primary piston assembly is unconstrained by the input electrical power.
Owner:WANG WEI CHING +2
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