126 results about "Harmonic oscillator" patented technology

The invention discloses a hemispherical gyroscope phase-locking control optimization method and device, and the method comprises the steps: changing the vibration mode azimuth angles of a hemispherical resonator gyroscope, collecting the phase-locking frequency in real time for each vibration mode azimuth angle, and calculating the phase-locking optimization control force in real time according to the collection result, substituting the phase locking frequency and the phase locking optimization control force into an electrode driving excitation model to calculate a driving signal in real time and transmit the driving signal to a driving electrode, and after the phase locking frequency is stable, collecting a stable phase locking optimization control force corresponding to the vibration mode azimuth angle; according to all the vibration mode azimuth angles and the corresponding stable phase-locking optimization control force, constructing a relation model of the two, solving the relation model to obtain phase-locking optimization parameters, calculating the phase-locking optimization control force according to the phase-locking optimization parameters and the relation model, and substituting the phase-locking optimization control force into an electrode driving excitation model to calculate a driving signal. Therefore, the compensation for the driving signal when the hemispherical resonator gyroscope works normally is realized. According to the invention, the influence of the circumferential frequency difference on the output precision of the harmonic oscillator can be eliminated.

The invention relates to a rapid detection method for the resonant frequency of a hemispherical harmonic oscillator, belongs to the technical field of inertial measurement, solves the problems of long measurement time and low detection precision in the measurement of the second-order resonant frequency of the hemispherical harmonic oscillator in the prior art, and comprises the following steps: S1, providing a voltage excitation source, and applying a broadband sinc excitation signal to the hemispherical harmonic oscillator; s2, continuously recording the detection data in a set continuous recording time period; s3, performing frequency mixing to obtain data after frequency mixing; step S4, carrying out anti-aliasing filtering and down-sampling on the data after frequency mixing; step S5, carrying out N-point fast Fourier transform on the downsampled data to obtain a frequency spectrum of the detection signal; s6, based on the frequency spectrum of the converted detection signal, determining the frequency corresponding to the peak value of the frequency spectrum, and obtaining the measured second-order resonant frequency of the hemispherical harmonic oscillator; and S7, based on the measured second-order resonant frequency of the hemispherical harmonic oscillator, performing frequency phase loop, amplitude loop closed loop and orthogonal closed loop on the hemispherical harmonic oscillator.

The invention discloses a hemispherical harmonic oscillator inner surface processing path correction method, a hemispherical harmonic oscillator inner surface processing method and a hemispherical harmonic oscillator inner surface processing device. The correction method comprises the following steps: processing the inner surface of a hemispherical harmonic oscillator test article based on a set processing path; measuring the radius of the inner sphere of the processed test article, calculating the deviation of the radius of the inner sphere based on the measured value and the design size, obtaining the compensation amount of the Z-axis direction of the processing route based on the deviation, and performing reverse compensation on the Z-axis coordinate of the terminal point of the processing route to obtain a first corrected processing route; reprocessing the hemispherical resonator test article based on the first correction processing route; and measuring the diameter of an inner support column of the test article, calculating translation deviation based on a measured value and a design size, taking the translation deviation as the compensation amount of the X-axis direction of the machining route, and performing reverse compensation on the X-axis coordinates of all points of the first correction machining route to obtain a second correction machining route. The machining method can ensure that the size and the geometrical shape of the machined hemispherical harmonic oscillator are within the design tolerance range.

The hemispherical harmonic oscillator grinding and polishing integrated device comprises an X feeding motion shaft moving in the X direction and a Z feeding motion shaft moving in the Z direction, and a workpiece main shaft used for clamping a hemispherical harmonic oscillator workpiece is installed on a sliding table of the X feeding motion shaft. A tool spindle used for clamping a grinding tool or a polishing tool is installed on the sliding table of the Z feeding motion shaft, a tool setting measuring head is further installed on the sliding table of the X feeding motion shaft, and the position where the tool setting measuring head is located serves as a tool setting point to achieve automatic tool setting after the grinding tool or the polishing tool clamped by the tool spindle is replaced. According to the invention, shafting linkage as few as possible is used on the same device to complete the processes of grinding, polishing and the like of all structures of the harmonic oscillator, so that the workpiece machining error caused by tool size, form and position errors or abrasion can be overcome, and the influence of grinding / polishing force fluctuation on the machining consistency can also be overcome; and the precision, the production efficiency and the yield of workpieces can be effectively improved and guaranteed.

The invention relates to a hemispherical resonator and hemispherical gyroscope parameter and defect identification system and method, and belongs to the technical field of hemispherical resonator gyroscopes. According to the invention, automatic identification of damping non-uniformity, rigidity non-uniformity and 1-3-order quality defect parameters is respectively carried out on the fused quartz hemispherical resonator before and after film coating and the gyroscope header after base assembly, so that the full-flow coverage test of the hemispherical resonator gyroscope is realized; various parameters are identified in the whole process from harmonic oscillator machining forming to the gauge outfit state, the testing precision, the system reusability, the operation convenience and consistency are greatly improved, and the production efficiency is improved.

The invention discloses a detection device and a detection system for harmonic oscillator capacitors of a hemispherical resonator gyroscope, and relates to the technical field of capacitor detection, the detection device comprises a signal detection circuit, a modulation compensation circuit, a differential amplification circuit and a control circuit, the signal detection circuit is connected with the output ends of the two harmonic oscillator capacitors; the modulation compensation circuit is correspondingly connected with two input ends of the signal detection circuit; the differential amplification circuit is correspondingly connected with two output ends of the signal detection circuit; the control circuit is configured to output modulation voltage to the two input ends of the modulation compensation circuit according to a voltage signal of the output end of the differential amplification circuit, and zero setting is carried out on voltage at the connecting positions of the two output ends of the modulation compensation circuit and the two input ends of the signal detection circuit. According to the invention, the modulation compensation circuit is adopted to enable the output ends of the two harmonic oscillator capacitors to work near zero voltage, the circuit has the characteristics of ultrahigh linearity, extremely low temperature drift, rapidness and stability, errors caused by power supply drift can be eliminated, and the detection precision is improved.

The invention discloses a laser ablation and parameter optimization system and method for a hemispherical harmonic oscillator. The system comprises a laser, a control system, a frequency difference test module, a vacuum cavity, and an electric rotating base, a working platform, a vibration test clamp, an electric control excitation hammer and a vibration stopping damper which are arranged in the vacuum cavity, the working platform is mounted on the electric rotating base; the vibration stopping damper, the vibration testing clamp and the electrically-controlled excitation hammer are all installed on the working platform. By means of the parameter optimization method of the ablation system, the fitting matching degree is judged according to experimental samples added in real time, and the fitting function is dynamically updated. Laser trimming parameters are determined according to the fitting function, the accuracy of the ablation amount is guaranteed, and the trimming efficiency and convergence are improved. The method is widely suitable for the size of the harmonic oscillator, and provides technical support for engineering development of the high-precision hemispherical harmonic oscillator.

A recurrent neural network includes a plurality of n damped harmonic oscillators (DHOi), each of the n damped harmonic oscillators being one cell (nci) of the neural network, an input unit (IU) that receives and inputs time-series input data (S (t)), a recurrent connection unit (RCU) that includes, for each of the cells (nci), at least one connection (wi,j) between the input / output node (IOi) of the corresponding cell (nci) and the input / output node (IOj) of at least another one of the cells (ncj) for transmitting the resulting damped harmonic oscillation (hi) output from the input / output node of the corresponding cell (nci) to the input / output node of the another one of the cells (ncj).

The invention discloses a hemispherical resonator three-dimensional quality finishing system and method, and the method comprises the steps: measuring the spherical thickness error data of a hemispherical resonator, decomposing the spherical thickness error data into a harmonic thickness error, selecting an ion beam diameter, and obtaining a corresponding removal function; carrying out edge continuation equivalent to the diameter of the removal function on the harmonic thickness error data to obtain a thickness error matrix, expanding the dimension of the removal function to be the same as the dimension of the thickness error matrix to obtain a material removal matrix, and correcting the thickness error matrix according to an incident angle of the removal function; residence time is solved according to the corrected thickness error matrix and the material removal matrix, then path planning is carried out according to the residence time, a machining G code is generated, and finally the machining G code is used for machining the hemispherical harmonic oscillator. The invention provides an efficient trimming method for harmonic oscillator spherical surface annular domain thickness errors, and solves the problems that coupling vibration is difficult to decouple and three-dimensional mass error distribution cannot be identified during quality trimming according to performance test feedback in a traditional method.

The invention discloses a method and a system for testing vibration characteristics of a metal harmonic oscillator. The method comprises the steps that a frequency response analyzer excites a metal harmonic oscillator to generate vibration, displacement change data of vibration of the metal harmonic oscillator and frequency response data of the metal harmonic oscillator are acquired, and the resonant frequency and the quality factor Q value of the metal harmonic oscillator are calculated based on the displacement change data and the frequency response data; and / or by changing the excitation position for exciting the metal harmonic oscillator, resonant frequency information of different excitation positions is measured, the resonant frequency information of the different excitation positions is analyzed, and the frequency domain image features corresponding to the excitation positions are compared; and / or direct current voltage is applied to the metal harmonic oscillator in different axial directions of the metal harmonic oscillator, and the influence of the direct current voltage on frequency cracking of the metal harmonic oscillator is tested. The technical problem that in the prior art, the metal harmonic oscillator testing process is complex is solved.

The present application relates to the technical field of inertial instrument control. Provided are an energy-coefficient-based resonant gyroscope driving efficiency correction method and system. The method comprises: acquiring vibration voltages of two electrodes of a resonator; on the basis of the vibration voltages, respectively extracting sine-cosine components; performing state calculation on the sine-cosine components on the basis of a dynamics equation, so as to obtain an error signal; performing control calculation on the error signal to obtain a loop control quantity; performing calculation on the basis of a frequency-stabilization control quantity and switching timing to obtain phase signals of electrode driving signals, so as to further calculate energy coefficients; performing synthesis and modulation on the loop control quantity, a standing-wave azimuth angle and the switching timing, so as to obtain driving analog quantities; performing signal scaling on the driving analog quantities on the basis of the energy coefficients, so as to obtain driving signals; and applying the driving signals to the two electrodes, so as to complete closed-loop control.

In order to solve the problems that in an existing hemispherical harmonic oscillator quality leveling technology, the inherent rigid axis positioning efficiency is low, and manual intervention is relied on, the invention provides a method for rapidly positioning the azimuth of an inherent rigid axis of a hemispherical harmonic oscillator based on pulse broadband excitation and quasi standing wave response and a corresponding leveling device. Through an analytical expression of a main standing wave and an auxiliary wave in a second-order four-amplitude resonance working mode, a double-excitation vibration stopping system (comprising two knocking hammers and a vibration stopping hammer with the azimuth difference of 22.5 degrees odd times) is ingeniously designed, and the azimuth of an inherent rigid shaft is quickly positioned by combining orthogonal detection signals. According to the method, the limitation on the excitation direction and the detection direction is relaxed, and through the design of the vibration stopping hammer, the positioning efficiency of the inherent rigid shaft is improved, and the extraction precision of residual vibration on the characteristic parameters can be avoided. The formed hemispherical resonator leveling device provides reliable technical support for batch production of high-precision hemispherical resonator gyroscopes.

The invention discloses an automatic compensable grinding and polishing machining method for a hemispherical harmonic oscillator. The method comprises the steps that a diamond grinding wheel with the first granularity is used for conducting generating method machining on a workpiece according to the first feeding speed; replacing a diamond grinding wheel with a second granularity, performing tool setting to obtain an actual position of machining feeding, and performing generating method machining on the workpiece again according to a second feeding speed from the actual position; the polishing wheel is replaced, tool setting is carried out to obtain the actual position of machining feeding, generating method force control polishing is carried out on the workpiece from the actual position, workpiece in-place measurement is carried out after polishing, compensation polishing is carried out according to the in-place measurement result till the requirement is met, and the hemispherical harmonic oscillator is obtained. The problem of automatic tool changing in the generating method hemispherical harmonic oscillator machining process can be solved, the tolerance requirement for tool manufacturing is lowered, the process time is saved, the machining procedure is completed on the premise of one-time clamping, and the requirement for coaxiality among an inner ball, an outer ball and a supporting rod of a workpiece is met.

The invention provides a special tool and method for efficient machining of a hemispherical harmonic oscillator based on a generation method. The special tool comprises an inner spherical surface, an outer spherical surface and a lip edge machining tool. The inner spherical surface machining tool comprises a first cylindrical section, a first cylinder section and a first annular tool bit located at the free end of the first cylinder section, the section of the first annular tool bit is circular, and the diameter of the circle is larger than the wall thickness of the first cylinder section. The vertical line distance from the circle center to the outer wall surface of the first cylinder section is smaller than that from the circle center to the inner wall surface of the first cylinder section; the outer spherical surface machining tool comprises a second cylindrical section, a second cylindrical section and a second annular tool bit located at the free end of the second cylindrical section, the section of the second annular tool bit is in an L shape, the L-shaped turned edge faces the outer side face of the outer spherical surface machining tool, and the corner of the inner side wall face of the L shape is a 1 / 4 arc; the lip edge machining tool adopts a cylindrical tool bit; a diamond coating is laid on the tool bit. By designing the parameters of the tool bit of the special tool, the machining contact position is fixed, the size precision and the machining efficiency of the inner spherical surface and the outer spherical surface of the harmonic oscillator are improved, and the ultra-precision machining problem of the hemispherical harmonic oscillator is solved.

Disclosed are a quantum state preparation method and apparatus, which belong to the field of quantum computing. The method comprises: using different spin states as targets, and sequentially performing two instances of quantum state preparation on a harmonic oscillator; performing spin state detection on a spin state corresponding to the harmonic oscillator; and when the spin state does not meet a condition, repeating the quantum state preparation and the spin state detection until the spin state meets the condition, so as to obtain a harmonic oscillator of a target quantum state. By means of a cyclic process involving quantum state preparation and spin state detection, it is ensured that a harmonic oscillator is finally prepared into a target quantum state, thereby ensuring the preparation effect.

The invention relates to a hemispherical harmonic oscillator processing method and device for improving the processing precision of an inner circle and an outer circle, and the processing method comprises the steps: 1, trimming a hemispherical harmonic oscillator semi-finished product until the diameters of the inner circle and the outer circle reach respective preset margins; 2, clamping the semi-finished product of the hemispherical harmonic oscillator on a grinding machine, and carrying out preliminary polishing, cleaning and marking on the inner circle and the outer circle; 3, the pneumatic floating shaft is adjusted, and a polishing grinding wheel is used for carrying out semi-finishing polishing on the marked part; 4, monitoring whether all the identifiers are eliminated or not, if so, entering step 5, and otherwise, returning to step 3; 5, finely polishing the inner circle and the outer circle according to a designed polishing program until the inner circle and the outer circle respectively reach respective appointed margins; and 6, after cleaning, detecting the state of the semi-finished product, judging whether defects exist or not, if so, entering a defect detecting and repairing process, otherwise, finishing polishing, and entering a subsequent processing process. The polishing precision of the inner circle and the outer circle is improved, and meanwhile the Q value of the hemispherical harmonic oscillator can be doubled or above.

A film coating process optimization method for improving uniformity of a film on the inner wall of a hemispherical resonator comprises the steps that a finite element simulation model in the film coating process of the hemispherical resonator is established, and multi-angle deposition parameters are obtained; discretizing the process into a time step sequence, and establishing an accumulated film thickness state space; a reinforcement learning framework based on near-end strategy optimization (PPO) is constructed, a state space is designed as the current accumulated film thickness and distribution, and an action space is an optimal angle selected from predefined deposition angles; generating an action strategy through a neural network, and performing iterative optimization to a target thickness; defining a reward function to minimize film thickness uniformity as a target; dynamically adjusting a deposition angle selection strategy; and an optimal strategy with the minimum film thickness uniformity value is screened out, and a corresponding deposition angle and a time distribution scheme thereof are output. The deposition angle and time distribution are dynamically optimized through reinforcement learning, the non-uniformity of the film thickness is remarkably reduced, and the method is suitable for film coating process optimization of harmonic oscillators of different sizes.

The invention discloses a motion signal processing method and device of a metal resonator gyroscope. The method comprises the following steps: acquiring a capacitance change signal caused by vibration of a metal harmonic oscillator of the metal resonant gyroscope as a detection signal; the detection signal is demodulated through reference signals, a first component and a second component are obtained, and the reference signals are sine and cosine signals generated through the direct digital synthesis technology; performing low-pass filtering on the first component and the second component respectively, extracting a direct current component to obtain a first filtering signal, and performing dynamic suppression on a frequency component of a corresponding resonance interference frequency band in the first filtering signal by using an adaptive notch filter to obtain a second filtering signal; calculating the amplitude information of the detection signal based on the second filtering signal, and taking the amplitude information as the amplitude of the motion signal of the metal resonator gyroscope. According to the invention, the technical problem that the motion signal extraction precision of the metal resonator gyroscope is low is solved.

The invention discloses an electrostatic tuning optimization method and device for a metal resonator gyroscope. The method comprises the following steps: establishing a dynamic model based on structural symmetry disturbance and a coupling stiffness effect; based on the dynamic model, calculating modal frequency distribution of the metal resonator gyroscope under different azimuth angles to obtain modal frequency difference data, and based on the modal frequency difference data, constructing an equivalent stiffness distribution model, and quantifying stiffness nonuniformity of the resonant structure to obtain a stiffness matrix; based on the stiffness matrix, voltage control parameters corresponding to the azimuth angles are obtained, the voltage control parameters are applied to the multiple electrostatic tuning electrodes, and an optimized stiffness matrix is obtained; and recalculating the modal frequency of the metal harmonic oscillator based on the optimized stiffness matrix. The invention solves the technical problem that the prior art is mainly suitable for the inertial device before or after packaging but is difficult to effectively eliminate the frequency cracking after packaging.

The invention discloses a gyroscope nonlinear error compensation method, device and equipment and a storage medium, and relates to the technical field of error compensation, and the method comprises the following steps: constructing an initial error compensation matrix, and obtaining a standing wave angular rate error expression corresponding to a target Coriolis vibratory gyroscope; determining a target error item corresponding to the driving non-linear error, applying an initial error compensation matrix to each driving force component, controlling a harmonic oscillator of the target Coriolis vibrating gyroscope to carry out precession, and fitting the standing wave angular rate error of the gyroscope along with the change condition of the standing wave angle to obtain a linear error of the target Coriolis vibrating gyroscope. Obtaining fitting parameters corresponding to the target error term according to the fitting result and the values corresponding to the target compensation matrix parameters; and performing real-time iteration on numerical values of target compensation matrix parameters in the initial error compensation matrix based on the fitting parameters to obtain a target error compensation matrix, and compensating a driving nonlinear error. The numerical values of the key parameters are iterated in an experimental mode, so that the accuracy of error compensation is improved.

The invention discloses a temperature measurement error correction method based on a hemispherical resonator, and the method comprises the steps: obtaining the current measurement data of the hemispherical resonator in a current measurement environment, and uploading the current measurement data to a data storage center and a fusion neural network model; the temperature compensation multilayer perceptron unit of the fusion neural network model outputs a temperature frequency compensation value of the hemispherical harmonic oscillator, and the aging compensation long-short-term memory network unit of the fusion neural network model outputs an aging frequency compensation value of the hemispherical harmonic oscillator. A fusion layer of the fusion neural network model fuses the temperature frequency compensation value and the aging frequency compensation value and then outputs a frequency adjustment value of the hemispherical harmonic oscillator, and a compensated temperature value is obtained according to the frequency adjustment value of the hemispherical harmonic oscillator; and meanwhile, temperature frequency compensation and aging frequency compensation are carried out on the hemispherical harmonic oscillator in the temperature measurement process, so that the compensation precision of the hemispherical harmonic oscillator in the temperature measurement process is improved, and meanwhile, the measurement precision of the hemispherical harmonic oscillator can be effectively improved.

The invention discloses a spherical surface standing wave three-dimensional procession effect three-axis integrated miniature gyroscope spherical shell resonance structure, the structure comprises a spherical harmonic oscillator, a plurality of electrodes and a shell, and the electrodes are used for measuring the vibration mode of the spherical harmonic oscillator to realize the measurement of the angular velocity of three-axis rotation; a supporting column is arranged in the center of the spherical harmonic oscillator, an inner spherical shell is arranged on the outer layer of the spherical harmonic oscillator, the supporting column comprises a plurality of U-shaped supporting beams, an anchor area sphere and a base, the inner spherical shell is constructed to be in a thickness non-uniform distribution form, and the lower end of the inner spherical shell is provided with a hole structure for the supporting column to penetrate through. Wherein the lower boundary of the hole is overlapped with the upper boundary of the base. The electrodes are arranged on the outer side of the spherical harmonic oscillator, a gap between the outer wall of the spherical harmonic oscillator and the inner wall of each electrode is a capacitance gap, the electrodes are arranged around the equator of the spherical harmonic oscillator every 45 degrees, the electrodes are arranged at the 45-degree positions of an upper hemisphere and a lower hemisphere every 90 degrees, and the electrodes are embedded in the upper face of the shell. The three-axis angular velocity measuring device has the remarkable effects that the structure is simple, the space limitation of two-dimensional precession of a traditional hemispherical resonant gyroscope is broken through, and the three-axis angular velocity measurement is realized under a single structure by utilizing the space precession characteristic of spherical harmonic standing waves under the action of multi-degree-of-freedom inertia force.

The invention discloses a hemispherical harmonic oscillator grinding process optimization method based on a laser Doppler vibration meter, relates to the technical field of ultra-precision machining, and aims to solve the problems of difficulty in tool setting of a small-diameter ball head grinding wheel and a hemispherical harmonic oscillator blank and difficulty in real-time monitoring of the grinding condition in the machining process in an existing method. Comprising the steps that a hemispherical harmonic oscillator grinding machine tool is controlled to enable a small-diameter ball head grinding wheel to approach all key parts on the surface of the hemispherical harmonic oscillator to conduct tool setting operation, a laser Doppler vibration meter collects vibration signals of the hemispherical harmonic oscillator, tool setting position coordinates are determined according to the occurrence moment of the vibration signals, and a small-diameter ball head grinding wheel machining track of the hemispherical harmonic oscillator is constructed; the hemispherical harmonic oscillator is ground according to the grinding wheel machining track, the vibration signal of the hemispherical harmonic oscillator in the grinding process is collected through the laser Doppler vibration meter, the grinding state of the hemispherical harmonic oscillator is analyzed according to the specific frequency in the vibration signal, and the method is easy and convenient to implement and high in accuracy.

The invention discloses a standing wave angular rate error compensation method and device, equipment and a storage medium, and relates to the technical field of error compensation, and the method comprises the steps: obtaining a two-dimensional vibration equation corresponding to a harmonic oscillator; obtaining a target standing wave angular rate error formula corresponding to the harmonic oscillator based on the two-dimensional vibration equation, the driving electrode error corresponding to the harmonic oscillator and the detection electrode error; controlling the harmonic oscillator to rotate at different target rotating speeds, acquiring a change relation of a standing wave angular rate error corresponding to the harmonic oscillator along with each target rotating speed in the rotating process, and performing error compensation on the standing wave angular rate according to a target standing wave angular rate error formula and the change relation; wherein the standing wave angular rate error comprises an error generated when the harmonic oscillator rotates under the condition that the rotating speed is not smaller than the target rotating speed. The error generated when the harmonic oscillator rotates under the condition that the rotating speed is not smaller than the target rotating speed is compensated, so that the problem of distortion of the output angle or the angular rate is solved.

The invention belongs to the technical field of precision machining, and relates to a control method for optimizing and uniformly removing a hemispherical harmonic oscillator polishing flow channel tool head, which comprises the following steps of: 1, machining a flow channel base; step 2, establishing a model capable of uniformly removing a height runner on the surface of the workpiece; 3, analyzing and calculating the linear velocity of the hemispherical surface to obtain the linear velocity distribution of the surface of the workpiece in the polishing process; 4, constructing a stress distribution model influencing spherical polishing; 5, according to the linear velocity and pressure distribution modeling of the surface of the polished workpiece and the material removal height, a proper machining gap between the runner and the workpiece is obtained through calculation; according to the method, the wall surface geometrical shape of the polishing flow channel is accurately optimized, the flow field characteristics are actively regulated and controlled, cooperative matching of workpiece surface pressure distribution and a fluid velocity field is achieved, and therefore the uniformity of workpiece surface material removal by a polishing medium is remarkably improved.

The application discloses a rate integration hemispherical resonator gyro angular rate output method, and belongs to the technical field of inertial technology. The application is aimed at solving the problem of large measurement noise of standing wave azimuth angle and poor gyro output precision in the existing rate integration hemispherical resonator gyro control method. In the application, the inherent working frequency of the gyro is taken as the initial value of the forward traveling wave frequency and the reverse traveling wave frequency, and the reference signals of the forward traveling wave and the reverse traveling wave are calculated and obtained; the reference signals are used to demodulate the electrode detection signals by using a low-pass filter, and the secondary demodulation quantity of the gyro angular rate is obtained by using the primary demodulation quantity; the phase difference between the forward traveling wave and the reverse traveling wave of the two groups of electrode detection signals and the forward traveling wave and the reverse traveling wave reference signals is calculated; the forward traveling wave and the reverse traveling wave reference signals are used to calculate the closed-loop real-time tracking of the forward traveling wave and the reverse traveling wave of the hemispherical resonator, and the sensitive axis angular rate measurement value of the rate integration hemispherical resonator gyro is calculated. The application is used for the angular rate output control of the rate integration hemispherical resonator gyro.

The invention relates to a three-axis gyroscope, in particular to a full-decoupling nested wheel ring monolithic three-axis MEMS gyroscope chip, which comprises a harmonic oscillator part and an electrode part, the harmonic oscillator part comprises a wheel structure and a ring structure, the wheel structure comprises a circular anchor block, an annular frame A coaxially arranged on the outer side of the circular anchor block in a sleeving mode and an annular frame B coaxially arranged on the outer side of the annular frame A. Four arc-shaped frames are arranged between the annular frame B and the annular frame A. An arc-shaped mass block is arranged in each arc-shaped frame. The ring structure comprises N annular mass blocks, eight arc-shaped anchor blocks B and eight groups of straight suspension beams B, the N annular mass blocks are sequentially and coaxially arranged on the outer side of the annular frame B in a sleeving mode from inside to outside, the eight arc-shaped anchor blocks B are all connected to the inner side face of the annular mass block located on the innermost side, and each group of straight suspension beams B comprises N-1 straight suspension beams B. The three-axis gyroscope solves the problems that an existing three-axis gyroscope is poor in reliability and low in measurement precision, and is suitable for high-precision and advanced fields such as military navigation and automatic driving.

The application discloses a kind of based on CadencePspice software's hemispherical resonator gyro circuit model, is realized by calling the built-in element of CadencePspice software;Including: drive module, for providing an excitation signal;First conversion module, for converting excitation signal into the first signal f (x) representing x-axis electrostatic force;First simulation module, for simulating the second signal x representing the vibration displacement of x-axis and y-axis based on first signal f (x), third signal y;Second simulation module, for simulating the change of the capacitance value between resonator and detection electrode based on second signal x and third signal y, ninth signal v0, tenth signal v90, eleventh signal v45, twelfth signal v135;And second conversion module, for carrying out charge amplification processing based on ninth signal v0, tenth signal v90, eleventh signal v45, twelfth signal v135 and output corresponding detection signal.The application can improve the accuracy of simulation.

The invention provides a hemispherical resonator gyroscope error harmonic wave identification method and a hemispherical resonator gyroscope error harmonic wave identification device. The hemispherical resonator gyroscope comprises a hemispherical resonator and an electrode for vibration excitation and vibration displacement detection. The method comprises the following steps: applying electric excitation to the electrode of the hemispherical resonator gyroscope; detecting and resolving electric signals of different electrodes to obtain a displacement relationship between a working mode and a coupling mode of the standing wave shaft vibration of the hemispherical harmonic oscillator under a preset circumferential angle; enabling a standing wave axis of the hemispherical resonator to traverse the whole circumference by controlling the working mode of the hemispherical resonator gyroscope, so as to obtain a displacement relationship between a working mode and a coupling mode under different circumferential angles; the size of error harmonics and circumferential azimuth information of the hemispherical resonator gyroscope are extracted according to the displacement relation between the working mode and the coupling mode under different circumferential angles.

The invention relates to the technical field of pressure detection, in particular to a quartz pressure sensor with double harmonic oscillators orthogonal in crystal axis, which comprises two quartz end caps, and a positive partial harmonic oscillator, a quartz ring and a negative partial harmonic oscillator which are arranged between the two quartz end caps, the positive partial harmonic oscillator and the negative partial harmonic oscillator are respectively bonded with two ends of the quartz ring, and the internal force transmission beams of the positively biased harmonic oscillator and the negatively biased harmonic oscillator are in an orthogonal vertical relationship to form an orthogonal double harmonic oscillator. Compared with a quartz vibrating diaphragm type pressure sensing structure in the market, the pressure sensor adopts the design of the orthogonal double harmonic oscillators, and the sensitivity of the pressure sensor is effectively improved by utilizing the characteristic that the force frequency coefficients of the two harmonic oscillators are opposite.