1864results about "Fluid pressure control using electric means" patented technology

The present invention relates to a vacuum evacuation system used to evacuate a processing gas from one or more process chambers for use in, for example, a semiconductor-device manufacturing apparatus. The vacuum evacuation system is a vacuum apparatus for evacuating a gas from a plurality of process chambers (1). The vacuum evacuation system includes a plurality of first vacuum pumps (5) coupled to the plurality of process chambers (1) respectively, a collecting pipe (7) coupled to the plurality of first vacuum pumps (5), and a second vacuum pump (8) coupled to the collecting pipe (7).

A pressure control system allows gas to be evacuated out of a semiconductor process chamber at a substantially constant rate of mass flow. A gas line connects the process chamber to a vacuum pump. A controllable valve having a variable sized opening is positioned between the process chamber and the vacuum pump. A pressure sensor is in turn positioned between the valve and the vacuum pump, proximate the inlet to the vacuum pump. The size of the variable sized opening is regulated based upon the pressure in the gas line measured by the pressure sensor. The size of the valve opening is varied to maintain the pressure measured by the pressure sensor at a constant value. As a result, because the quantity of gas flowing through the gas line is proportional to the gas pressure, a substantially constant mass flow of gas out of the chamber and into the pump can be achieved.

The present invention provides, e.g., apparatus comprising at least one processor; at least one memory including computer program code; the at least one memory and computer program code being configured, with at least one processor, to cause the apparatus at least to: respond to signaling containing information about an instant pressure and a flow rate of fluid being pumped in a pumping system, and obtain an adaptive control curve based at least partly on the instant pressure and flow rate using an adaptive moving average filter. The adaptive moving average filter may be based at least partly on a system flow equation: SAMA_t=AMAF(Q_t/√{square root over (ΔP_t)}), where the function AMAF is an adaptive moving average filter (AMAF), and the parameters Q and ΔP are a system flow rate and differential pressure respectively. The at least one memory and computer program code may be configured to, with the at least one processor, to cause the apparatus at least to obtain an optimal control pressure set point from the adaptive control curve with respect to an instant flow rate or a moving average flow rate as SP_t=MA(Q_t)/SAMA_t, where the function MA is a moving average filter (MA), to obtain a desired pump speed through a PID control.

A disc opener unit for an agricultural implement has a down pressure adjustment device that automatically adjusts the amount of down pressure applied on a furrowing disc based on strain measurements taken by a strain gauge or load cell. The strain gauge, which may be mounted to an arm that is used to set the position of a depth setting gauge wheel, provides feedback to a processor that in turn controls the amount of hydraulic fluid in a hydraulic cylinder to adjust the down force applied on the disc. The amount of down pressure is therefore adjusted in substantially real-time in response to changes in field conditions, which improves furrow depth consistency and reduces wear on the gauge wheel and its components.

An electromechanically-assisted control system for use in a second-stage regulator. Regulator control assembly (20), also referred to as EMA assembly (20), includes a mechanical actuator sub-assembly (21) and an electromechanical actuator (EMA) sub-assembly (22) for controlling airflow through single air supply line (23). EMA sub-assembly (22) includes electronically controllable actuator (ECA) (34), which removably seals EMA orifice (36) in wall (30) of pilot chamber (32). ECA (34) is electrically connected with and controlled by control electronics (38). The control electronics include programmable microprocessor (40), which is electrically connected with charge and discharge electronics (42), both of which are electrically connected with power supply (44). Alternatively, regulator control assembly (20′), also referred to as all-electronic (AE) assembly (20′), has only an EMA sub-assembly and no mechanical actuator sub-assembly. AE assembly (20′) does not include a low-pressure diaphragm, a lever arm, a first valve, or a pilot jet orifice.

A device (100, 2604) includes a controllable skin texture surface (2602), a sensor (2700), and control logic (200). The sensor senses a plurality of points of interest (2804, 2806) of a user surface (2800). The control logic controls a plurality of portions (2900) of the controllable skin texture surface to protrude at locations with respect to the plurality of points of interest in response to the sensor sensing the plurality of points of interest. In one example, the control logic periodically adjusts the plurality of portions protruding from the controllable skin texture surface in response to movement between the user surface and the controllable skin texture surface.

A fluid compression system includes a plurality of compressors, each compressor having a local controller for controlling operation thereof and a sensor for sensing the pressure of compressed fluid discharged therefrom. A method for controlling operation of the fluid compression system includes establishing a set point pressure threshold for loading and unloading each compressor, and assigning a ranking to each compressor for identifying a highest ranked compressor and a lowest ranked compressor, whereby the highest ranked compressor for the compression system initiates all commands for controlling all of the lower ranked compressors in the compression system. The method also includes commencing a loading subroutine including loading the highest ranked unloaded compressor, setting a load delay timer, sensing the pressure of the compressed fluid discharged from the highest ranked compressor, comparing the sensed discharge pressure of the highest ranked compressor to the set point pressure threshold established for the highest ranked compressor, and transmitting a load command from the controller of the highest ranked compressor to the controller of the next highest ranked unloaded compressor if the sensed discharge pressure of the highest ranked compressor remains less than or equal to the set point pressure threshold established for the highest ranked compressor, and the load delay timer equals zero. The loading subroutine is repeated until the discharge pressure of the highest ranked compressor is greater than the set point pressure threshold established therefor.

A “plug and play” process control valve 10 providing closed loop feedback control has a built in microprocessor 40, stepper-motor 20, a position encoder, a valve body having an inlet 11 and an outlet 12, and pressure sensors 30, 31 positioned within the inlet 11 and the outlet 12 of the valve body, the pressure sensors being connected to the microprocessor 20, which is in turn connected to an input from the position encoder, and provided with outputs to the step-per-motor 40. Within the valve body there are a pair of apertured ceramic shear action discs 13, 14. The stepper-motor rotates the upper disc 14 relative to the apertured stator disc 13 to control pressure or flow in the pipeline.

The rated system pressure in a pressure control system is adjusted through a pressure relief valve (2). In addition to the pressure relief valve (2), the system includes a check valve (4), a pressure sensor (3), a position switch (10), a first pressure adjustment member (13) for the relief valve, a second pressure adjustment member (12) for the check valve (4), an actuator (16), and a microcontroller (15) with a memory (6) and a display (7). Faults caused by pressure adjustment interactions are prevented by permitting an adjustment of the pressure relief valve only if the check valve is fully open and a pump provides pressure. For this purpose the actuator (16) of the check valve in its normal position prevents an adjustment of the pressure relief valve. Opening the check valve by the actuator permits adjusting the pressure relief valve (2) and the switch (10) operated through the actuator sends a signal to the microcontroller to drive the pump. When the check valve is opened, the pressure is equalized throughout the system, so that adjusting the response pressure of the pressure relief valve automatically adjusts the system pressure to a desired rated pressure.

A fluid monitoring and control system includes a central hub having a central processor, a user interface and an input/output port. A plurality of control devices communicate with the central hub. Each control device includes a fluid pipe section including a fluid inlet and a fluid outlet. A fluid valve is coupled in series within the fluid pipe section and an electric motor is mechanically connected to the fluid valve. A temperature sensor, pressure sensor and flow rate sensor are coupled to the fluid pipe section monitoring a temperature, pressure and flow rate of the fluid flow within the fluid pipe section. A control device processor is controllably connected to the electric motor, temperature sensor, pressure sensor and flow sensor. A control device input/output port is coupled to the control device processor, the control device input/output port in communication with the input/output port of the central hub.

Method for adjusting a compressed air installation using several electrically driven compressors of what is called the “loaded/unloaded” type and/or the turbo compressor type and/or the compressor type with variable rotational speed, wherein these compressors are each connected to a single compressed air network with their outlets, and wherein use is made of a control box which makes it possible to adjust the pressure in the compressed air network around a target pressure to be set. The adjustment takes place by controlling the flow of one or several of the compressors, in particular in order to increase the overall flow supplied by the compressors when the pressure drops too much, and in order to lower the overall supplied flow when the pressure becomes too high.

Systems, program product, and methods for providing real-time reservoir management of one or more reservoirs across one or more fields are provided. A system can include multiple monitoring wells and at least one injection well in communication with a central facility including a reservoir management computer or server positioned to provide real-time reservoir management of the one or more reservoirs. The computer can include, stored in memory, reservoir management program code, which when executed, can cause the computer to perform the operations of calibrating an injection well model for each of one or more injection wells positioned in a reservoir responsive to real-time injection rate and wellhead pressure data associated therewith, calculating static reservoir pressure for each of the injection wells responsive to the respective calibrated injection well model and responsive to respective surface injection rate and wellhead pressure data, and generating real-time automated isobaric pressure maps.

In a first aspect, a system includes (1) a chamber; (2) a variable speed vacuum pump coupled to the chamber; and (3) a pressure controller coupled to the chamber. The pressure controller compares a set point pressure with a pressure measurement for the chamber and adjusts a flow of gas through the pressure controller based on a difference between the pressure measurement and the set point pressure. The system includes a pressure measurement device coupled to the chamber and to the pressure controller, and a main controller coupled to the variable speed vacuum pump, the pressure controller and the pressure measurement device. The pressure measurement device measures a pressure within the chamber and provides a pressure measurement to the pressure controller and the main controller. The main controller (1) adjusts a speed of the variable speed vacuum pump; and (2) provides the set point pressure to the pressure controller.

At a time when control of a flow rate adjusting valve is initiated from a fully closed state in order to make a measured flow rate equal to a target flow rate, an initial value of a driving signal is set as a parameter by making use of at least one of the type, pressure, and temperature of a fluid.